Patent US5176004A successfully refreshed from Google Patents.
US5176004A
Expired / Lapsed
US
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Electronically controlled cryopump and network interface
Assignee: Azenta Inc
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Filing: 1991-06-18
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Granted: 1993-01-05
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Expires: 2011-06-18
Abstract
Abstract A network of cryopumps, each having an electronic regeneration controller, is coupled to a common rough pump. Each regeneration controller operates independently except that each is inhibited from opening its roughing valve to the common rough pump. Each regeneration controller only proceeds to open the roughing valve after it has received a token from a network interface terminal. The network interface terminal may control multiple groups of cryopumps coupled to respective common rough pumps. The regeneration controllers are removable modules connected to the cryopumps. A PROM is provided for each cryopump to the side of the connector opposite to the module. The PROM stores data specific to the cryopump and retains the data for the cryopump with replacement of the controller module.
Inventors
- 👤 Peter W. Gaudet
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 23:14
CPC Classifications
F; F04; F04B; F04B37/00; F04B37/06; F04B37/08; F25; F25B; F25B2309/00; F25B2309/002; Y; Y10; Y10S; Y10S417/00; Y10S417/901
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
89 words
A cryopump system comprising: a plurality of cryopumps, each having a roughing valve; a common rough pump coupled to each of the cryopumps through the respective roughing valves; a plurality of programmable regeneration controllers, each coupled to a cryopump to control a regeneration cycle of the cryopump, the cycle including opening of the cryopump roughing valve, each regeneration controller independently following an individual regeneration program; and means for inhibiting each regeneration controller from opening its respective roughing valve where another roughing valve is open to the common rough pump.
Claim 2
Dependent Claim
89 words
A cryopump system comprising: a plurality of cryopumps, each having a roughing valve; a common rough pump coupled to each of the cryopumps through the respective roughing valves; a plurality of programmable regeneration controllers, each coupled to a cryopump to control a regeneration cycle of the cryopump, the cycle including opening of the cryopump roughing valve, each regeneration controller independently following an individual regeneration program; and means for inhibiting each regeneration controller from opening its respective roughing valve where another roughing valve is open to the common rough pump.
Claim 3
Dependent Claim
28 words
A cryopump system as claimed in claim 1 wherein the means for inhibiting comprises a central controller which monitors requirements of the individual regeneration controllers for rough pumping.
Claim 4
Dependent Claim
24 words
A cryopump system as claimed in claim 2 wherein the central controller monitors and inhibits other roughing valves connected to chambers other than cryopumps.
Claim 5
Dependent Claim
28 words
A cryopump system as claimed in claim 2 wherein a regeneration controller is inhibited from opening a roughing valve until it receives a token from the central controller.
Claim 6
Dependent Claim
41 words
A cryopump system as claimed in claim 2 wherein each regeneration controller comprises a settable roughing valve interlock, opening of a roughing valve being inhibited when the interlock is set but being permitted without inhibition when the interlock is not set.
Claim 7
Dependent Claim
26 words
A cryopump system as claimed in claim 2 wherein the central controller monitors multiple groups of cryopumps, each group coupled to a respective common rough pump.
Claim 8
Dependent Claim
23 words
A cryopump system as claimed in claim 2 wherein the central controller is coupled between the individual regeneration controllers and a system controller.
Claim 9
Independent Claim
68 words
A method of controlling cryopumps comprising: coupling a plurality of cryopumps through respective roughing valves to a common rough pump; providing an electronic regeneration controller for each of the plural cryopumps; independently programming individual regeneration controllers to follow independent regeneration cycles; and inhibiting opening of a roughing valve during the regeneration cycle until it is confirmed that no other roughing valve is opened to a common rough pump.
Claim 10
Independent Claim
68 words
A method of controlling cryopumps comprising: coupling a plurality of cryopumps through respective roughing valves to a common rough pump; providing an electronic regeneration controller for each of the plural cryopumps; independently programming individual regeneration controllers to follow independent regeneration cycles; and inhibiting opening of a roughing valve during the regeneration cycle until it is confirmed that no other roughing valve is opened to a common rough pump.
Claim 11
Dependent Claim
88 words
A vacuum pump system comprising: a plurality of vacuum pumps, each having a roughing valve; a common rough pump coupled to each of the vacuum pumps through the respective roughing valves; a plurality of programmable controllers each coupled to a vacuum pump to control cycles of the vacuum pump, a cycle including opening of the cryopump roughing valve, each controller independently following an individual program; and means for inhibiting each controller from opening its respective roughing valve where another roughing valve is open to the common rough pump.
Claim 12
Dependent Claim
88 words
A vacuum pump system comprising: a plurality of vacuum pumps, each having a roughing valve; a common rough pump coupled to each of the vacuum pumps through the respective roughing valves; a plurality of programmable controllers each coupled to a vacuum pump to control cycles of the vacuum pump, a cycle including opening of the cryopump roughing valve, each controller independently following an individual program; and means for inhibiting each controller from opening its respective roughing valve where another roughing valve is open to the common rough pump.
Claim 13
Independent Claim
67 words
A method of controlling vacuum pumps comprising: coupling a plurality of vacuum pumps through respective roughing valves to a common rough pump; providing an electronic controller for each of the plural vacuum pumps; independently programming individual controllers to follow independent cycles; and inhibiting opening of a roughing valve during a cycle unit it is confirmed that no other roughing valve is open to a common rough pump.
Claim 14
Independent Claim
67 words
A method of controlling vacuum pumps comprising: coupling a plurality of vacuum pumps through respective roughing valves to a common rough pump; providing an electronic controller for each of the plural vacuum pumps; independently programming individual controllers to follow independent cycles; and inhibiting opening of a roughing valve during a cycle unit it is confirmed that no other roughing valve is open to a common rough pump.
References Cited (Backward Citations)
US4918930A
Cited
US5010737A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-01-05 | 1996-07-06 | 1997-01-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-01-05 | 2000-07-06 | 2001-01-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-01-05 | 2004-07-06 | 2005-01-05 | $7700.00 | Window Closed / Lapsed |