US5159172A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Optical projection system
Assignee: International Business Machines Corp
•
Filing: 1990-08-07
•
Granted: 1992-10-27
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Expires: 2010-08-07
Abstract
Abstract An optical system having a plurality of substantially planar reflecting surfaces and a plurality of curved reflecting surfaces providing an optical projection system which can scan a mask object onto an image plane by having the mask and copy substrate substantially fixed in position relative to each other and either simultaneously moving the mask and copy substrate in the same direction or maintaining the mask and image plane substantially stationary and fixed with respect to each other while scanning the optical system. The optical system uses one wavelength of an electromagnetic radiation to align the mask to the copy substrate and another wavelength of electromagnetic radiation to form the image of the mask on the copy substrate. The apparatus can be used as a laser ablation optical tool to laser ablate the image of a mask onto the copy substrate, as an inspection tool, as a photolithographic and for other related applications. The projection lens is a modified Dyson type lens.
Inventors
- 👤 Douglas S. Goodman
- 👤 Alan E. Rosenbluth
- 👤 Raymond E. Tibbetts
- 👤 Janusz S. Wilczynski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 22:18
CPC Classifications
G; G02; G02B; G02B17/00; G02B17/008; G02B17/02; G02B17/026; G02B17/08; G02B17/0856; G02B17/0892; G02B17/0896; G02B19/00; G02B19/0004; G02B19/0028; G02B19/0033; G02B19/0047; G02B19/0095; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70225; G03F7/70358
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
134 words
An optical apparatus for projecting a beam of electromagnetic radiation comprising: a first substantially planar reflecting surface; a second substantially planar reflecting surface; a first concave curved reflecting surface; a second concave curved reflecting surface; the axis of said first and said second curved reflecting surfaces being substantially coincident; the orientation of said first and said second curved reflecting surfaces having the same orientation; said first and said second curved reflecting surfaces being spaced apart by a predetermined distance; one of said first and said second substantially planar reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces.
Claim 2
Dependent Claim
134 words
An optical apparatus for projecting a beam of electromagnetic radiation comprising: a first substantially planar reflecting surface; a second substantially planar reflecting surface; a first concave curved reflecting surface; a second concave curved reflecting surface; the axis of said first and said second curved reflecting surfaces being substantially coincident; the orientation of said first and said second curved reflecting surfaces having the same orientation; said first and said second curved reflecting surfaces being spaced apart by a predetermined distance; one of said first and said second substantially planar reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces.
Claim 3
Dependent Claim
164 words
An optical apparatus for projecting a beam of electromagnetic radiation comprising: a first substantially planar reflecting surface; a second substantially planar reflecting surface; a first concave curved reflecting surface; a second concave curved reflecting surface; the axis of said first and said second curved reflecting surfaces being substantially coincident; said first and said second curved reflecting surfaces being substantially coincident; said first and said second curved reflecting surfaces being spaced apart by a predetermined distance; one of said first and said second substantially planar reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces; and a third substantially planar surface for reflecting said beam between one of said first and said second substantially planar surfaces and said at least one of said first and said second curved surfaces.
Claim 4
Dependent Claim
164 words
An optical apparatus for projecting a beam of electromagnetic radiation comprising: a first substantially planar reflecting surface; a second substantially planar reflecting surface; a first concave curved reflecting surface; a second concave curved reflecting surface; the axis of said first and said second curved reflecting surfaces being substantially coincident; said first and said second curved reflecting surfaces being substantially coincident; said first and said second curved reflecting surfaces being spaced apart by a predetermined distance; one of said first and said second substantially planar reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces; and a third substantially planar surface for reflecting said beam between one of said first and said second substantially planar surfaces and said at least one of said first and said second curved surfaces.
Claim 5
Dependent Claim
25 words
The apparatus of claim 2, wherein said third and said at least one of said first and said second substantially planar surfaces are not parallel.
Claim 6
Dependent Claim
33 words
The apparatus of claim 2, wherein the angle between said third and said at least one of said first and said second substantially planar surfaces is at least as great as 90 degrees.
Claim 7
Dependent Claim
138 words
An optical apparatus for projecting a beam of electromagnetic radiation comprising: a first substantially planar reflecting surface; a second substantially planar reflecting surface; a first concave curved reflecting surface; a second concave curved reflecting surface; the axis of said first and said second curved reflecting surfaces being substantially coincident; said first and said second curved reflecting surfaces being spaced apart by a predetermined distance; one of said first and said second substantially planar reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces; and an object to be imaged in an object plane and a substrate on which said object is imaged.
Claim 8
Dependent Claim
138 words
An optical apparatus for projecting a beam of electromagnetic radiation comprising: a first substantially planar reflecting surface; a second substantially planar reflecting surface; a first concave curved reflecting surface; a second concave curved reflecting surface; the axis of said first and said second curved reflecting surfaces being substantially coincident; said first and said second curved reflecting surfaces being spaced apart by a predetermined distance; one of said first and said second substantially planar reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces; and an object to be imaged in an object plane and a substrate on which said object is imaged.
