Patent US5164012A successfully refreshed from Google Patents.
US5164012A
Expired / Lapsed
US
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Heat treatment apparatus and method of forming a thin film using the apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1990-12-28
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Granted: 1992-11-17
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Expires: 2010-12-28
Abstract
Abstract A heat treatment apparatus having a reaction furnace including a reaction chamber for accommodating a plurality of objects, major surfaces of which are faced to each other at intervals, and a heater provided outside the reaction chamber, gas supply tube for introducing a gas into the reaction chamber therethrough, flow-directing unit for directing gas flow in a first direction substantially parallel to the surfaces of the objects, gas exhaust tube for exhausting a gas outside the reaction chamber, and moving unit for moving the gas flow in a second direction different from the first direction. A method of forming thin films on objects of heat treatment having the steps of causing a first gas flow introduced from a first gas supply tube and a second gas flow introduced from a second gas supply tube to meet each other, thereby producing a third gas flow flowing in a direction substantially parallel to the surfaces of the objects, major surfaces of which are faced to each other at intervals, disposed in a reaction chamber, and controlling flow rate of the first and second gas flows, thereby moving the position of the third gas flow in a second direction different from the first direction.
Inventors
- 👤 Hisashi Hattori
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:24
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45563; C23C16/45574; H; H10; H10P; H10P95/00; C23C16/22; C23C16/24; C23C16/45576; C23C16/45578; C30; C30B; C30B25/00; C30B25/02; C30B25/14
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
124 words
A heat treatment apparatus for coating objects having substantially parallel planar surfaces, comprising: a reaction furnace including a reaction chamber for accommodating a plurality of objects being arranged parallel to each other at intervals, and a heater provided outside said reaction chamber; a pair of gas supply means for introducing a gas into said reaction chamber, said gas supply means being placed apart from each other in a substantially perpendicular direction to each surface of said objects, said gas supply means having gas-flow discharge portions arranged in said reaction chamber so as to face each other; gas supply controlling means for controlling the flow rate of a gas introduced from said gas supply means; and means for exhausting a gas from said reaction chamber.
Claim 2
Dependent Claim
124 words
A heat treatment apparatus for coating objects having substantially parallel planar surfaces, comprising: a reaction furnace including a reaction chamber for accommodating a plurality of objects being arranged parallel to each other at intervals, and a heater provided outside said reaction chamber; a pair of gas supply means for introducing a gas into said reaction chamber, said gas supply means being placed apart from each other in a substantially perpendicular direction to each surface of said objects, said gas supply means having gas-flow discharge portions arranged in said reaction chamber so as to face each other; gas supply controlling means for controlling the flow rate of a gas introduced from said gas supply means; and means for exhausting a gas from said reaction chamber.
Claim 3
Dependent Claim
39 words
A heat treatment apparatus according to claim 1, including a plurality of said pairs of gas supply means arranged such that locations of the respective gas-flow discharge portions of said plurality of gas supply means differ from each other.
Claim 4
Dependent Claim
20 words
A heat treatment apparatus according to claim 1 further comprising a mechanism for rotating said objects in said reaction chamber.
Claim 5
Dependent Claim
27 words
A heat treatment apparatus according to claim 1, wherein the reaction chamber is a vertical reaction diameter and accommodates a plurality of said objects at vertical intervals.
Claim 6
Dependent Claim
236 words
A heat treatment apparatus for coating objects having substantially parallel planar surfaces comprising: a reaction furnace including a reaction chamber for accommodating a plurality of objects being arranged parallel to each other at intervals, and a heater provided outside said reaction chamber; a pair of gas supply means for introducing a gas into said reaction chamber, said gas supply means being placed apart from each other in a substantially perpendicular direction to each planar surface of said objects, said gas supply means having gas flow discharge portions arranged in said reaction chamber so as to face each other; gas supply control means for controlling the flow rate of a gas introduced from said ga supply means; a pair of means for exhausting a gas used for treating said objects in said reaction chamber, said exhausting means being placed apart from each other in a substantially perpendicular direction to each planar surface of said objects, said means having gas-flow discharge portions arranged in said reaction chamber so as to face each other; and gas exhaust control means for controlling the exhaust flow of a gas in said reaction chamber, wherein gas flows are introduced from said gas supply means in the substantially perpendicular direction to each planar surface of said objects; and said gas flows collide with each other in said reaction chamber, and thereafter move in a parallel direction to each planar surface of said objects.
