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Amorphous silicon film, its production and photo semiconductor device utilizing such a film
Assignee: Sanyo Electric Co Ltd
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Filing: 1990-08-29
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Granted: 1992-10-06
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Expires: 2010-08-29
Abstract
Abstract An amorphous silicon film contains not less than 30 at. % hydrogen and includes silicon atoms joined with one hydrogen atom and silicon atoms joined with two hydrogen atoms, the ratio of the silicon atoms joined with two hydrogen atoms to the silicon atoms joined with one hydrogen atom being not more than 0.4. This amorphous silicon films is produced by performing plasma-assisted chemical vapor deposition at a substrate temperature of not more than 100 DEG C., while supplying hydrogen and silane in the predetermined ratio, the ratio of the flow of hydrogen to that of silane being not less than 1.
Inventors
- 👤 Masayuki Iwamoto
- 👤 Koji Minami
- 👤 Toshihiko Yamaoki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 10:01
CPC Classifications
H; H10; H10F; H10F10/00; H10F10/10; H10F10/16; H10F10/164; H10F10/165; H10F10/166; H10F10/12; H10F10/17; H10F71/00; H10F71/10; H10F71/103; H10F77/00; H10F77/10; H10F77/16; H10F77/162; H10F77/166; H10F77/1662; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/29; H10P14/2901; H10P14/2922; H10P14/2923; H10P14/32; H10P14/3202; H10P14/3204; H10P14/3208; H10P14/3211; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/548; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
58 words
An amorphous silicon film consisting essentially of silicon and not less than 30 at. % hydrogen and including silicon atoms joined with one hydrogen atom and silicon atoms joined with two hydrogen atoms, the ratio of said silicon atoms joined with two hydrogen atoms to said silicon atoms joined with one hydrogen atom being not more than 0.4.
Claim 2
Dependent Claim
58 words
An amorphous silicon film consisting essentially of silicon and not less than 30 at. % hydrogen and including silicon atoms joined with one hydrogen atom and silicon atoms joined with two hydrogen atoms, the ratio of said silicon atoms joined with two hydrogen atoms to said silicon atoms joined with one hydrogen atom being not more than 0.4.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-10-06 | 1996-04-06 | 1996-10-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-10-06 | 2000-04-06 | 2000-10-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-10-06 | 2004-04-06 | 2004-10-06 | $7700.00 | Window Closed / Lapsed |