Claim 9
Dependent Claim
129 words
An optical apparatus for projecting a beam of electromagnetic radiation comprising: a first substantially planar reflecting surface; a second substantially planar reflecting surface; a first concave curved reflecting surface; a second concave curved reflecting surface; the axis of said first and said second curved reflecting surfaces being substantially coincident; said first and second curved reflecting surfaces being spaced apart by a predetermined distance; one of said first and said second substantially reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces; and a group of at least one lens for focusing said beam.
Claim 10
Dependent Claim
129 words
An optical apparatus for projecting a beam of electromagnetic radiation comprising: a first substantially planar reflecting surface; a second substantially planar reflecting surface; a first concave curved reflecting surface; a second concave curved reflecting surface; the axis of said first and said second curved reflecting surfaces being substantially coincident; said first and second curved reflecting surfaces being spaced apart by a predetermined distance; one of said first and said second substantially reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces; and a group of at least one lens for focusing said beam.
Claim 11
Dependent Claim
27 words
The apparatus of claim 6, wherein said group focuses said beam reflected from and to said at least one of said first and said second curved surfaces.
Claim 12
Dependent Claim
18 words
The apparatus of claim 2, further including a group of at least one lens for focusing said beam.
Claim 13
Dependent Claim
27 words
The apparatus of claim 8, wherein said group focuses said beam reflected from and to said at least one of said first and said second curved surfaces.
Claim 14
Dependent Claim
137 words
An optical apparatus for projecting a beam of electromagnetic radiation comprising: a first substantially planar reflecting surface; a second substantially planar reflecting surface; a first concave curved reflecting surface; a second concave curved reflecting surface; the axis of said first and said second curved reflecting surfaces being substantially coincident; said first and said second curved reflecting surfaces being spaced apart by a predetermined distance; one of said first and said second substantially planar reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces; and a third substantially planar reflecting surface for reflecting said beam to provide an even number of reflections.
Claim 15
Dependent Claim
137 words
An optical apparatus for projecting a beam of electromagnetic radiation comprising: a first substantially planar reflecting surface; a second substantially planar reflecting surface; a first concave curved reflecting surface; a second concave curved reflecting surface; the axis of said first and said second curved reflecting surfaces being substantially coincident; said first and said second curved reflecting surfaces being spaced apart by a predetermined distance; one of said first and said second substantially planar reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces; and a third substantially planar reflecting surface for reflecting said beam to provide an even number of reflections.
Claim 16
Dependent Claim
12 words
The apparatus of claim 10, wherein said curved surfaces are substantially spherical.
Claim 17
Dependent Claim
23 words
The apparatus of claim 5, wherein said object to be imaged is a mask having predetermined regions opaque and translucent to said beam.
Claim 18
Dependent Claim
160 words
An optical apparatus for projecting a beam of electromagnetic radiation comprising: a first substantially planar reflecting surface; a second substantially planar reflecting surface; a first concave curved reflecting surface; a second concave curved reflecting surface; the axis of said first and said second curved reflecting surfaces being substantially coincident; said first and said second curved reflecting surfaces being spaced apart by a predetermined distance; one of said first and said second substantially planar reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces; and wherein said beam is of a first wavelength which reflects from one of said first and second curved surfaces and wherein said beam is of a second wavelength which reflects from the other of said first and second curved surfaces.
Claim 19
Dependent Claim
160 words
An optical apparatus for projecting a beam of electromagnetic radiation comprising: a first substantially planar reflecting surface; a second substantially planar reflecting surface; a first concave curved reflecting surface; a second concave curved reflecting surface; the axis of said first and said second curved reflecting surfaces being substantially coincident; said first and said second curved reflecting surfaces being spaced apart by a predetermined distance; one of said first and said second substantially planar reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces; and wherein said beam is of a first wavelength which reflects from one of said first and second curved surfaces and wherein said beam is of a second wavelength which reflects from the other of said first and second curved surfaces.
Claim 20
Dependent Claim
44 words
The apparatus of claim 13, further including an image plane and an object plane and wherein said predetermined distance between said first and second curved surfaces permits the object and image plane of each of said wavelengths to be substantially at the same locations.
Claim 21
Dependent Claim
25 words
The apparatus of claim 13, further including an object to be imaged in an object plane and a substrate on which said object is imaged.
Claim 22
Dependent Claim
38 words
The apparatus of claim 15, wherein one of said first and second wavelengths is to align said object to said substrate and the other of said first and second wavelengths is to image said object on said substrate.
Claim 23
Dependent Claim
12 words
The apparatus of claim 1 wherein said beam is an optical beam.
Claim 24
Dependent Claim
126 words
An optical apparatus for projecting a beam of electromagnetic radiation comprising: a first substantially planar reflecting surface; a second substantially planar reflecting surface; a first concave curved reflecting surface; a second concave curved reflecting surface; the axis of said first and said second curved reflecting surfaces being substantially coincident; said first and said second curved reflecting surfaces being spaced apart by a predetermined distance; one of said first and second substantially planar reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces; and wherein said beam is an ultraviolet beam.
