Manufacturing method of an X-ray exposure mask

Claim 1

A method of manufacturing an X-ray exposure mask comprising the steps of: forming a membrane comprising a layer of silicon carbide on a silicon substrate; processing a top surface of the membrane such that the top surface becomes a mirror-flat top surface; depositing a layer of an X-ray absorbing material on the mirror-flat top surface of the membrane; and patterning the layer of the X-ray absorbing material according to a desired semiconductor pattern, said step of processing comprising the steps of growing an organic material layer on said silicon carbide membrane such that the organic material layer has a mirror-flat top surface, and etching the organic material layer starting from the mirror-flat top surface until the silicon carbide layer underneath the organic material layer is exposed.

Claim 2

A method of manufacturing an X-ray exposure mask comprising the steps of: forming a membrane comprising a layer of silicon carbide on a silicon substrate; processing a top surface of the membrane such that the top surface becomes a mirror-flat top surface; depositing a layer of an X-ray absorbing material on the mirror-flat top surface of the membrane; and patterning the layer of the X-ray absorbing material according to a desired semiconductor pattern, said step of processing comprising the steps of growing an organic material layer on said silicon carbide membrane such that the organic material layer has a mirror-flat top surface, and etching the organic material layer starting from the mirror-flat top surface until the silicon carbide layer underneath the organic material layer is exposed.

Claim 4

A method of manufacturing an x-ray exposure mask comprising the steps of: forming a membrane comprising a layer of silicon carbide on a silicon substrate; processing a top surface of the membrane such that the to surface becomes a mirror-flat top surface; depositing a layer of an X-ray absorbing material on the mirror-flat top surface of the membrane; and patterning the layer of the X-ray absorbing material according to a desired semiconductor pattern, said step of processing the top surface of the membrane comprising a step of polishing a top surface of the silicon carbide layer such that the top surface of the silicon carbide layer becomes a mirror-flat surface.

Claim 5

A method of manufacturing an x-ray exposure mask comprising the steps of: forming a membrane comprising a layer of silicon carbide on a silicon substrate; processing a top surface of the membrane such that the to surface becomes a mirror-flat top surface; depositing a layer of an X-ray absorbing material on the mirror-flat top surface of the membrane; and patterning the layer of the X-ray absorbing material according to a desired semiconductor pattern, said step of processing the top surface of the membrane comprising a step of polishing a top surface of the silicon carbide layer such that the top surface of the silicon carbide layer becomes a mirror-flat surface.

Claim 6

A method of manufacturing an X-ray exposure mask comprising the steps of: forming a membrane comprising a layer of silicon carbide on a silicon substrate; processing a top surface of the membrane such that the top surface becomes a mirror-flat top surface; depositing a layer of an X-ray absorbing material on the mirror-flat top surface of the membrane; and patterning the layer of the X-ray absorbing material according to a desired semiconductor pattern, said step of forming the membrane comprising a step of growing an amorphous carbon layer on said silicon carbide layer by a plasma chemical vapor deposition process using a mixture of hydrocarbon and an inert gas, and said step of processing comprises a step of etching the amorphous carbon layer simultaneously to the growth of the amorphous carbon layer.

Claim 7

A method of manufacturing an X-ray exposure mask comprising the steps of: forming a membrane comprising a layer of silicon carbide on a silicon substrate; processing a top surface of the membrane such that the top surface becomes a mirror-flat top surface; depositing a layer of an X-ray absorbing material on the mirror-flat top surface of the membrane; and patterning the layer of the X-ray absorbing material according to a desired semiconductor pattern, said step of forming the membrane comprising a step of growing an amorphous carbon layer on said silicon carbide layer by a plasma chemical vapor deposition process using a mixture of hydrocarbon and an inert gas, and said step of processing comprises a step of etching the amorphous carbon layer simultaneously to the growth of the amorphous carbon layer.

