Method to form self-aligned tips for flat panel displays

Claim 2

A process for forming conductive self-aligned emission cathode tips on a starting substrate for use in flat panel displays, said process comprising the steps of: a) forming a first dielectric layer superjacent and coextensive said starting substrate; b) placing and patterning a first conductive layer superjacent and coextensive said first dielectric layer, said patterning of said first conductive layer resulting in a conductive grid structure having a plurality of a first set of parallel conductive lines in intersection with a plurality of a second set of parallel conductive lines and a plurality of exposed portions of said first dielectric layer; c) forming a second dielectric layer superjacent and coextensive said conductive grid structure and exposed portions of said first dielectric layer; d) etching a buried contact opening at each grid intersection thereby exposing portions of said starting substrate, and forming patterned edges in each layer bordering each said contact opening; e) forming a sacrificial layer superjacent and coextensive said second dielectric layer and the patterned edges of said second dielectric layer, said first conductive layer and said first dielectric layer thereby forming cone-shaped voids at said exposed portions of said starting substrate; f) placing a second conductive layer into said cone-shaped voids thereby connecting to said exposed portions of said starting substrate; g) removing said sacrificial layer thereby forming said self-aligned cathode emission tips; and h) sharpening said emission tips.

Claim 3

A process as recited in claim 1, wherein said starting substrate is silicon.

Claim 4

A process as recited in claim 1, wherein said second conductive layer is selectively deposited.

Claim 5

A process as recited in claim 1, wherein an additional step between steps "e" and "f" comprises etching said sacrificial layer thereby removing any film residue of said sacrificial layer present over said exposed portions of said starting substrate.

Claim 6

A process as recited in claim 4 wherein said etch is an isotropic etch.

Claim 7

A process as recited in claim 4 wherein said etch is an anisotropic etch.

Claim 8

A process as recited in claim 1, wherein said placing of said second conductive layer into said cone-shaped voids comprises the steps of: a) forming a blanket layer of said second conductive layer; and b) etching said blanket layer thereby leaving only said second conductive layer residing inside said cone-shaped void.

Claim 9

A process as recited in claim 1, wherein said first and said second conductive layers are metal.

Claim 10

A process as recited in claim 1, wherein said first and said second conductive layers are doped polysilicon.

Claim 11

A process as recited in claim 1, wherein said first conductive layer is metal and said second conductive layer is conductively dope polysilicon.

Claim 12

A process as recited in claim 1, wherein said first conductive layer is conductively doped polysilicon and said second conductive layer is metal.

Claim 13

A process as recited in claim 1, wherein said second conductive layer is single crystalline silicon formed by epitaxial growth.

Claim 14

A process as recited in claim 1, wherein said forming of said sacrificial layer results in a step coverage such that said sacrificial layer does not coat said exposed substrate and instead forms sacrificial film buildup at the top of said patterned edges while tapering inward and thereby becoming thinner at the bottom of said patterned edges.

Claim 15

A process as recited in claim 13, wherein said sacrificial layer comprises a dielectric layer.

Claim 16

A process as recited in claim 1, wherein said forming said sacrificial layer is a process selected from the group consisting essentially of film sputtering, plasma CVD and CVD TEOS

Claim 17

A process for forming conductive self-aligned emission cathode tips on a starting substrate for use in flat panel displays, said process comprising the steps of: a) forming a first dielectric layer superjacent and coextensive said starting substrate; b) placing and patterning a first conductive layer, superjacent and coextensive said first dielectric layer, said patterning of said first conductive layer resulting in a conductive grid structure having a plurality of a first set of parallel conductive lines in intersection with a plurality of second set of parallel conductive lines and a plurality of exposed portions of said first dielectric layer; c) forming a second dielectric layer superjacent and coextensive said conductive grid structure and exposed portions of said first dielectric layer; d) etching a buried contact opening at each grid intersection thereby exposing portions of said starting substrate; e) forming a sacrificial layer superjacent and coextensive said second dielectric layer and the patterned edges of said second dielectric layer, said first conductive layer and said first dielectric layer thereby forming cone-shaped voids at said exposed portions of said starting substrate; f) placing a second conductive layer selectively into said cone-shaped voids thereby connecting to said exposed portions of said starting substrate; g) removing said sacrificial layer thereby forming said self-aligned cathode emission tips; and h) sharpening said emission tips

