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US5178658A
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Method for forming an optical waveguide by selective volatization
Assignee: Charles Stark Draper Laboratory Inc
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Filing: 1991-09-17
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Granted: 1993-01-12
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Expires: 2011-09-17
Abstract
Abstract A method of forming an optical waveguide which includes the steps of forming on a substrate a waveguide layer including at least one host medium and one dopant medium, one of which is more volatile than the other; and heating the waveguide layer to selectively volatize the more volatile medium along a path, raising the index of refraction and creating a waveguide along the path.
Inventors
- 👤 Richard P. Tumminelli
- 👤 Farhad Hakimi
- 👤 John R. Haavisto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 14:20
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/34; C03C17/36; C03C17/3602; C03C17/3607; C03C17/22; C03C17/23; C03C17/3642; C03C17/3657; C03C23/00; C03C23/0005; C03C23/0025; C03C23/007; G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; C03C2217/00; C03C2217/20; C03C2217/21; C03C2217/213; C03C2217/24; C03C2218/00; C03C2218/30; C03C2218/32; G02B2006/12166; G02B2006/12169; G02B2006/12171
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
91 words
A method of forming an optical waveguide comprising: forming on a substrate a waveguide layer containing at least one host and a plurality of dopants each of which separately tends to raise the index of refraction of said layer and in combination have an effect on the index of refraction which is less than the cumulative effect of each of the dopants; and heating said waveguide layer to selectively volatize the more volatile of said dopants along a path raising the index of refraction and creating a waveguide along the path.
Claim 2
Independent Claim
91 words
A method of forming an optical waveguide comprising: forming on a substrate a waveguide layer containing at least one host and a plurality of dopants each of which separately tends to raise the index of refraction of said layer and in combination have an effect on the index of refraction which is less than the cumulative effect of each of the dopants; and heating said waveguide layer to selectively volatize the more volatile of said dopants along a path raising the index of refraction and creating a waveguide along the path.
Claim 3
Dependent Claim
17 words
The method of forming an optical waveguide of claim 1 in which forming includes depositing said layer.
Claim 4
Dependent Claim
18 words
The method of forming an optical waveguide of claim 1 in which one of said hosts is silica.
Claim 5
Dependent Claim
23 words
The method of forming an optical waveguide of claim 1 which includes at least one dopant which is more volatile than said host.
Claim 6
Dependent Claim
29 words
The method of forming an optical waveguide of claim 1 in which the heating of said waveguide layer to selectively volatize includes irradiating said path with a particle beam.
Claim 7
Dependent Claim
29 words
The method of forming an optical waveguide of claim 1 in which the heating of said waveguide layer to selectively volatize includes irradiating said path with a photon beam.
Claim 8
Dependent Claim
19 words
The method of forming an optical waveguide of claim 6 in which said photon beam is a laser beam.
Claim 9
Dependent Claim
53 words
The method of forming an optical waveguide of claim 1 in which the heating of said waveguide layer to selectively volatize includes covering said layer with a blocking mask which exposes the area of said path and increasing the temperature of said layer to volatize the more volatile medium in the exposed path.
Claim 10
Dependent Claim
32 words
The method of forming an optical waveguide according to claim 1 in which said dopants include aluminum and phosphorous and phosphorous is the more volatile dopant relative to aluminum and said host.
Claim 11
Independent Claim
97 words
A method of forming an optical waveguide comprising: depositing on a substrate a single, doped silica layer containing plurality of dopants each of which separately tends to raise the index of refraction of said layer and in combination have an effect on the index of refraction which is less than the cumulative effect of each of the dopants; and irradiating with a laser beam a path along the layer for heating, and selectively volatizing said at least one volatile dopant and raising the index of refraction of said layer to create a waveguide along the irradiated path.
Claim 12
Independent Claim
97 words
A method of forming an optical waveguide comprising: depositing on a substrate a single, doped silica layer containing plurality of dopants each of which separately tends to raise the index of refraction of said layer and in combination have an effect on the index of refraction which is less than the cumulative effect of each of the dopants; and irradiating with a laser beam a path along the layer for heating, and selectively volatizing said at least one volatile dopant and raising the index of refraction of said layer to create a waveguide along the irradiated path.
Claim 13
Dependent Claim
17 words
The method of forming an optical waveguide according to claim 1 in which said substrate is silica.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-01-12 | 1996-07-13 | 1997-01-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-01-12 | 2000-07-13 | 2001-01-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-01-12 | 2004-07-13 | 2005-01-12 | $7700.00 | Window Closed / Lapsed |