Claim 8

A method of manufacturing an X-ray exposure mask comprising the steps of: forming a membrane comprising a layer of silicon carbide on a silicon substrate; processing a top surface of the membrane such that the top surface becomes a mirror-flat top surface; depositing a layer of an X-ray absorbing material on the mirror-flat top surface of the membrane; and patterning the layer of the X-ray absorbing material according to a desired semiconductor pattern, said step of processing comprising a step of etching a top surface of the silicon carbide layer by sputter etching such that the top surface of the silicon carbide layer becomes a mirror-flat surface.

Claim 9

A method of manufacturing an X-ray exposure mask comprising the steps of: forming a membrane comprising a layer of silicon carbide on a silicon substrate; processing a top surface of the membrane such that the top surface becomes a mirror-flat top surface; depositing a layer of an X-ray absorbing material on the mirror-flat top surface of the membrane; and patterning the layer of the X-ray absorbing material according to a desired semiconductor pattern, said step of processing comprising a step of etching a top surface of the silicon carbide layer by sputter etching such that the top surface of the silicon carbide layer becomes a mirror-flat surface.

Claim 10

A method of manufacturing an X-ray exposure mask comprising the steps of: forming a membrane comprising a layer of silicon carbide on a silicon substrate; processing a top surface of the membrane such that the top surface becomes a mirror-flat top surface; depositing a layer of an X-ray absorbing material on the mirror-flat top surface of the membrane; and patterning the layer of the X-ray absorbing material according to a desired semiconductor pattern, said step of forming the membrane comprising a step of providing a layer of a low-melting point glass on said silicon carbide layer, and said step of processing comprises a step of reflowing the glass layer such that the glass layer has a mirror-flat surface.

Claim 11

A method of manufacturing an X-ray exposure mask comprising the steps of: forming a membrane comprising a layer of silicon carbide on a silicon substrate; processing a top surface of the membrane such that the top surface becomes a mirror-flat top surface; depositing a layer of an X-ray absorbing material on the mirror-flat top surface of the membrane; and patterning the layer of the X-ray absorbing material according to a desired semiconductor pattern, said step of forming the membrane comprising a step of providing a layer of a low-melting point glass on said silicon carbide layer, and said step of processing comprises a step of reflowing the glass layer such that the glass layer has a mirror-flat surface.

Claim 13

A method of manufacturing an X-ray exposure mask comprising the steps of: forming a membrane comprising a layer of silicon carbide on a silicon substrate; processing a top surface of the membrane such that the top surface becomes a mirror-flat top surface; depositing a layer of an X-ray absorbing material on the mirror-flat top surface of the membrane; and patterning the layer of the X-ray absorbing material according to a desired semiconductor pattern, said step of forming the membrane comprising the steps of providing a glass layer on the silicon carbide layer and subsequently providing a supporting body of the membrane on a rear side of the silicon substrate, and said step of processing comprises etching the glass layer, after the step of providing the supporting body, starting from its top surface, so that dusts deposited on the glass layer during the step of providing the supporting body are removed together with a part of the glass layer, said etching being performed such that the exposed top surface of the glass layer becomes a mirror-flat surface.

Claim 14

A method of manufacturing an X-ray exposure mask comprising the steps of: forming a membrane comprising a layer of silicon carbide on a silicon substrate; processing a top surface of the membrane such that the top surface becomes a mirror-flat top surface; depositing a layer of an X-ray absorbing material on the mirror-flat top surface of the membrane; and patterning the layer of the X-ray absorbing material according to a desired semiconductor pattern, said step of forming the membrane comprising the steps of providing a glass layer on the silicon carbide layer and subsequently providing a supporting body of the membrane on a rear side of the silicon substrate, and said step of processing comprises etching the glass layer, after the step of providing the supporting body, starting from its top surface, so that dusts deposited on the glass layer during the step of providing the supporting body are removed together with a part of the glass layer, said etching being performed such that the exposed top surface of the glass layer becomes a mirror-flat surface.