Claim 25
Dependent Claim
126 words
An optical apparatus for projecting a beam of electromagnetic radiation comprising: a first substantially planar reflecting surface; a second substantially planar reflecting surface; a first concave curved reflecting surface; a second concave curved reflecting surface; the axis of said first and said second curved reflecting surfaces being substantially coincident; said first and said second curved reflecting surfaces being spaced apart by a predetermined distance; one of said first and second substantially planar reflecting surfaces being adapted to receiving said beam of electromagnetic radiation and reflecting said beam to at least one of said first and said second curved reflecting surfaces from which said beam is reflected to the other of said first and said second substantially planar surfaces; and wherein said beam is an ultraviolet beam.
Claim 26
Dependent Claim
24 words
The apparatus of claim 5, wherein said beam has a wavelength suitable to ablate said substrate to form an ablated image of said object.
Claim 27
Dependent Claim
30 words
The apparatus of claim 19, further including a transparent plate between said substrate and the remainder of said apparatus to prevent ablation debris from contacting the remainder of said apparatus.
Claim 28
Dependent Claim
24 words
The apparatus of claim 5, wherein said object and said substrate are adapted to be moved together to form said image on said substrate.
Claim 29
Dependent Claim
31 words
The apparatus of claim 5, wherein said object and said substrate are stationary and wherein the remainder of said apparatus is adapted to moved to image said object on said substrate.
Claim 30
Dependent Claim
18 words
The apparatus of claim 1, further including an aperture between said substantially planar surfaces and said curved surfaces.
Claim 31
Dependent Claim
12 words
The apparatus of claim 6, wherein said lens is a plano/convex lens.
Claim 32
Dependent Claim
167 words
An optical apparatus for projecting an alignment and image beam of electromagnetic radiation from an object onto a substrate comprising: a first, a second and a third substantially planar mutually perpendicular reflecting surfaces; a first and second concave reflecting surface having substantially the same axis and being spaced apart by a predetermined distance; a plano/convex refracting element; said first substantially planar surface being adapted to receiving said alignment and said image beams which are reflected to said second substantially planar surface from which one of said image and said alignment beams are reflected through said refracting element to one of said first and said second concave surfaces and the other of said image and alignment beams being reflected through said refracting element to the other of said first and second concave surfaces; and said image and said alignment beams being reflected from said first and said second concave surfaces through said refracting element to said third substantially planar surface and from said third surface onto said substrate.
Claim 33
Dependent Claim
167 words
An optical apparatus for projecting an alignment and image beam of electromagnetic radiation from an object onto a substrate comprising: a first, a second and a third substantially planar mutually perpendicular reflecting surfaces; a first and second concave reflecting surface having substantially the same axis and being spaced apart by a predetermined distance; a plano/convex refracting element; said first substantially planar surface being adapted to receiving said alignment and said image beams which are reflected to said second substantially planar surface from which one of said image and said alignment beams are reflected through said refracting element to one of said first and said second concave surfaces and the other of said image and alignment beams being reflected through said refracting element to the other of said first and second concave surfaces; and said image and said alignment beams being reflected from said first and said second concave surfaces through said refracting element to said third substantially planar surface and from said third surface onto said substrate.
Claim 34
Dependent Claim
184 words
An optical apparatus for projecting an alignment and image beam of electromagnetic radiation from an object onto a substrate comprising: a first, second and a third substantially planar mutually perpendicular reflecting surfaces; a first concave curved reflecting surface; a second concave curved reflecting surface; the axis of said first and said second curved reflecting surfaces being substantially coincident; said first and said second curved reflecting surfaces being spaced apart by a predetermined distance; a plano/convex refracting element; one of said first and said second substantially planar reflecting surfaces being adapted to receiving at least one of said beams of electromagnetic radiation and reflecting said at least one of said beams to at least one of said first and said second curved reflecting surfaces through said plano/convex refracting element from which said beam is reflected to the other of said first and said second substantially planar surfaces through said plano/convex refracting element; the other of said at least one beam reflecting off the other of said curved reflecting surface; and each of said alignment and said image beams reflecting off of said third planar surfaces.
Claim 35
Dependent Claim
184 words
An optical apparatus for projecting an alignment and image beam of electromagnetic radiation from an object onto a substrate comprising: a first, second and a third substantially planar mutually perpendicular reflecting surfaces; a first concave curved reflecting surface; a second concave curved reflecting surface; the axis of said first and said second curved reflecting surfaces being substantially coincident; said first and said second curved reflecting surfaces being spaced apart by a predetermined distance; a plano/convex refracting element; one of said first and said second substantially planar reflecting surfaces being adapted to receiving at least one of said beams of electromagnetic radiation and reflecting said at least one of said beams to at least one of said first and said second curved reflecting surfaces through said plano/convex refracting element from which said beam is reflected to the other of said first and said second substantially planar surfaces through said plano/convex refracting element; the other of said at least one beam reflecting off the other of said curved reflecting surface; and each of said alignment and said image beams reflecting off of said third planar surfaces.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-10-27 | 1996-04-27 | 1996-10-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-10-27 | 2000-04-27 | 2000-10-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-10-27 | 2004-04-27 | 2004-10-27 | $7700.00 | Window Closed / Lapsed |