Patent US5157472A successfully refreshed from Google Patents.
US5157472A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor acceleration sensor
Assignee: Mitsubishi Electric Corp
•
Filing: 1991-02-15
•
Granted: 1992-10-20
•
Expires: 2011-02-15
Abstract
Abstract A semiconductor acceleration sensor and a method of producing the sensor are characterized in that a pedestal on which a semiconductor acceleration sensor chip including a weight is mounted is integral with a stopper for preventing movement of the weight outside a prescribed range. The semiconductor acceleration sensor is not broken even if an acceleration outside the measurement range is applied. In addition, the semiconductor acceleration sensor exhibits high accuracy and is low in cost.
Inventors
- 👤 Seiji Takemura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 16:40
CPC Classifications
G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P2015/0805; G01P2015/0822; G01P2015/0825; G01P2015/0828
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
98 words
A semiconductor acceleration sensor comprising: a semiconductor acceleration sensor chip including a mounting end and a cantilevered end; a weight attached to said cantilevered end for movement in response to acceleration of said sensor; a metal base; a unitary metal stopper mounted on said metal base and including a pedestal on which the mounting end of said semiconductor acceleration sensor chip is mounted and a stopper portion proximate said weight for preventing movement of said weight outside a prescribed range; and a cap mounted on said base covering said semiconductor acceleration sensor chip, said weight, and said stopper.
Claim 2
Dependent Claim
98 words
A semiconductor acceleration sensor comprising: a semiconductor acceleration sensor chip including a mounting end and a cantilevered end; a weight attached to said cantilevered end for movement in response to acceleration of said sensor; a metal base; a unitary metal stopper mounted on said metal base and including a pedestal on which the mounting end of said semiconductor acceleration sensor chip is mounted and a stopper portion proximate said weight for preventing movement of said weight outside a prescribed range; and a cap mounted on said base covering said semiconductor acceleration sensor chip, said weight, and said stopper.
Claim 3
Dependent Claim
93 words
A semiconductor acceleration sensor comprising: a semiconductor acceleration sensor chip including a mounting end and a cantilevered end; a weight attached to said cantilevered end for movement in response to acceleration of said sensor; a unitary metal base including a metal stopper having a pedestal on which the mounting end of said semiconductor acceleration sensor chip is mounted and a stopper portion proximate said weight for preventing movement of said weight outside a prescribed range; and a cap mounted on said base covering said semiconductor acceleration sensor chip, said weight, and said stopper.
Claim 4
Dependent Claim
93 words
A semiconductor acceleration sensor comprising: a semiconductor acceleration sensor chip including a mounting end and a cantilevered end; a weight attached to said cantilevered end for movement in response to acceleration of said sensor; a unitary metal base including a metal stopper having a pedestal on which the mounting end of said semiconductor acceleration sensor chip is mounted and a stopper portion proximate said weight for preventing movement of said weight outside a prescribed range; and a cap mounted on said base covering said semiconductor acceleration sensor chip, said weight, and said stopper.
References Cited (Backward Citations)
JPH0281477A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-10-20 | 1996-04-20 | 1996-10-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-10-20 | 2000-04-20 | 2000-10-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-10-20 | 2004-04-20 | 2004-10-20 | $7700.00 | Window Closed / Lapsed |