Patent US5165959A successfully refreshed from Google Patents.
US5165959A
Expired / Lapsed
US
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Method of making triazine optical waveguides
Assignee: Nokia Bell Labs
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Filing: 1991-11-25
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Granted: 1992-11-24
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Expires: 2011-11-25
Abstract
Abstract An optical waveguide (11) is composed substantially entirely of triazine. Various methods for making desired triazine waveguide patterns are described.
Inventors
- 👤 John J. Burack
- 👤 Treliant Fang
- 👤 Jane D. LeGrange
- 👤 Jose A. Ors
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:23
CPC Classifications
C; C07; C07D; C07D251/00; C07D251/02; C07D251/12; C07D251/26; C07D251/30; C07D251/34; C08; C08G; C08G73/00; C08G73/06; C08G73/0622; C08G73/0638; C08G73/065; C08G73/0655; G; G02; G02F; G02F1/00; G02F1/35; G02F1/355; G02F1/361; G02F1/3611; G02F1/3612; G02F1/3615; G02F1/3616
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
93 words
A method for forming a desired optical waveguide pattern comprising the steps of: putting a quantity of fluid triazine precursor on a substrate; spinning the substrate to make a film of the triazine precursor; curing the precursor to form cross-linked triazine polymer, the curing comprising the step of heating the substrate; forming over the triazine polymer a layer of aluminum; forming a pattern in the aluminum layer corresponding to said desired pattern; subjecting the triazine polymer to a plasma etch using the patterned aluminum layer as a mask; and removing the aluminum layer.
Claim 2
Independent Claim
93 words
A method for forming a desired optical waveguide pattern comprising the steps of: putting a quantity of fluid triazine precursor on a substrate; spinning the substrate to make a film of the triazine precursor; curing the precursor to form cross-linked triazine polymer, the curing comprising the step of heating the substrate; forming over the triazine polymer a layer of aluminum; forming a pattern in the aluminum layer corresponding to said desired pattern; subjecting the triazine polymer to a plasma etch using the patterned aluminum layer as a mask; and removing the aluminum layer.
Claim 3
Dependent Claim
14 words
The method of claim 1 wherein: the triazine precursor is a fluorinated triazine precursor.
Claim 4
Dependent Claim
35 words
The method of claim 1 wherein: prior to applying the fluid triazine, a quantity of 3-aminopropyltrimethoxysilane is applied as a film to the substrate for promoting the adhesion of the triazine film to the substrate.
Claim 5
Independent Claim
73 words
A method for forming an optical waveguide pattern comprising the steps of: forming a film of fluid triazine precursor on a substrate; curing the precursor to form cross-linked triazine polymer, the curing comprising the step of heating the substrate; forming over the triazine polymer a masking layer; forming a pattern in the masking layer corresponding to said optical waveguide pattern; and etching the triazine polymer using the patterned masking layer as a mask.
Claim 6
Independent Claim
73 words
A method for forming an optical waveguide pattern comprising the steps of: forming a film of fluid triazine precursor on a substrate; curing the precursor to form cross-linked triazine polymer, the curing comprising the step of heating the substrate; forming over the triazine polymer a masking layer; forming a pattern in the masking layer corresponding to said optical waveguide pattern; and etching the triazine polymer using the patterned masking layer as a mask.
Claim 7
Dependent Claim
14 words
The method of claim 4 further comprising the step of: removing the masking layer.
Claim 8
Dependent Claim
13 words
The method of claim 5 wherein: the masking layer is a metal mask.
Claim 9
Dependent Claim
17 words
The method of claim 5 wherein: the etching step comprises the step of plasma etching triazine polymer.
Claim 10
Dependent Claim
12 words
The method of claim 7 wherein: the mask is an aluminum mask.
Claim 11
Dependent Claim
26 words
The method of claim 8 wherein: the film forming step comprises the step of depositing the fluid triazine on the substrate and then spinning the substrate.
Claim 12
Dependent Claim
23 words
The method of claim 8 wherein: the film forming step comprises the step of depositing the fluid triazine on the substrate by spraying.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-11-24 | 1996-05-25 | 1996-11-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-11-24 | 2000-05-25 | 2000-11-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-11-24 | 2004-05-25 | 2004-11-24 | $7700.00 | Window Closed / Lapsed |