System for illuminating an annular field

Claim 3

A system for illuminating an annular field disposed about an axis according to claim 1 wherein said field element has a reflective concave toroidal surface having an axis of symmetry coincident with the axis of the system.

Claim 4

A system for illuminating an annular field disposed about an axis according to claim 1 wherein said field element is of catadioptric form.

Claim 5

A system for illuminating an annular field disposed about an axis according to claim 2 further including a field stop proximate said field element.

Claim 6

A system for illuminating an annular field disposed about an axis according to claim 2 wherein said toroidal surface has a second finite radius of curvature which is greater than the distance of said surface from said axis.

Claim 7

A system for illuminating an annular field disposed about an axis according to claim 2 wherein said field element is of catadioptric form and has an entrance face and an exit face, and one of said faces is a spherical surface with its center on the axis of the system.

Claim 8

A system for illuminating an annular field disposed about an axis according to claim 6 wherein said spherical surface is the exit face, and wherein the center of the spherical surface is located substantially at the center of a pupil image of the system.

Claim 9

A system for illuminating an annular field disposed about axis according to claim 1 wherein said field element has a reflective surface of cylindrical configuration disposed within its cylindrical axis coincident with the axis of the system.

Claim 10

A system for illuminating an annular field disposed about an axis according to claim 1 further including an arcuately-shaped field stop intermediate said source and the annular field, and means for forming an image of said arcuate source at said field stop.

Claim 11

A system for illuminating an annular field disposed about an axis according to claim 9 wherein said means for forming an image forms a magnified image.

Claim 12

A system for illuminating an annular field disposed about an axis according to claim 9 wherein said means for forming an image comprises a concave primary mirror facing said arcuate source of radiation and having an axis of symmetry coincident with said axis of the system, and convex secondary mirror means having an axis of symmetry coincident with said axis of the system and being located between said arcuate source of radiation and the primary mirror to receive radiation from the primary mirror and direct it toward said field stop.

Claim 13

A system for illuminating an annular field disposed about an axis according to claim 11 wherein said primary mirror has a centrally disposed aperture through which the radiation passes from said secondary mirror means toward the field stop.

Claim 14

A system for illuminating an annular field disposed about an axis according to claim 11 wherein said primary mirror has an arcuately shaped slit which is concentric with respect to said axis of the system and through which the radiation passes from said secondary mirror means to the field stop.

Claim 15

A system for illuminating an annular field disposed about an axis according to claim 11 wherein said primary mirror and said secondary mirror means are so disposed that an image of the entrance pupil thereof is located substantially at said secondary mirror means, whereby the obscuration is nearly identical for all points along the arc of the source of radiation.

Claim 16

A system for illuminating an annular field disposed about an axis according to claim 11 wherein said secondary mirror means comprises an aspheric lens having one portion of the convex surface thereof reflectively coated and a second portion transparent, whereby the radiation from the source is transmitted to the primary mirror through the transparent portion.

Claim 17

A system for illuminating an annular field disposed about an axis according to claim 1 wherein said field imaging system includes a reflective concave toroidal surface having an axis of symmetry coincident with the axis of the system, and means for forming an image of said arcuate source at said surface.

Claim 18

A system for illuminating an annular field disposed about an axis according to claim 16 wherein said means for forming an image comprises a concave primary mirror facing said arcuate source of radiation and having an axis of symmetry coincident with said axis of the system, and convex secondary mirror means having an axis of symmetry coincident with said axis of the system and being located between said arcuate source of radiation and the primary mirror to receive radiation from the primary mirror and direct it toward said toroidal surface.

Claim 19

A system for illuminating an annular field disposed about an axis according to claim 17 wherein said primary mirror has an arcuately shaped slit which is concentric with respect to said axis of the system and through which the radiation passes from said secondary mirror means toward said toroidal surface.

