Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
229 words
A piping system for supplying ultra-pure water to an ultra-pure water using unit, the piping system comprising: a circulation tank for storing primary pure water; a pump in fluid communication with said circulation tank for pumping primary pure water from said circulation tank; an outward pipe having one end connected to said pump; final purifying means for purifying primary pure water supplied by said pump into ultra-pure water, said final purifying means in fluid communication with said outward pipe; a connection pipe having an end connected to the other end of said outward pipe; a branching pipe connected intermediate the ends of said connection pipe and adapted to be in fluid communication with said ultra-pure water using unit; a branching valve disposed in said branching pipe for adjusting a quantity of ultra-pure water supplied to said ultra-pure water using unit; a return pipe connected between the other end of said connection pipe and said circulation tank; and control means connected to said outward pipe for controlling the output of said pump for maintaining the water pressure in said outward pipe at a constant level; wherein the energy loss when the ultra-pure water is passed through said connection pipe upstream of the connection of said branching pipe is equal to the energy loss when ultra-pure water is passed through said connection pipe downstream of the connection with said branching pipe.
Claim 2
Dependent Claim
229 words
A piping system for supplying ultra-pure water to an ultra-pure water using unit, the piping system comprising: a circulation tank for storing primary pure water; a pump in fluid communication with said circulation tank for pumping primary pure water from said circulation tank; an outward pipe having one end connected to said pump; final purifying means for purifying primary pure water supplied by said pump into ultra-pure water, said final purifying means in fluid communication with said outward pipe; a connection pipe having an end connected to the other end of said outward pipe; a branching pipe connected intermediate the ends of said connection pipe and adapted to be in fluid communication with said ultra-pure water using unit; a branching valve disposed in said branching pipe for adjusting a quantity of ultra-pure water supplied to said ultra-pure water using unit; a return pipe connected between the other end of said connection pipe and said circulation tank; and control means connected to said outward pipe for controlling the output of said pump for maintaining the water pressure in said outward pipe at a constant level; wherein the energy loss when the ultra-pure water is passed through said connection pipe upstream of the connection of said branching pipe is equal to the energy loss when ultra-pure water is passed through said connection pipe downstream of the connection with said branching pipe.
Claim 3
Dependent Claim
31 words
A piping system for supplying ultra-pure water according to claim 1, wherein said connection pipe has a larger pipe diameter upstream of said branching valve than downstream from said branching valve.
Claim 4
Dependent Claim
26 words
A piping system for supplying ultra-pure water according to claim 2, wherein said connection pipe is at least partially contained in said ultra-pure water using unit.
Claim 5
Dependent Claim
23 words
A piping system for supplying ultra-pure water according to claim 3, wherein a plurality of branching pipes are connected to said connection pipe.
Claim 6
Dependent Claim
42 words
A piping system for supplying ultra-pure water according to claim 1, wherein said branching valve can limit the flow rate of ultra-pure water so that the pressure upstream of said branching valve is higher than the pressure downstream from said branching valve.
Claim 7
Dependent Claim
23 words
A piping system for supplying ultra-pure water according to claim 5, wherein a plurality of branching pipes are connected to said connection pipe.
Claim 8
Dependent Claim
26 words
A piping system for supplying ultra-pure water according to claim 1, wherein said connection pipe is at least partially contained in said ultra-pure water using unit.
Claim 9
Dependent Claim
23 words
A piping system for supplying ultra-pure water according to claim 1, wherein a plurality of branching pipes are connected to said connection pipe.
Claim 10
Dependent Claim
40 words
A piping system for supplying ultra-pure water according to claim 8, wherein the pipe diameter of said connection pipe is gradually reduced according to the arrangement order of said branching pipe arranged from said outward pipe to said return pipe.
Claim 11
Dependent Claim
38 words
A piping system for supplying ultra-pure water according to claim 1, wherein said outward pipe, said return pipe and said connection pipe are made of one of high purity vinyl chloride resin, vinylidene fluoride resin and polyether-ether ketone.
Claim 12
Dependent Claim
46 words
A piping system for supplying ultra-pure water according to claim 1, wherein said outward pipe, said return pipe and said connection pipe are made of stainless steel having an inner surface on which a passive state film made primarily of Cr 2 O 3 is formed.