US4849608A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for heat-treating wafers
Assignee: Dainippon Screen Manufacturing Co Ltd
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Filing: 1988-02-11
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Granted: 1989-07-18
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Expires: 2008-02-11
Abstract
Abstract An apparatus for heat-treating wafers including: a cylindrical body having an infrared reflection film formed on an interior peripheral surface thereof; a furnace core tube disposed within the cylindrical body for accommodating therein the wafers; a heater element provided within the cylindrical body for heating the furnace core tube, the heater being positioned outwardly remotely from an exterior peripheral surface of the furnace core tube in a manner to surround the tube; and a plurality of insulating heat-resistant bar members provided within the cylindrical body and extending in a direction parallel to the central axis of the furnace core tube for supporting the heater element.
Inventors
- 👤 Yusuke Muraoka
- 👤 Atsushi Tamada
- 👤 Takamasa Sakai
- 👤 Hitoshi Haibara
- 👤 Keiji Nakagawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:19
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0436; C; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B31/00; C30B31/06; C30B31/12; C30B35/00; C30B35/002; F; F27; F27D; F27D1/00; F27D1/0003; F27D1/0033; F27D1/0036; F27D11/00; F27D11/02
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
129 words
An apparatus for heat-treating wafers, comprising: a hollow cylindrical body having an infrared reflection film formed on an interior peripheral surface thereof; a furnace core tube disposed within said cylindrical body for accommodating wafers placed therein for heat-treatment; heating means provided within said cylinderical body for heating said furnace core tube, said heating means being positioned outwardly remote from an exterior peripheral surface of said furnace core tube in such a manner as to surround said tube; and a plurality of insulating heat-resistant bar members provided within said cylindrical body and extending outside said core tube in a direction parallel to an axis of said furnace core tube, said bar members supporting said heating means in a position inwardly remote from the interior peripheral surface of said cylindrical body.
Claim 2
Independent Claim
129 words
An apparatus for heat-treating wafers, comprising: a hollow cylindrical body having an infrared reflection film formed on an interior peripheral surface thereof; a furnace core tube disposed within said cylindrical body for accommodating wafers placed therein for heat-treatment; heating means provided within said cylinderical body for heating said furnace core tube, said heating means being positioned outwardly remote from an exterior peripheral surface of said furnace core tube in such a manner as to surround said tube; and a plurality of insulating heat-resistant bar members provided within said cylindrical body and extending outside said core tube in a direction parallel to an axis of said furnace core tube, said bar members supporting said heating means in a position inwardly remote from the interior peripheral surface of said cylindrical body.
Claim 3
Dependent Claim
14 words
An apparatus according to claim 1, wherein: said bar members comprise a ceramic material.
Claim 4
Dependent Claim
15 words
An apparatus according to claim 1, wherein: said film comprises a thin layer of gold.
Claim 5
Dependent Claim
15 words
An apparatus according to claim 1, wherein: said film comprises a thin layer of aluminum.
Claim 6
Independent Claim
131 words
An apparatus for heat-treating wafers, comprising: a hollow cylindrical body; a furnace core tube disposed within said cylindrical body for accomodating wafers placed therein for heat-treatment; heating means provided within said cylindrical body for heating said furnace core tube, said heating means being positioned outwardly remote from an exterior peripheral surface of said furnace core tube in such a manner as to surround said tube; a plurality of insulating heat-resistant bar members provided within said cylindrical body and extending in a direction parallel to a central axis of said furnace core tube, said bar members supporting said heating means in a position inwardly remote from the interior peripheral surface of said cylindrical body; and a plurality of supporting members mounted on said bar members for cooperatively supporting said furnace core tube.
Claim 7
Independent Claim
131 words
An apparatus for heat-treating wafers, comprising: a hollow cylindrical body; a furnace core tube disposed within said cylindrical body for accomodating wafers placed therein for heat-treatment; heating means provided within said cylindrical body for heating said furnace core tube, said heating means being positioned outwardly remote from an exterior peripheral surface of said furnace core tube in such a manner as to surround said tube; a plurality of insulating heat-resistant bar members provided within said cylindrical body and extending in a direction parallel to a central axis of said furnace core tube, said bar members supporting said heating means in a position inwardly remote from the interior peripheral surface of said cylindrical body; and a plurality of supporting members mounted on said bar members for cooperatively supporting said furnace core tube.
Claim 8
Dependent Claim
20 words
An appartaus according to claim 5, wherein: said heating means comprises a heater member helically wound at a predetermined pitch.
Claim 9
Dependent Claim
27 words
An apparatus according to claim 6, wherein: a plurality of spacer members are mounted on said bar members for maintaining said heater member at said predetermined pitch.
Claim 10
Dependent Claim
20 words
An apparatus according to claim 5, wherein: said supporting members are cylindrical members with said spacer members externally mounted thereto.
