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Photoresist

Assignee: Huntsman Advanced Materials Americas LLC
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Filing: 1990-06-13
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Granted: 1992-10-06
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Expires: 2010-06-13
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Abstract

Abstract Photocurable and solvent-developable compositions based on photopolymerizable (meth)acrylates, a photoinitiator for (meth)acrylates, an organic polymeric binder which comprises free carboxyl groups and has an acid number of at least 60, a blocked polyisocyanate crosslinking agent which has a cleavage temperature of at least 100° C., and an inert solvent in an amount such that the photocurable composition is pourable, are described.

Inventors

  • 👤 Kurt Meier
  • 👤 Robert J. Lunn
  • 👤 Christoph Kroehnke
  • 👤 Giuliano Eugster

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 18:33
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/027; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/111

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 69 words
A photocurable and solvent-developable composition comprising a) a photopolymerizable acrylate or methacrylate, b) a photoinitiator for component a), c) a polymeric organic binder which comprises free carboxyl groups and has an acid number of at least 60, d) as crosslinking agent, a blocked polyisocyanate which has a cleavage temperature of at least 100° C., and e) an inert solvent in an amount such that the photocurable composition is pourable.
Claim 2
Dependent Claim 69 words
A photocurable and solvent-developable composition comprising a) a photopolymerizable acrylate or methacrylate, b) a photoinitiator for component a), c) a polymeric organic binder which comprises free carboxyl groups and has an acid number of at least 60, d) as crosslinking agent, a blocked polyisocyanate which has a cleavage temperature of at least 100° C., and e) an inert solvent in an amount such that the photocurable composition is pourable.
Claim 3
Dependent Claim 67 words
A composition according to claim 1, wherein component a) is a compound of the formula II A--R.sub.3 --(A).sub.n (II) in which n is 2, 3 or 4, R 3 is the radical of an aliphatic or cycloaliphatic n-hydric alcohol after removal of the OH groups, and A is a radical of the formula I ##STR2## in which R 1 is hydrogen or methyl, and X is -O-.
Claim 4
Dependent Claim 18 words
A composition according to claim 1, wherein component a) additionally comprises functional radicals which are reactive towards isocyanates.
Claim 5
Dependent Claim 15 words
The composition of claim 3, wherein said functional radicals are free carboxyl or alcohol groups.
Claim 6
Dependent Claim 53 words
A composition according to claim 1, wherein component b) is selected from the group consisting of benzoin, benzoin alkyl ethers, α-substituted acetophenones, benzophenones, titanocene initiators, stannanes in combination with photoreducible dyes; quinones or thioxanthones in combination with amines which have at least one hydrogen atom on an α-C atom; thioxanthones and acylphosphine oxides.
Claim 7
Dependent Claim 20 words
The composition of claim 5, wherein said α-substituted acetophenones are selected from the group consisting of α-halogenated-, α-amino-, dialkoxy-and α-hydroxyacetophenones.
Claim 8
Dependent Claim 24 words
A composition according to claim 1 which can be developed in alkaline aqueous media, wherein component c) is soluble in an alkaline aqueous solvent.
Claim 9
Dependent Claim 69 words
A composition according to claim 7 wherein component c) is a homopolymer of acrylic acid, methacrylic acid, maleic acid or itaconic acid; or component c) is a copolymer of acrylic acid, methacrylic acid, maleic acid or itaconic acid with styrene; or component c) is a copolymer of acrylic acid, methacrylic acid, maleic acid or itaconic acid with an ester of acrylic acid, methacrylic acid, maleic acid or itaconic acid.
Claim 10
Dependent Claim 27 words
A composition according to claim 1, wherein component c) is a polymeric organic binder comprising free carboxyl groups and acrylic or methacrylic groups in the same molecule.
Claim 11
Dependent Claim 40 words
A composition according to claim 1, wherein component d) is an aliphatic, cycloaliphatic, aromatic or araliphatic di-, tri- or tetraisocyanate compound whose isocyanate groups are blocked by β-dicarbonyl compounds, hydroxamates, triazoles, imidazoles, imidazolides, tetrahydropyrimidines, lactams, oximes, hydroxyimides, phenols or thiophenols.
Claim 12
Dependent Claim 23 words
A composition according to claim 1, wherein component d) has a cleavage temperature between 100° and 160° C. and is an oxime-blocked polyisocyanate.

References Cited (Backward Citations)

JPS54132633A Cited
US4961960A Cited
US4621043A Cited
US4621043B1 Cited
GB2175908A Cited
EP0287019A2 Cited
EP0292219A2 Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-10-06 1996-04-06 1996-10-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-10-06 2000-04-06 2000-10-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-10-06 2004-04-06 2004-10-06 $7700.00 Window Closed / Lapsed

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