Claim 7
Dependent Claim
236 words
A heat treatment apparatus for coating objects having substantially parallel planar surfaces comprising: a reaction furnace including a reaction chamber for accommodating a plurality of objects being arranged parallel to each other at intervals, and a heater provided outside said reaction chamber; a pair of gas supply means for introducing a gas into said reaction chamber, said gas supply means being placed apart from each other in a substantially perpendicular direction to each planar surface of said objects, said gas supply means having gas flow discharge portions arranged in said reaction chamber so as to face each other; gas supply control means for controlling the flow rate of a gas introduced from said ga supply means; a pair of means for exhausting a gas used for treating said objects in said reaction chamber, said exhausting means being placed apart from each other in a substantially perpendicular direction to each planar surface of said objects, said means having gas-flow discharge portions arranged in said reaction chamber so as to face each other; and gas exhaust control means for controlling the exhaust flow of a gas in said reaction chamber, wherein gas flows are introduced from said gas supply means in the substantially perpendicular direction to each planar surface of said objects; and said gas flows collide with each other in said reaction chamber, and thereafter move in a parallel direction to each planar surface of said objects.
Claim 8
Dependent Claim
39 words
A heat treatment apparatus according to claim 5, including a plurality of said pairs of gas supply means arranged such that locations of the respective gas-flow discharge portions of said plurality of gas supply means differ from each other.
Claim 9
Dependent Claim
20 words
A heat treatment apparatus according to claim 5 further comprising a mechanism for rotating said object in said reaction chamber.
Claim 10
Dependent Claim
39 words
A heat treatment apparatus according to claim 5, wherein cross-sectional shapes of said gas-flow discharge portions of said gas supply means and said gas exhaust means have a longer-side to shorter-side ratio in a range of 2:1 to 10:1.
Claim 11
Dependent Claim
264 words
A heat treatment apparatus for coating objects having substantially parallel planar surfaces, comprising: a reaction furnace including a reaction chamber for accommodating a plurality of objects being arranged at intervals, and a heater provided outside said reaction chamber; a pair of gas supply means having a double-tube structure for introducing a gas into said reaction chamber, said gas supply means being placed apart from each other in a substantially perpendicular direction to each planar surface of said objects, said gas supply means having gas flow discharge portions arranged in said reaction chamber so as to face each other; gas-supply control means for controlling the flow rate of a gas introduced from said gas supply means; a pair of means for exhausting a gas used for treating said objects in said reaction chamber, said exhausting means being placed apart from each other in a substantially perpendicular vertical direction to each planar surface of said objects, said means having gas-flow discharge portions arranged in said reaction chamber so as to face each other; and gas-exhaust control means for controlling the exhaust flow of a gas in said reaction chamber, wherein a carrier gas is introduced into an outer tube of said gas supply means; a reaction gas is introduced into an inner tube of said gas supply means; and the gas flows being introduced from said gas supply means in the substantially perpendicular direction to each planar surface of said objects collide with each other in said reaction chamber, and thereafter the gas flows moves in a parallel direction to each planar surface of said objects.
Claim 12
Dependent Claim
264 words
A heat treatment apparatus for coating objects having substantially parallel planar surfaces, comprising: a reaction furnace including a reaction chamber for accommodating a plurality of objects being arranged at intervals, and a heater provided outside said reaction chamber; a pair of gas supply means having a double-tube structure for introducing a gas into said reaction chamber, said gas supply means being placed apart from each other in a substantially perpendicular direction to each planar surface of said objects, said gas supply means having gas flow discharge portions arranged in said reaction chamber so as to face each other; gas-supply control means for controlling the flow rate of a gas introduced from said gas supply means; a pair of means for exhausting a gas used for treating said objects in said reaction chamber, said exhausting means being placed apart from each other in a substantially perpendicular vertical direction to each planar surface of said objects, said means having gas-flow discharge portions arranged in said reaction chamber so as to face each other; and gas-exhaust control means for controlling the exhaust flow of a gas in said reaction chamber, wherein a carrier gas is introduced into an outer tube of said gas supply means; a reaction gas is introduced into an inner tube of said gas supply means; and the gas flows being introduced from said gas supply means in the substantially perpendicular direction to each planar surface of said objects collide with each other in said reaction chamber, and thereafter the gas flows moves in a parallel direction to each planar surface of said objects.
Claim 13
Dependent Claim
22 words
A heat treatment apparatus according to claim 9, wherein the introduced gas is a reaction gas having a relatively low heat-decomposition temperature.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-11-17 | 1996-05-18 | 1996-11-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-11-17 | 2000-05-18 | 2000-11-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-11-17 | 2004-05-18 | 2004-11-17 | $7700.00 | Window Closed / Lapsed |