Controllable integrated optical mach-zehnder interferometer

Claim 2

A controllable integrated optical Mach-Zehnder interferometer, comprising: a substrate of semiconductor material; first and second strip waveguides of a defined width integrated on the substrate and defined by waveguiding layers at the substrate; in two coupling sections, the strip waveguides proceeding side-by-side and at a spacing from one another which is sufficiently small such that an optical wave guided in the waveguiding layer of one of the strip waveguides can couple over into the waveguiding layer of the other strip waveguide; in a phase shifting section, the two waveguides being in side-by-side relationship and at a spacing which is sufficiently great such that an over-coupling of optical waves between the two strip waveguides is substantially prevented; in said phase shifting section at least one of the strip waveguides having a rib of semiconductor material and a spacer layer arranged over its waveguiding layer and which defines a width of the at least one strip waveguide where the rib is present; a semiconductor junction which is electrically controllable via contacts is integrated within said phase shifting section in a region of said rib of said at least one strip waveguide such that a transition from p-doped material of said rib to n-doped or undoped material of said spacer layer is arranged at a specified distance from the waveguiding layer at a side facing the p-doped material, and wherein the rib of p-doped material is situated at a side of this transition facing away from the waveguiding layer; the section of the strip waveguide within the phase shifting section which is adjacent the semiconductor junction comprising an electrically controllable strip waveguide section; and sections of the strip waveguides situated outside of the electrically controllable strip waveguide section forming passive strip waveguides which are free of semiconductor junctions.

Claim 3

An interferometer according to claim 1 wherein the phase shifting section is positioned between the two coupling sections.

Claim 4

An interferometer according to claim 1 wherein the spacer layer has a refractive index lower than a refractive index of the adjacent waveguiding layer.

Claim 5

An interferometer according to claim 1 wherein the spacer layer comprises undoped material.

Claim 6

An interferometer according to claim 1 wherein the spacer layer comprises n-doped material.

Claim 7

An interferometer according to claim 1 wherein the semiconductor junction comprises a pn-junction.

Claim 8

An interferometer according to claim 1 wherein the semiconductor junction comprises a pin-junction.

Claim 9

An interferometer according to claim 1 wherein the waveguiding layer of the substrate comprises undoped semiconductor material.

Claim 10

An interferometer according to claim 1 wherein the waveguiding layer of the substrate comprises n-doped semiconductor material.

Claim 11

An interferometer according to claim 1 wherein said passive strip waveguide sections which are free of pn- and pin-junctions comprise a strip-shaped waveguiding layer whose width defines a width of the passive strip waveguide, and wherein this striped-shaped waveguiding layer is contacted by the substrate has a uniform material at one side and another uniform material at the other side.

Claim 12

An interferometer according to claim 10 wherein said another uniform material at the other side is a material which is the same as the uniform material of the substrate.

Claim 13

An interferometer according to claim 1 wherein the strip waveguide sections which are free of pn- or pin-junctions comprises a strip-shaped waveguiding layer whose width defines a width of the passive strip waveguide and wherein this strip-shaped waveguiding layer is surrounded by the substrate.

Claim 14

A controllable integrated optical Mach-Zehnder interferometer, comprising: a substrate of semiconductor material; first and second strip waveguides of a defined width integrated on the substrate and defined by waveguiding layers at the substrate; in two coupling sections, the strip waveguides proceeding side-by-side and at a spacing from one another which is sufficiently small such that an optical wave guided in the waveguiding layer of one of the strip waveguides can couple over into the waveguiding layer of the other strip waveguide; in a phase shifting section, the two waveguides being in side-by-side relationship and at a spacing which is sufficiently great such that an over-coupling of optical waves between the two strip waveguides is substantially prevented; in said phase shifting section at least one of the strip waveguides having a rib of semiconductor material and a spacer layer arranged over its waveguiding layer and which defines a width of the at least one strip waveguide where the rib is present; a semiconductor junction which is electrically controllable via contacts is integrated within said phase shifting section in a region of said rib of said at least one strip waveguide such that a transition from p-doped material of said rib to n-doped or undoped material of said spacer layer is arranged at a specified distance from the waveguiding layer, and wherein the rib of p-doped material is situated at a side of this transition facing away from the waveguiding layer; the section of the strip waveguide within the phase shifting section which is adjacent the semiconductor junction comprising an electrically controllable strip waveguide section; sections of the strip waveguides situated outside of the electrically controllable strip waveguide section forming passive strip waveguides which are free of semiconductor junctions; and said passive strip waveguide sections which are free of pn- or pin-junctions comprising a rib forming a thicker region of the waveguiding layer, a width of said rib defining a width of the passive strip waveguide, and wherein on a side facing away from the substrate the surface of the waveguiding layer with the rib is in direct contact with a uniform material.

