US5157002A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for forming a mask pattern for contact hole
Assignee: SK Hynix Inc
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Filing: 1990-11-28
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Granted: 1992-10-20
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Expires: 2010-11-28
Abstract
Abstract A method for forming a mask pattern for contact hole in a highly integrated semiconductor device is disclosed. The method according to the invention utilizes a SOG film in order to form an accurate and compact mask pattern for the formation of a contact hole within the highly limited area at a predetermined semiconductor layer where a sizable step difference exists. The method according to the invention is also applicable for manufacturing a multi-layered highly integrated semiconductor device.
Inventors
- 👤 Seung C. Moon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 08:38
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/286; H10P50/287; H10P50/73; H10W20/074; H10W20/093; H10W20/097; Y; Y10; Y10S; Y10S148/00; Y10S148/102
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
254 words
A method for forming a mask pattern for a contact hole in a semiconductor device in order to form a contact hole at a contact region positioned between first patterns which are spaced apart relative to each other on a semiconductor substrate, the method comprising: depositing an insulating layer on the entire semiconductor substrate; depositing a nitride layer on the insulating layer; forming a SOG, spin on glass, film on the nitride layer; baking the SOG film for a period of time and at a temperature sufficient to impart a high anticorrosive characteristic thereto; forming a first photoresist layer on the SOG film; removing the first photoresist layer except for a portion on the SOG film positioned above the contact region, to thereby expose a portion of the SOG film; forming a second pattern including the remaining portion of the first photoresist layer and the exposed SOG film by removing the exposed SOG film except for a portion positioned over the contact region; removing the first photoresist layer on the SOG film for the second pattern; depositing a second photoresist layer on the entire surface of the resulting structure including the SOG film for the second pattern; removing the second photoresist layer to expose a top surface of the SOG film; baking the resulting structure including the exposed SOG film; and forming the mask pattern for the contact hole by removing the exposed SOG film to thereby expose a portion of the nitride layer positioned over the contact region and between the first patterns.
Claim 2
Independent Claim
254 words
A method for forming a mask pattern for a contact hole in a semiconductor device in order to form a contact hole at a contact region positioned between first patterns which are spaced apart relative to each other on a semiconductor substrate, the method comprising: depositing an insulating layer on the entire semiconductor substrate; depositing a nitride layer on the insulating layer; forming a SOG, spin on glass, film on the nitride layer; baking the SOG film for a period of time and at a temperature sufficient to impart a high anticorrosive characteristic thereto; forming a first photoresist layer on the SOG film; removing the first photoresist layer except for a portion on the SOG film positioned above the contact region, to thereby expose a portion of the SOG film; forming a second pattern including the remaining portion of the first photoresist layer and the exposed SOG film by removing the exposed SOG film except for a portion positioned over the contact region; removing the first photoresist layer on the SOG film for the second pattern; depositing a second photoresist layer on the entire surface of the resulting structure including the SOG film for the second pattern; removing the second photoresist layer to expose a top surface of the SOG film; baking the resulting structure including the exposed SOG film; and forming the mask pattern for the contact hole by removing the exposed SOG film to thereby expose a portion of the nitride layer positioned over the contact region and between the first patterns.
Claim 3
Dependent Claim
13 words
The method of claim 1 wherein the semiconductor substrate is a silicon substrate.
Claim 4
Dependent Claim
12 words
The method of claim 1 wherein the insulating layer is a Boro-Phospho-Silicate-Glass.
Claim 5
Dependent Claim
12 words
The method of claim 1 wherein the insulating layer is a Phospho-Silicate-Glass.
Claim 6
Dependent Claim
41 words
The method of claim 1 wherein the exposed SOG film is removed by performing a dry etching in the presence of a gas selected from the group consisting of: CHF, CF+O 2 or CHF+O 2 to form the second mask pattern.
Claim 7
Dependent Claim
30 words
The method of claim 1 wherein the second photoresist layer is removed to the extent to expose the top surface of the SOG film by a blanket etch back process.
Claim 8
Dependent Claim
28 words
The method of claim 1 wherein the second photoresist layer is planarized prior to being removed to the extent to expose the top surface of the SOG film.
