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US5170231A Expired / Lapsed US ⏱️ 0.0 years remaining

Silicon carbide field-effect transistor with improved breakdown voltage and low leakage current

Assignee: Sharp Corp
•
Filing: 1991-05-24
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Granted: 1992-12-08
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Expires: 2011-05-24
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Abstract

Abstract A silicon carbide field-effect transistor is provided which includes a semiconductor substrate, a channel formation layer of silicon carbide formed above the substrate, source and drain regions provided in contact with the channel formation layer, a gate insulator disposed between the source and drain regions, and a gate electrode formed on the gate insulator, wherein a first contact between the channel formation layer and the drain region exhibits different electric characteristics from those of a second contact between the channel formation layer and the source region. Also provided is a method for producing such a silicon carbide field-effect transistor.

Inventors

  • 👤 Yoshihisa Fujii
  • 👤 Akira Suzuki
  • 👤 Katsuki Furukawa

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 19:43
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/60; H10D30/64; H10D30/66; H10D62/00; H10D62/80; H10D62/83; H10D62/832; H10D62/8325; H10D12/00; H10D12/01; H10D12/031; H10D64/00; H10D64/60; H10D64/64; H10D64/647

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 83 words
A silicon carbide field-effect transistor comprising a semiconductor substrate, a channel formation layer of silicon carbide formed above the substrate, source and drain regions provided in contact with the channel formation layer, a gate insulator disposed between the source and drain regions, and a gate electrode formed on the gate insulator, wherein a first contact between the channel formation layer and the drain region exhibits different electric characteristics from those of a second contact between the channel formation layer and the source region.
Claim 2
Dependent Claim 83 words
A silicon carbide field-effect transistor comprising a semiconductor substrate, a channel formation layer of silicon carbide formed above the substrate, source and drain regions provided in contact with the channel formation layer, a gate insulator disposed between the source and drain regions, and a gate electrode formed on the gate insulator, wherein a first contact between the channel formation layer and the drain region exhibits different electric characteristics from those of a second contact between the channel formation layer and the source region.
Claim 3
Dependent Claim 33 words
A silicon carbide field-effect transistor according to claim 1, wherein the source and drain regions are provided in the channel formation layer, and the gate insulator is formed on the channel formation layer.
Claim 4
Dependent Claim 31 words
A silicon carbide field-effect transistor according to claim 1, wherein the channel formation layer is formed on the drain region, and the source region is formed on the channel formation layer.
Claim 5
Dependent Claim 31 words
A silicon carbide field-effect transistor according to claim 1, wherein the channel formation layer is formed on the drain region, and the source region is provided in the channel formation layer.
Claim 6
Dependent Claim 43 words
A silicon carbide field-effect transistor according to claim 1, wherein the first contact is a p-n junction having excellent electric characteristics in the reverse direction thereof and the second contact is a p-n junction having excellent electric characteristics in the forward direction thereof.
Claim 7
Dependent Claim 43 words
A silicon carbide field-effect transistor according to claim 1, wherein the first contact is a p-n junction having excellent electric characteristics in the reverse direction thereof and the second contact is a Schottky junction having excellent electric characteristics in the forward direction thereof.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-12-08 1996-06-08 1996-12-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-12-08 2000-06-08 2000-12-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-12-08 2004-06-08 2004-12-08 $7700.00 Window Closed / Lapsed

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