Claim 15

A controllable integrated optical Mach-Zehnder interferometer, comprising: a substrate of semiconductor material; first and second strip waveguides of a defined width integrated on the substrate and defined by waveguiding layers at the substrate; in two coupling sections, the strip waveguides proceeding side-by-side and at a spacing from one another which is sufficiently small such that an optical wave guided in the waveguiding layer of one of the strip waveguides can couple over into the waveguiding layer of the other strip waveguide; in a phase shifting section, the two waveguides being in side-by-side relationship and at a spacing which is sufficiently great such that an over-coupling of optical waves between the two strip waveguides is substantially prevented; in said phase shifting section at least one of the strip waveguides having a rib of semiconductor material and a spacer layer arranged over its waveguiding layer and which defines a width of the at least one strip waveguide where the rib is present; a semiconductor junction which is electrically controllable via contacts is integrated within said phase shifting section in a region of said rib of said at least one strip waveguide such that a transition from p-doped material of said rib to n-doped or undoped material of said spacer layer is arranged at a specified distance from the waveguiding layer, and wherein the rib of p-doped material is situated at a side of this transition facing away from the waveguiding layer; the section of the strip waveguide within the phase shifting section which is adjacent the semiconductor junction comprising an electrically controllable strip waveguide section; sections of the strip waveguides situated outside of the electrically controllable strip waveguide section forming passive strip waveguides which are free of semiconductor junctions; and said passive strip waveguide sections which are free of pn- or pin-junctions comprising a rib forming a thicker region of the waveguiding layer, a width of said rib defining a width of the passive strip waveguide, and wherein on a side facing away from the substrate the surface of the waveguiding layer with the rib is in direct contact with a uniform material.

Claim 16

An interferometer according to claim 13 wherein the uniform material comprises air.

Claim 17

A controllable integrated optical Mach-Zehnder interferometer, comprising: a substrate of semiconductor material; first and second strip waveguides of a defined width integrated on the substrate and defined by waveguiding layers at the substrate; in two coupling sections, the strip waveguides proceeding side-by-side and at a spacing from one another which is sufficiently small such that an optical wave guided in the waveguiding layer of one of the strip waveguides can couple over into the waveguiding layer of the other strip waveguide; in a phase shifting section, the two waveguides being in side-by-side relationship and at a spacing which is sufficiently great such that an over-coupling of optical waves between the two strip waveguides is substantially prevented; in said phase shifting section at least one of the strip waveguides having a rib of semiconductor material and a spacer layer arranged over its waveguiding layer and which defines a width of the at least one strip waveguide where the rib is present; a semiconductor junction which is electrically controllable via contacts is integrated within said phase shifting section in a region of said rib of said at least one strip waveguide such that a transition from p-doped material of said rib to n-doped or undoped material of said spacer layer is arranged at a specified distance from the waveguiding layer, and wherein the rib of p-doped material is situated at a side of this transition facing away from the waveguiding layer; the section of the strip waveguide within the phase shifting section which is adjacent the semiconductor junction comprising an electrically controllable strip waveguide section; sections of the strip waveguides situated outside of the electrically controllable strip waveguide section forming passive strip waveguides which are free of semiconductor junctions; and the strip waveguide sections free of pn- and pin-junctions comprising a rib forming a thick region of a further layer formed of a uniform material which is arranged on and over the waveguiding layer, a width of said rib defining a width of the passive strip waveguide, and wherein the further layer has a surface facing away from the waveguiding layer which is adjacent to a uniform material.

