Patent US5176806A successfully refreshed from Google Patents.
US5176806A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Soft magnetic alloy film
Assignee: Alps Alpine Co Ltd
•
Filing: 1990-09-27
•
Granted: 1993-01-05
•
Expires: 2010-09-27
Abstract
Abstract A soft magnetic alloy film has a composition formula expressed by Fex Mz Cw. M is at least one metallic element selected from a group consisting of Ti, Zr, Hf, Nb, Ta, Mo or W, or a mixture of these metallic elements. The composition ratio of x, z and w satisfies the relation expressed by 50 atomic % ≦x≦96 atomic %, 2 atomic % ≦z≦30 atomic %, 0.5 atomic % ≦w≦25 atomic %, and x+z+w=100. The metallic structure of the soft magnetic alloy film basically consists of crystal grains having an average grain size of 0.08 μm or below. The metallic structure contains the crystal phase of carbide of the element M.
Inventors
- 👤 Naoya Hasegawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 12:02
CPC Classifications
H; H01; H01F; H01F1/00; H01F1/01; H01F1/03; H01F1/12; H01F1/14; G; G11; G11B; G11B5/00; G11B5/127; G11B5/31; G11B5/3109; H01F10/00; H01F10/08; H01F10/10; H01F10/12; H01F10/14; H01F41/00; H01F41/14; H01F41/18
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
159 words
A method of forming a soft magnetic alloy film comprising a film composition with a general formula of Fex Mz Cw, wherein M is one or more metallic elements selected from a group consisting of Zr, Hf, or Ta, in that said composition has a ratio of x, z and w which satisfies a relation expressed by the following equations: ##EQU3## said soft magnetic alloy film having a metallic structure basically consisting of crystal grains having an average grain size of 0.08 μm or below and said metallic structure containing a crystal phase of carbide of said element M; said method comprising the steps of: depositing said film using a composite target comprising an Fe target and one or more pellets of M disposed thereon, said depositing being performed in the presence of a carbon source and using sputtering deposition techniques; and heat treating said film at least 400° C. for 20 minutes to precipitate a crystallite comprising M-C.
Claim 2
Independent Claim
159 words
A method of forming a soft magnetic alloy film comprising a film composition with a general formula of Fex Mz Cw, wherein M is one or more metallic elements selected from a group consisting of Zr, Hf, or Ta, in that said composition has a ratio of x, z and w which satisfies a relation expressed by the following equations: ##EQU3## said soft magnetic alloy film having a metallic structure basically consisting of crystal grains having an average grain size of 0.08 μm or below and said metallic structure containing a crystal phase of carbide of said element M; said method comprising the steps of: depositing said film using a composite target comprising an Fe target and one or more pellets of M disposed thereon, said depositing being performed in the presence of a carbon source and using sputtering deposition techniques; and heat treating said film at least 400° C. for 20 minutes to precipitate a crystallite comprising M-C.
Claim 3
Dependent Claim
30 words
A method according to claim 1, wherein said step of depositing is performed using RF double-pole sputtering, DC sputtering, magnetron sputtering, 3-pole sputtering, ion beam sputtering or double-target sputtering techniques.
Claim 4
Dependent Claim
17 words
A method according to claim 2 wherein said step of depositing is performed using RF double-pole sputtering.
Claim 5
Dependent Claim
20 words
A method according to claim 2, wherein said carbon source is a pellet of graphite disposed on said Fe target.
Claim 6
Dependent Claim
30 words
A method according to claim 2, wherein said carbon source is a hydrocarbon gas, and said sputtering is performed in an atmosphere comprising an inert gas and said hydrocarbon gas.
Claim 7
Dependent Claim
18 words
A method according to claim 5, wherein said inert gas is argon and said hydrocarbon gas is methane.
Claim 8
Dependent Claim
21 words
A method according to claim 2, wherein said step of heat treating further comprises exposing said film to a magnetostatic field.
Claim 9
Dependent Claim
22 words
A method according to claim 2, wherein said step of heat treating further comprises exposing said film to a rotating magnetic field.
Claim 10
Dependent Claim
18 words
A method according to claim 2, wherein said film is heat treated at 650° C. for 20 minutes.
Claim 11
Dependent Claim
22 words
A method according to claim 2, wherein said step of heat treating precipitates at least 50% of said crystallite from said film.
Claim 12
Independent Claim
172 words
A method of forming a soft magnetic alloy film comprising a film composition with a general formula of FexTyMzCw, wherein T is Co, and M is one or more metallic elements selected from a group consisting of Zr, Hf, or Ta, in that said composition has a ratio of x, y, z and w which satisfies a relation expressed by the following equations: ##EQU4## said soft magnetic alloy film having a metallic structure basically consisting of crystal grains having an average grain size of 0.08 μm or below and said metallic structure containing a crystal phase of carbide of said element M; said method comprising the steps of: depositing said film using a composite target comprising an Fe target, one or more pellets of M, and a pellet of T, said pellets being disposed on said Fe target, said depositing being performed in the presence of a carbon source and using sputtering deposition techniques; and heat treating said film at least 400° C. for 20 minutes to precipitate a crystalline comprising M-C.
Claim 13
Independent Claim
172 words
A method of forming a soft magnetic alloy film comprising a film composition with a general formula of FexTyMzCw, wherein T is Co, and M is one or more metallic elements selected from a group consisting of Zr, Hf, or Ta, in that said composition has a ratio of x, y, z and w which satisfies a relation expressed by the following equations: ##EQU4## said soft magnetic alloy film having a metallic structure basically consisting of crystal grains having an average grain size of 0.08 μm or below and said metallic structure containing a crystal phase of carbide of said element M; said method comprising the steps of: depositing said film using a composite target comprising an Fe target, one or more pellets of M, and a pellet of T, said pellets being disposed on said Fe target, said depositing being performed in the presence of a carbon source and using sputtering deposition techniques; and heat treating said film at least 400° C. for 20 minutes to precipitate a crystalline comprising M-C.
Claim 14
Dependent Claim
17 words
A method according to claim 11, wherein said step of depositing is performed using RF double-pole sputtering.
Claim 15
Dependent Claim
20 words
A method according to claim 11, wherein said carbon source is a pellet of graphite disposed on said Fe target.
Claim 16
Dependent Claim
30 words
A method according to claim 11, wherein said carbon source is a hydrocarbon gas, and said sputtering is performed in an atmosphere comprising an inert gas and said hydrocarbon gas.
Claim 17
Dependent Claim
18 words
A method according to claim 14, wherein said inert gas is argon and said hydrocarbon gas is methane.
Claim 18
Dependent Claim
21 words
A method according to claim 11, wherein said step of heat treating further comprises exposing said film to a magnetostatic field.
Claim 19
Dependent Claim
22 words
A method according to claim 11, wherein said step of heat treating further comprises exposing said film to a rotating magnetic field.
Claim 20
Dependent Claim
18 words
A method according to claim 11, wherein said film is heat treated at 650° C. for 20 minutes.
Claim 21
Dependent Claim
22 words
A method according to claim 11, wherein said step of heat treating precipitates at least 50% of said crystallite from said film.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-01-05 | 1996-07-06 | 1997-01-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-01-05 | 2000-07-06 | 2001-01-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-01-05 | 2004-07-06 | 2005-01-05 | $7700.00 | Window Closed / Lapsed |