Claim 20

A system for illuminating an annular field disposed about an axis according to claim 17 wherein said primary mirror and said secondary mirror means are so disposed that an image of the entrance pupil thereof is located substantially at said secondary mirror means, whereby the obscuration is nearly identical for all points along the arc of the source of radiation.

Claim 21

A system for illuminating an annular field disposed about an axis according to claim 17 wherein said secondary mirror means comprises an aspheric lens having one portion of the convex surface thereof reflectively coated and a second portion transparent, whereby radiation from the source is transmitted to the primary mirror through the transparent portion.

Claim 22

A system for illuminating an annular field disposed about an axis according to claim 1 wherein said annular field imaging system includes first and second field lenses having axes of symmetry coincident with said axis of the system.

Claim 23

A system for illuminating an annular field disposed about an axis according to claim 21 further including an arcuately-shaped field stop interposed between said first and second field lenses.

Claim 24

A system for illuminating an annular field disposed about an axis according to claim 22 further including a transfer mirror for forming a real image of said field stop.

Claim 25

A system for illuminating an annular field disposed about an axis according to claim 23 which includes an aperture stop located one focal length ahead of said transfer mirror.

Claim 26

A system for illuminating an annular field disposed about an axis according to claim 24 wherein said first and second field lenses are plano-convex spherical lenses.

Claim 27

A system for illuminating an annular field disposed about an axis according to claim 1 further including a field stop intermediate said source and the annular field at which an image of said arcuate source is formed.

Claim 28

A system for illuminating an annular field disposed about an axis according to claim 4 wherein said field imaging system further includes an aspheric element having an axis of symmetry coincident with said axis of the system, a transfer mirror for forming a real image of said field stop, and an aperture stop located one focal length ahead of said transfer mirror.

Claim 29

A system for illuminating an annular field disposed about an axis according to claim 4 wherein said field imaging system further includes a transfer mirror for forming a real image of said field stop, and an aperture stop located one focal length ahead of said transfer mirror.

Claim 30

A system for illuminating an annular field disposed about an axis according to claim 4 wherein said field imaging system further includes a transfer mirror for forming a real image of said field stop, and a convex mirror having an axis of symmetry coincident with the axis of the system located one focal length ahead of said transfer mirror.

Claim 31

A condenser system for illuminating an annular field disposed about an axis, comprising, in combination: an arcuately-shaped illumination source disposed concentrically about said axis; a concave primary mirror facing said illumination source and having an axis of symmetry coincident with said axis; a convex secondary mirror having an axis of symmetry coincident with said axis and being located between said illumination source and the primary mirror to receive illumination from the primary source; an annular field imaging system having an axis of symmetry coincident with said axis for forming an image of said illumination source on said annular field including: a first plano-convex spherical lens, said primary mirror having an aperture therein through which illumination passes from the secondary mirror to the first lens, a second plano-convex spherical lens, an arcuately-shaped field stop interposed between said first and second lenses, a transfer aspheric mirror for forming a real image of said field stop; and an aperture stop located one focal length ahead of said transfer mirror.

Claim 32

A condenser system for illuminating an annular field disposed about an axis, comprising, in combination: an arcuately-shaped illumination source disposed concentrically about said axis; a concave primary mirror facing said illumination source and having an axis of symmetry coincident with said axis; a convex secondary mirror having an axis of symmetry coincident with said axis and being located between said illumination source and the primary mirror to receive illumination from the primary source; an annular field imaging system having an axis of symmetry coincident with said axis for forming an image of said illumination source on said annular field including: a first plano-convex spherical lens, said primary mirror having an aperture therein through which illumination passes from the secondary mirror to the first lens, a second plano-convex spherical lens, an arcuately-shaped field stop interposed between said first and second lenses, a transfer aspheric mirror for forming a real image of said field stop; and an aperture stop located one focal length ahead of said transfer mirror.

