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US5173909A Expired / Lapsed US ⏱️ 0.0 years remaining

Wavelength tunable laser diode

Assignee: Opnext Japan Inc
•
Filing: 1991-06-25
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Granted: 1992-12-22
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Expires: 2011-06-25
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Abstract

Abstract A wavelength tunable laser diode comprising a temperature variable heater separated from an active layer by a distance less than the thickness of a compound semiconductor substrate. Because the heater is located very close to the active layer, the response time of temperature change is improved. That in turn widens the tunable range of the laser diode.

Inventors

  • 👤 Shinji Sakano
  • 👤 Akihiko Oka
  • 👤 Katutoshi Saito
  • 👤 Naoki Chinone

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 23:13
CPC Classifications
B; B82; B82Y; B82Y20/00; H; H01; H01S; H01S5/00; H01S5/04; H01S5/042; H01S5/0425; H01S5/04254; H01S5/06; H01S5/0607; H01S5/0612; H01S5/02; H01S5/026; H01S5/0261; H01S5/062; H01S5/06203; H01S5/06206; H01S5/06209; H01S5/0622; H01S5/0625; H01S5/06255; H01S5/30; H01S5/34; H01S5/343; H01S5/34306; H01S5/34313

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 186 words
A wavelength tunable laser diode comprising at least: a compound semiconductor substrate having a first conductivity type, an active layer formed on the surface of said compound semiconductor substrate, said active layer being made of a first compound semiconductor layer with a band gap energy level lower than that a said compound semiconductor substrate, a second compound semiconductor layer formed on said active layer and having a second conductivity type opposite to said first conductivity type, a third compound semiconductor layer formed on said compound semiconductor substrate and adjacent to said active layer and said second compound semiconductor layer, a first electrode disposed on a predetermined portion of said third compound semiconductor layer and electrically connected to the surface of said second compound semiconductor layer, a temperature variable heater disposed above said active layer and separated from said active layer by a distance less than the thickness of said compound semiconductor substrate, at least one second electrode electrically connected to said temperature variable heater and formed above said third compound semiconductor layer, and a third electrode formed on a rear surface of said compound semiconductor substrate.
Claim 2
Dependent Claim 186 words
A wavelength tunable laser diode comprising at least: a compound semiconductor substrate having a first conductivity type, an active layer formed on the surface of said compound semiconductor substrate, said active layer being made of a first compound semiconductor layer with a band gap energy level lower than that a said compound semiconductor substrate, a second compound semiconductor layer formed on said active layer and having a second conductivity type opposite to said first conductivity type, a third compound semiconductor layer formed on said compound semiconductor substrate and adjacent to said active layer and said second compound semiconductor layer, a first electrode disposed on a predetermined portion of said third compound semiconductor layer and electrically connected to the surface of said second compound semiconductor layer, a temperature variable heater disposed above said active layer and separated from said active layer by a distance less than the thickness of said compound semiconductor substrate, at least one second electrode electrically connected to said temperature variable heater and formed above said third compound semiconductor layer, and a third electrode formed on a rear surface of said compound semiconductor substrate.
Claim 3
Dependent Claim 39 words
A wavelength tunable laser diode according to claim 1, wherein said temperature variable heater is deposited above said second compound semiconductor layer with said first electrode and said at least one second electrode and an insulation film interposed therebetween.
Claim 4
Dependent Claim 20 words
A wavelength tunable laser diode according to claim 2, wherein said temperature variable heater is constituted by a resistance film.
Claim 5
Dependent Claim 25 words
A wavelength tunable laser diode according to claim 3, wherein the width of said resistance film is less than that of said compound semiconductor substrate.
Claim 6
Dependent Claim 18 words
A wavelength tunable laser diode according to claim 3, wherein said resistance film is made of a platinum.
Claim 7
Dependent Claim 49 words
A wavelength tunable laser diode according to claim 3, wherein said resistance film is connected to said at least one second electrode and further comprising a second insulation film deposited on said third compound semiconductor layer, said at least one second electrode being deposited on said second insulation film.
Claim 8
Dependent Claim 18 words
A wavelength tunable laser diode according to claim 2, wherein said temperature variable heater is a Peltier device.
Claim 9
Dependent Claim 20 words
A wavelength tunable laser diode according to claim 1, wherein said compound semiconductor substrate is constituted by an InP layer.
Claim 10
Dependent Claim 21 words
A wavelength tunable laser diode according to claim 1, wherein said active layer has a multiple quantum well structure of GaAs/InGaAsP.
Claim 11
Dependent Claim 21 words
A wavelength tunable laser diode according to claim 1, wherein said second compound semiconductor layer is constituted by an InP layer.

References Cited (Backward Citations)

US4873691A Cited
DE3737191A1 Cited
US4829532A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-12-22 1996-06-22 1996-12-22 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-12-22 2000-06-22 2000-12-22 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-12-22 2004-06-22 2004-12-22 $7700.00 Window Closed / Lapsed

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