Claim 11
Independent Claim
128 words
An apparatus for heat-treating wafers, comprising: a hollow cylindrical body having an infrared reflection film formed on an interior peripheral surface thereof; a furnace core tube disposed within said cylindrical body, for accommodating wafers; heating means provided within said cylindrical body for heating said furnace core tube, said heating means being positioned in a space defined by an interior peripheral surface of said cylindrical body and an exterior peripheral surface of said furnace core tube in such a manner as to surround said tube; a plurality of insulating heat-resistant bar members located in said space and extending in a direction parallel to an axis of said furnace core tube, said bar members supporting said heating means out of contact with said furnace core tube and said cylindrical body
Claim 12
Independent Claim
128 words
An apparatus for heat-treating wafers, comprising: a hollow cylindrical body having an infrared reflection film formed on an interior peripheral surface thereof; a furnace core tube disposed within said cylindrical body, for accommodating wafers; heating means provided within said cylindrical body for heating said furnace core tube, said heating means being positioned in a space defined by an interior peripheral surface of said cylindrical body and an exterior peripheral surface of said furnace core tube in such a manner as to surround said tube; a plurality of insulating heat-resistant bar members located in said space and extending in a direction parallel to an axis of said furnace core tube, said bar members supporting said heating means out of contact with said furnace core tube and said cylindrical body
Claim 13
Dependent Claim
25 words
An apparatus according to claim 9, further comprising: a plurality of supporting members mounted on said bar members for cooperatively supporting said furnace core tube.
Claim 14
Dependent Claim
15 words
An apparatus according to claim 9, wherein: said film comprises a thin layer of gold.
Claim 15
Dependent Claim
15 words
An apparatus according to claim 9, wherein: said film comprises a thin layer of aluminum.
Claim 16
Dependent Claim
22 words
An apparatus according to claim 9, further comprising: means for flowing a coolant flow in a generally axial direction through said space.
Claim 17
Dependent Claim
29 words
An apparatus according to claim 9, wherein: said heating means comprises a heater element, having an undulating form along its length, that is helically wound at a predetermined pitch.
Claim 18
Dependent Claim
27 words
An apparatus according to claim 14, wherein: a plurality of spacer members are mounted on said bar members for maintaining said heater member at said predetermined pitch.
Claim 19
Dependent Claim
19 words
An apparatus according to claim 15, further comprising: means for upholding said core tube, fitted to said spacer members.
Claim 20
Independent Claim
128 words
An apparatus for heat-treating wafers, comprising: a hollow cylindrical body having an infrared reflection film formed on an exteiror peripheral surface thereof; a furnace core tube disposed within said cylindrical body, for accommodating wafers; heating means provided within said cylindrical body for heating said furnace core tube, said heating means being positioned in a space defined by the interior peripheral surface of said cylindrical body and an exterior peripheral surface of said furnace core tube in such a manner as to surround said tube; a plurality of insulating heat-resistant bar members located in said space and extending in a direction parallel to an axis of said furnace core tube, said bar members supporting said heating means out of contact with said furnace core tube and said cylindrical body.
Claim 21
Independent Claim
128 words
An apparatus for heat-treating wafers, comprising: a hollow cylindrical body having an infrared reflection film formed on an exteiror peripheral surface thereof; a furnace core tube disposed within said cylindrical body, for accommodating wafers; heating means provided within said cylindrical body for heating said furnace core tube, said heating means being positioned in a space defined by the interior peripheral surface of said cylindrical body and an exterior peripheral surface of said furnace core tube in such a manner as to surround said tube; a plurality of insulating heat-resistant bar members located in said space and extending in a direction parallel to an axis of said furnace core tube, said bar members supporting said heating means out of contact with said furnace core tube and said cylindrical body.
Claim 22
Dependent Claim
14 words
An apparatus according to claim 17, wherein: said bar members comprise a ceramic material.
Claim 23
Dependent Claim
25 words
An apparatus according to claim 17, further comprising: a plurality of supporting members mounted on said bar members for cooperatively supporting said furnace core tube.
Claim 24
Dependent Claim
15 words
An apparatus according to claim 19, wherein: said film comprises a thin layer of gold.
Claim 25
Dependent Claim
15 words
An apparatus according to claim 19, wherein: said film comprises a thin layer of aluminum.
Claim 26
Dependent Claim
15 words
An apparatus according to claim 17, wherein: said film comprises a thin layer of gold.
Claim 27
Dependent Claim
15 words
An apparatus according to claim 17, wherein: said film comprises a thin layer of aluminum.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-07-17 | 1993-01-16 | 1993-07-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-07-17 | 1997-01-16 | 1997-07-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-07-17 | 2001-01-16 | 2001-07-18 | $7700.00 | Window Closed / Lapsed |