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US5171733A
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Antenna-coupled high Tc superconducting microbolometer
Assignee: University of California
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Filing: 1990-12-04
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Granted: 1992-12-15
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Expires: 2010-12-04
Abstract
Abstract A device is provided for measuring radiant energy, the device comprising a substrate; a bolometer formed from a high T c superconducting material disposed on the substrate in an area that is about 1×5 μm 2 and about 0.02 μm in depth; and a planar antenna disposed on the substrate and coupled to receive radiation and to impart the received radiation to the bolometer.
Inventors
- 👤 Qing Hu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 23:41
CPC Classifications
G; G01; G01J; G01J5/00; G01J5/10; G01J5/20; G01J2005/208; Y; Y10; Y10S; Y10S505/00; Y10S505/825; Y10S505/842; Y10S505/847; Y10S505/848; Y10S505/849
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
60 words
A device for measuring radiant energy comprising: a substrate; a bolometer formed from a high T c superconducting material disposed in an area that is about 1×5 μm 2 and about 0.02 μm in depth on said substrate; and a planar antenna disposed on said substrate and coupled to receive radiation and to impart the received radiation to said bolometer.
Claim 2
Independent Claim
60 words
A device for measuring radiant energy comprising: a substrate; a bolometer formed from a high T c superconducting material disposed in an area that is about 1×5 μm 2 and about 0.02 μm in depth on said substrate; and a planar antenna disposed on said substrate and coupled to receive radiation and to impart the received radiation to said bolometer.
Claim 3
Dependent Claim
42 words
The device of claim 1, wherein said bolometer has planar dimensions sized relative to dimensions of said substrate such that thermal conductance between said substrate and said bolometer is determined substantially by a thermal spreading resistance between said bolometer and said substrate.
Claim 4
Dependent Claim
15 words
The device of claim 1, wherein said high T c material is a c-axis film.
Claim 5
Dependent Claim
16 words
The device of claim 1, wherein said high T c material is a single crystal material.
Claim 6
Dependent Claim
16 words
The device of claim 1, wherein said high T c material is a sintered ceramic material.
Claim 7
Dependent Claim
21 words
The device of claim 1, wherein said bolometer has planar dimensions that are less than one wavelength of the measured radiation.
Claim 8
Dependent Claim
17 words
The device of claim 1, wherein said high T c material is impedance matched with said antenna.
Claim 9
Dependent Claim
14 words
The device of claim 1 and further including a lens secured to said substrate.
Claim 10
Dependent Claim
20 words
The device of claim 1, wherein said substrate essentially consists of ZrO 2 stabilized with Y 2 O 3 .
Claim 11
Dependent Claim
12 words
The device of claim 1, wherein said substrate essentially consists of MgO.
Claim 12
Dependent Claim
23 words
The device of claim 1 and further including: a lens formed from single crystal quartz; wherein said substrate essentially consists of fused quartz.
Claim 13
Dependent Claim
24 words
The device of claim 1 and further including: a hyper-hemispherical lens formed from single crystal quartz; wherein said substrate essentially consists of fused quartz.
Claim 14
Dependent Claim
12 words
The device of claim 1, wherein said substrate is formed from diamond.
Claim 15
Dependent Claim
12 words
The device of claim 1, wherein said substrate is formed from sapphire.
Claim 16
Dependent Claim
21 words
The device of claim 1 and further including a buffer material interposed between said high T c material and said substrate.
Claim 17
Dependent Claim
21 words
The device of claim 15, wherein said buffer material reduces thermal conductivity between said high T c material and said substrate.
Claim 18
Dependent Claim
31 words
The device of claim 1 and further including: a buffer material interposed between said high T c material and said substrate; wherein said buffer material essentially consists of SrTiO 3 .
Claim 19
Dependent Claim
31 words
The device of claim 1 and further including: a buffer material interposed between said high T c material and said substrate; wherein said buffer material essentially consists of ZrO 2 .
Claim 20
Dependent Claim
26 words
The device of claim 1 and further including: a lens secured to said substrate; wherein said lens and said substrate have substantially matched indices of refraction.
Claim 21
Dependent Claim
12 words
The device of claim 1, wherein said antenna is a complementary antenna.
Claim 22
Dependent Claim
21 words
The device of claim 1 and further including: a lens secured to said substrate; wherein said antenna is a complementary antenna.
Claim 23
Dependent Claim
12 words
The device of claim 1, wherein said antenna is a dipole antenna.
Claim 24
Independent Claim
130 words
A device for receiving radiation, comprising: a substrate; a bolometer formed from a high T c superconducting material disposed in an area that is about 1×5 um 2 and about 0.02 um in depth on said substrate; wherein said (bolometer) material has planar dimensions sized relative to dimensions of said substrate such that thermal conductance between said substrate and said (bolometer) material is determined substantially by spreading resistance between said (bolometer) material and said substrate; wherein said (bolometer) high T c superconducting material has planar dimensions that are less than one wavelength of the measured radiation; a planar antenna disposed on said substrate and coupled to impart the measured radiation to said bolometer; and a lens secured to said substrate; wherein said lens focuses the measured radiation onto said antenna.
Claim 25
Independent Claim
130 words
A device for receiving radiation, comprising: a substrate; a bolometer formed from a high T c superconducting material disposed in an area that is about 1×5 um 2 and about 0.02 um in depth on said substrate; wherein said (bolometer) material has planar dimensions sized relative to dimensions of said substrate such that thermal conductance between said substrate and said (bolometer) material is determined substantially by spreading resistance between said (bolometer) material and said substrate; wherein said (bolometer) high T c superconducting material has planar dimensions that are less than one wavelength of the measured radiation; a planar antenna disposed on said substrate and coupled to impart the measured radiation to said bolometer; and a lens secured to said substrate; wherein said lens focuses the measured radiation onto said antenna.
References Cited (Backward Citations)
US3742235A
Cited
US4600840A
Cited
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