Claim 9
Dependent Claim
35 words
The method of claim 1 wherein the mask pattern for the contact hole is formed by dipping the exposed SOG film into a chemical etchant to remove the SOG film positioned above the contact region.
Claim 10
Dependent Claim
22 words
The method of claim 8 wherein the etchant is selected from a group consisting of: NH 4 OH:HF, NiKOH and deionized water-HF.
Claim 11
Dependent Claim
40 words
The method of claim 1 further including the step of forming a contact hole in the insulating layer at the contact region by sequentially removing the exposed nitride layer and the insulating layer utilizing the mask pattern for contact hole.
Claim 12
Dependent Claim
33 words
The method of claim 1 wherein the baking of the SOG film is performed in a hot plate at a temperature of about 200 degrees Celsius for a period of about 1 minute.
Claim 13
Dependent Claim
33 words
The method of claim 1 wherein the baking of the SOG film is performed in a convection oven at a temperature of about 200 degrees Celsius for a period of about 30 minutes.
Claim 14
Independent Claim
463 words
A method of forming a mask pattern for contact hole, comprising: depositing a conducting layer 2 on a semiconductor substrate 1; removing portions of the conducting layer 2 from the semiconductor substrate to form adjacent first patterns 2A, 2B which are spaced apart on the surface of the semiconductor substrate relative to each other and which extend up from the surface of the semiconductor substrate resulting in a step difference between the surface of the semiconductor substrate and the surface of the adjacent first patterns 2A, 2B and to expose portions of the semiconductor substrate including the semiconductor substrate extending between the adjacent first patterns 2A, 2B; depositing an insulating layer 3 on the entire surface of the resulting structure which comprises the adjacent first patterns 2A, 2B and the exposed portions of the semiconductor substrate which impart an unevenness to the surface of the insulating layer 3; depositing a nitride layer 4 on the uneven insulating layer 3 which imparts an unevenness to the surface of the nitride layer 4 to protect the insulating layer by functioning as an etch stop layer; depositing a SOG, spin on glass, film 5 on the nitride layer 4 to provide a flat surfaced self-leveling film on the uneven nitride layer 4; heating the SOG film 5 to impart a anticorrosive characteristic thereto; depositing a first photoresist layer 6 on the SOG film 5; removing the photoresist layer 6 deposited on the SOG film 5 to thereby expose the SOG film thereunder except for a portion of the photoresist layer 6 on the SOG film positioned above the semiconductor substrate extending between the adjacent first patterns 2A, 2B; removing the exposed SOG film 5 to expose the nitride layer thereunder except for the portion of the SOG film beneath the photoresist layer 6 and on the nitride layer positioned above the semiconductor substrate extending between the adjacent first patterns 2A, 2B, thereby forming a second pattern 5A comprising the portion of the photoresist layer 6 deposited on the SOG film 5 which is deposited on the nitride layer positioned above the semiconductor substrate extending between the adjacent first patterns 2A, 2B; removing the remaining first photoresist layer 6 and depositing a second photoresist layer 7 on the entire surface of the resulting structure comprising the SOG film 5 positioned above the semiconductor substrate extending between the adjacent first patterns 2A, 2B and the exposed nitride layer; and planarizing and removing the second photoresist layer 7 to expose a top surface 5B of the SOG film positioned above the semiconductor substrate extending between the adjacent first patterns 2A, 2B; and, etching the SOG film so positioned to expose the nitride film thereunder thereby forming a mask pattern for contact hole 8A in the second photoresist layer 7.