Claim 33

A condenser system for illuminating an annular field disposed about an axis, comprising, in combination: an arcuately-shaped illumination source disposed concentrically about said axis; a concave primary mirror facing said illumination source and having an axis of symmetry coincident with said axis; a convex secondary mirror having an axis of symmetry coincident with said axis and being located between said illumination source and the primary mirror to receive illumination from the primary mirror; an arcuately-shaped field stop at which an image of said illumination source is formed; an annular field imaging system having an axis of symmetry coincident with said axis for forming an image of said illumination source on said annular field including: a field element proximate said field stop, said field element having a reflective surface of cylindrical configuration disposed with its cylindrical axis coincident with the axis of the system, an aspheric element having an axis of symmetry coincident with said axis of the system, a transfer mirror for forming a real image of said field stop, and an aperture stop located one focal length ahead of said transfer mirror.

Claim 34

A condenser system for illuminating an annular field disposed about an axis, comprising, in combination: an arcuately-shaped illumination source disposed concentrically about said axis; a concave primary mirror facing said illumination source and having an axis of symmetry coincident with said axis; a convex secondary mirror having an axis of symmetry coincident with said axis and being located between said illumination source and the primary mirror to receive illumination from the primary mirror; an arcuately-shaped field stop at which an image of said illumination source is formed; an annular field imaging system having an axis of symmetry coincident with said axis for forming an image of said illumination source on said annular field including: a field element proximate said field stop, said field element having a reflective surface of cylindrical configuration disposed with its cylindrical axis coincident with the axis of the system, an aspheric element having an axis of symmetry coincident with said axis of the system, a transfer mirror for forming a real image of said field stop, and an aperture stop located one focal length ahead of said transfer mirror.

Claim 35

A condenser system for illuminating an annular field disposed about an axis, comprising, in combination: an arcuately-shaped illumination source disposed concentrically about said axis; a concave primary mirror facing said illumination source and having an axis os symmetry coincident with said axis of the system; a secondary element comprising an aspheric lens having one portion of a convex surface thereof reflectively coated and a second portion transparent, whereby the illumination from the source is transmitted to the primary mirror through the transparent portion and the reflective portion serves as a secondary mirror for receiving illumination from the primary mirror, said secondary element having an axis of symmetry coincident with the axis of the system; an arcuately-shaped field stop at which an image of said illumination source is formed; an annular field imaging system having an axis of symmetry coincident with said axis of the system for forming an image of said illumination source on said annular field including: a field element proximate said field stop, said field element having a reflective concave toroidal surface having an axis of symmetry coincident with the axis of the system, a transfer aspheric mirror for forming a real image of said field stop, and aperture stop means located one focal length ahead of said transfer mirror.

Claim 36

A condenser system for illuminating an annular field disposed about an axis, comprising, in combination: an arcuately-shaped illumination source disposed concentrically about said axis; a concave primary mirror facing said illumination source and having an axis os symmetry coincident with said axis of the system; a secondary element comprising an aspheric lens having one portion of a convex surface thereof reflectively coated and a second portion transparent, whereby the illumination from the source is transmitted to the primary mirror through the transparent portion and the reflective portion serves as a secondary mirror for receiving illumination from the primary mirror, said secondary element having an axis of symmetry coincident with the axis of the system; an arcuately-shaped field stop at which an image of said illumination source is formed; an annular field imaging system having an axis of symmetry coincident with said axis of the system for forming an image of said illumination source on said annular field including: a field element proximate said field stop, said field element having a reflective concave toroidal surface having an axis of symmetry coincident with the axis of the system, a transfer aspheric mirror for forming a real image of said field stop, and aperture stop means located one focal length ahead of said transfer mirror.

Claim 37

A system for illuminating an annular field disposed about an axis according to claim 32 wherein said field element is of catadioptric form and has an entrance face and an exit face, said exit face being a spherical surface with its center on said axis of the system.

Claim 38

A system for illuminating an annular field disposed about an axis according to claim 32 wherein said aperture stop means is in the form of a convex mirror having an axis of symmetry coincident with the axis of the system.