Claim 18

A controllable integrated optical Mach-Zehnder interferometer, comprising: a substrate of semiconductor material; first and second strip waveguides of a defined width integrated on the substrate and defined by waveguiding layers at the substrate; in two coupling sections, the strip waveguides proceeding side-by-side and at a spacing from one another which is sufficiently small such that an optical wave guided in the waveguiding layer of one of the strip waveguides can couple over into the waveguiding layer of the other strip waveguide; in a phase shifting section, the two waveguides being in side-by-side relationship and at a spacing which is sufficiently great such that an over-coupling of optical waves between the two strip waveguides is substantially prevented; in said phase shifting section at least one of the strip waveguides having a rib of semiconductor material and a spacer layer arranged over its waveguiding layer and which defines a width of the at least one strip waveguide where the rib is present; a semiconductor junction which is electrically controllable via contacts is integrated within said phase shifting section in a region of said rib of said at least one strip waveguide such that a transition from p-doped material of said rib to n-doped or undoped material of said spacer layer is arranged at a specified distance from the waveguiding layer, and wherein the rib of p-doped material is situated at a side of this transition facing away from the waveguiding layer; the section of the strip waveguide within the phase shifting section which is adjacent the semiconductor junction comprising an electrically controllable strip waveguide section; sections of the strip waveguides situated outside of the electrically controllable strip waveguide section forming passive strip waveguides which are free of semiconductor junctions; and the strip waveguide sections free of pn- and pin-junctions comprising a rib forming a thick region of a further layer formed of a uniform material which is arranged on and over the waveguiding layer, a width of said rib defining a width of the passive strip waveguide, and wherein the further layer has a surface facing away from the waveguiding layer which is adjacent to a uniform material.

Claim 19

An interferometer according to claim 15 wherein the uniform material adjacent the further layer surface facing away from the waveguiding layer comprises air.

Claim 20

A controllable integrated optical Mach-Zehnder interferometer, comprising: a substrate of semiconductor material; first and second strip waveguides of a defined width integrated on the substrate and defined by waveguiding layers at the substrate; in two coupling sections, the strip waveguides proceeding side-by-side and at a spacing from one another which is sufficiently small such that an optical wave guided in the waveguiding layer of one of the strip waveguides can couple over into the waveguiding layer of the other strip waveguide; in a phase shifting section, the two waveguides being in side-by-side relationship and at a spacing which is sufficiently great such that an over-coupling of optical waves between the two strip waveguides is substantially prevented; in said phase shifting section at least one of the strip waveguides having a rib of semiconductor material arranged over its waveguiding layer; a semiconductor junction which is electrically controllable via contacts is integrated within said phase shifting section in a region of said rib of said at least one strip waveguide spaced from a side of the waveguiding layer facing the rib; the section of the strip waveguide within the phase shifting section which is adjacent the semiconductor junction comprising an electrically controllable strip waveguide section; and sections of the strip waveguides situated outside of the electric controllable strip waveguide section forming passive strip waveguides which are free of semiconductor junctions.

Claim 21

A controllable integrated optical Mach-Zehnder interferometer, comprising: a substrate of semiconductor material; first and second strip waveguides of a defined width integrated on the substrate and defined by waveguiding layers at the substrate; in two coupling sections, the strip waveguides proceeding side-by-side and at a spacing from one another which is sufficiently small such that an optical wave guided in the waveguiding layer of one of the strip waveguides can couple over into the waveguiding layer of the other strip waveguide; in a phase shifting section, the two waveguides being in side-by-side relationship and at a spacing which is sufficiently great such that an over-coupling of optical waves between the two strip waveguides is substantially prevented; in said phase shifting section at least one of the strip waveguides having a rib of semiconductor material arranged over its waveguiding layer; a semiconductor junction which is electrically controllable via contacts is integrated within said phase shifting section in a region of said rib of said at least one strip waveguide spaced from a side of the waveguiding layer facing the rib; the section of the strip waveguide within the phase shifting section which is adjacent the semiconductor junction comprising an electrically controllable strip waveguide section; and sections of the strip waveguides situated outside of the electric controllable strip waveguide section forming passive strip waveguides which are free of semiconductor junctions.