Claim 15
Independent Claim
463 words
A method of forming a mask pattern for contact hole, comprising: depositing a conducting layer 2 on a semiconductor substrate 1; removing portions of the conducting layer 2 from the semiconductor substrate to form adjacent first patterns 2A, 2B which are spaced apart on the surface of the semiconductor substrate relative to each other and which extend up from the surface of the semiconductor substrate resulting in a step difference between the surface of the semiconductor substrate and the surface of the adjacent first patterns 2A, 2B and to expose portions of the semiconductor substrate including the semiconductor substrate extending between the adjacent first patterns 2A, 2B; depositing an insulating layer 3 on the entire surface of the resulting structure which comprises the adjacent first patterns 2A, 2B and the exposed portions of the semiconductor substrate which impart an unevenness to the surface of the insulating layer 3; depositing a nitride layer 4 on the uneven insulating layer 3 which imparts an unevenness to the surface of the nitride layer 4 to protect the insulating layer by functioning as an etch stop layer; depositing a SOG, spin on glass, film 5 on the nitride layer 4 to provide a flat surfaced self-leveling film on the uneven nitride layer 4; heating the SOG film 5 to impart a anticorrosive characteristic thereto; depositing a first photoresist layer 6 on the SOG film 5; removing the photoresist layer 6 deposited on the SOG film 5 to thereby expose the SOG film thereunder except for a portion of the photoresist layer 6 on the SOG film positioned above the semiconductor substrate extending between the adjacent first patterns 2A, 2B; removing the exposed SOG film 5 to expose the nitride layer thereunder except for the portion of the SOG film beneath the photoresist layer 6 and on the nitride layer positioned above the semiconductor substrate extending between the adjacent first patterns 2A, 2B, thereby forming a second pattern 5A comprising the portion of the photoresist layer 6 deposited on the SOG film 5 which is deposited on the nitride layer positioned above the semiconductor substrate extending between the adjacent first patterns 2A, 2B; removing the remaining first photoresist layer 6 and depositing a second photoresist layer 7 on the entire surface of the resulting structure comprising the SOG film 5 positioned above the semiconductor substrate extending between the adjacent first patterns 2A, 2B and the exposed nitride layer; and planarizing and removing the second photoresist layer 7 to expose a top surface 5B of the SOG film positioned above the semiconductor substrate extending between the adjacent first patterns 2A, 2B; and, etching the SOG film so positioned to expose the nitride film thereunder thereby forming a mask pattern for contact hole 8A in the second photoresist layer 7.
Claim 16
Dependent Claim
70 words
The method of claim 13 further including an additional step of forming a contact hole by sequentially etching the exposed nitride layer 4 and the underlying insulating layer 3 positioned above the semiconductor substrate extending between the adjacent first patterns 2A, 2B utilizing the mask pattern 8A for contact hole, thereby forming a contact hole accessing a portion of the semiconductor substrate extending between the adjacent first patterns 2A, 2B.
Claim 17
Dependent Claim
71 words
The method of claim 13 wherein the SOG film is removed by etching in the presence of a gas selected from the group consisting of: CHF, CF+O 2 or CHF+O 2 to form the second pattern 5A comprising the portion of the SOG film positioned above the semiconductor substrate extending between the adjacent first patterns 2A, 2B with the portion of the first photoresist layer 6 positioned on the SOG film.
Claim 18
Dependent Claim
31 words
The method of claim 13 wherein the second photoresist layer 7 is removed to the extent to expose the top surface of the SOG film by a blanket etch back process.
Claim 19
Dependent Claim
28 words
The method of claim 13 wherein the second photoresist layer is planarized prior to being removed to the extent to expose the top surface of the SOG film.
Claim 20
Dependent Claim
42 words
The method of claim 13 wherein the mask pattern for contact hole is formed by dipping the exposed SOG film into a chemical etchant to remove the SOG film positioned above the semiconductor substrate extending between the adjacent first patterns 2A, 2B.
Claim 21
Dependent Claim
22 words
The method of claim 18 wherein the etchant is selected from the group consisting of: NH 4 OH:HF, NiKOH and deionized water-HF.
Claim 22
Dependent Claim
33 words
The method of claim 13 wherein the baking of the SOG film is performed in a hot plate at a temperature of about 200 degrees Celsius for a period of about 1 minute.
Claim 23
Dependent Claim
33 words
The method of claim 13 wherein the baking of the SOG film is performed in a convection oven at a temperature of about 200 degrees Celsius for a period of about 30 minutes.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-10-20 | 1996-04-20 | 1996-10-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-10-20 | 2000-04-20 | 2000-10-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-10-20 | 2004-04-20 | 2004-10-20 | $7700.00 | Window Closed / Lapsed |