Abstract A non-contact method to impart a texture to a surface using laser irradiation uses an excimer laser to illuminate a sample immersed in a halocarbon ambient thereby initiating a photo/thermal chemical reaction which etches the sample only in the area illuminated with sufficient laser fluence. The resulting etched area can be repetively illuminated and etched to provide a textured surface to reduce extraneous reflections, or for micromachining, decorative texturing and marking. This technique is particularly well suited to improve the performance of backside illuminated CCDs by reducing the background (dark) signal, increase resolution and responsivity uniformity. The technique is compatible with other laser processing procedures and can be implemented with a variety of CCD enhancements such as improved dark current and blue response from laser doping or activation of backside implants. The non-corrosive nature of the halocarbon ambients allows the laser texturing process to be performed on pre-packaged, pre-tested devices and therefore can salvage parts which had failed performance specifications. This process therefore can improve device performance as well as yield, reliability and fabrication costs.
A method of texturing a surface of a sample to have a roughness using laser-assisted etching in an ambient comprising: placing said surface of said sample in contact with said ambient; directing radiant energy onto said surface of said sample within said ambient to create at least melted portions of said surface in a textured pattern where the radiant energy impinges; and removing away by the action of said directing radiant energy only said at least melted portions of said surface of said sample to provide a textured roughness sufficient to eliminate most spurious reflections within said ambient which have said radiant energy impinging thereon.
Claim 2
Independent Claim
105 words
A method of texturing a surface of a sample to have a roughness using laser-assisted etching in an ambient comprising: placing said surface of said sample in contact with said ambient; directing radiant energy onto said surface of said sample within said ambient to create at least melted portions of said surface in a textured pattern where the radiant energy impinges; and removing away by the action of said directing radiant energy only said at least melted portions of said surface of said sample to provide a textured roughness sufficient to eliminate most spurious reflections within said ambient which have said radiant energy impinging thereon.
Claim 3
Dependent Claim
20 words
A method according to claim 1 in which said radiant energy is a UV wavelength beam coming from a laser.
Claim 4
Dependent Claim
53 words
A method according to claim 2 in which said surface of said sample is placed within a processing chamber and said gaseous ambient is pressurized within predetermined limits and said UV wavelength beam is at predetermined rates and intensities to assure that said surface of said sample is melted but not ablated thereby.
Claim 5
Dependent Claim
31 words
A method according to claim 3 in which said UV wavelength beam is shaped, homogenized and adjusted in magnitude to obtain an optimal fluence impinging onto said surface of said sample.
Claim 6
Dependent Claim
21 words
A method according to claim 1, 2, 3 or 4 in which said sample is an elemental semiconductor such as silicon.
Claim 7
Dependent Claim
20 words
A method according to claim 1, 2, 3 or 4 in which said sample is any combination of semiconductor compounds.