Claim 18

A process for forming conductive self-aligned emission cathode tips on a starting substrate for use in flat panel displays, said process comprising the steps of: a) forming a first dielectric layer superjacent and coextensive said starting substrate; b) placing and patterning a first conductive layer, superjacent and coextensive said first dielectric layer, said patterning of said first conductive layer resulting in a conductive grid structure having a plurality of a first set of parallel conductive lines in intersection with a plurality of second set of parallel conductive lines and a plurality of exposed portions of said first dielectric layer; c) forming a second dielectric layer superjacent and coextensive said conductive grid structure and exposed portions of said first dielectric layer; d) etching a buried contact opening at each grid intersection thereby exposing portions of said starting substrate; e) forming a sacrificial layer superjacent and coextensive said second dielectric layer and the patterned edges of said second dielectric layer, said first conductive layer and said first dielectric layer thereby forming cone-shaped voids at said exposed portions of said starting substrate; f) placing a second conductive layer selectively into said cone-shaped voids thereby connecting to said exposed portions of said starting substrate; g) removing said sacrificial layer thereby forming said self-aligned cathode emission tips; and h) sharpening said emission tips

Claim 19

A process as recited in claim 16, wherein said starting substrate is silicon.

Claim 20

A process as recited in claim 16, wherein said second conductive layer is selectively deposited.

Claim 21

A process as recited in claim 16, wherein an additional step between steps "e" and "f" comprises etching said sacrificial layer thereby removing any film residue of said sacrificial layer present over said exposed portions of said starting substrate.

Claim 22

A process a recited in claim 19 wherein said etch is an isotropic etch.

Claim 23

A process as recited in claim 19 wherein said etch is an anisotropic etch.

Claim 24

A process as recited in claim 16, wherein said second conductive layer is single crystalline silicon formed by epitaxial growth.

Claim 25

A process as recited in claim 16, wherein said first and said second conductive layers are metal.

Claim 26

A process as recited in claim 16, wherein said first and said second conductive layers are doped polysilicon.

Claim 27

A process as recited in claim 16, wherein said first conductive layer is metal and said second conductive layer is conductively doped polysilicon.

Claim 28

A process as recited in claim 16, wherein said first conductive layer is conductively doped polysilicon and said second conductive layer is metal.

Claim 29

A process as recited in claim 16, wherein said forming of said sacrificial layer results in a step coverage such that said sacrificial layer does not coat said exposed substrate and instead forms sacrificial film buildup at the top of said patterned edges while tapering inward and thereby becoming thinner at the bottom of said patterned edges.

Claim 30

A process as recited in claim 27, wherein said sacrificial layer comprises a dielectric layer.

Claim 31

A process as recited in claim 16, wherein said forming said sacrificial layer is a process selected from the group consisting essentially of film sputtering, plasma CVD and CVD TEOS.

Claim 32

A process for forming conductive self-aligned emission cathode tips on a starting substrate for use in flat panel displays, said process comprising the steps of: a) forming a first dielectric layer superjacent and coextensive said starting substrate; b) placing and patterning a first conductive layer superjacent and coextensive said first dielectric layer, said patterning of said first conductive layer resulting in a conductive grid structure having a plurality of a first set of parallel conductive lines in intersection with a plurality of a second set of parallel conductive lines and a plurality of exposed portions of said first dielectric layer; c) forming a second dielectric layer superjacent and coextensive said conductive grid structure and exposed portions of said first dielectric layer d) etching a buried contact opening at each grid intersection thereby exposing portions of said starting substrate; e) forming a sacrificial layer superjacent and coextensive said second dielectric layer and the patterned edges of said second dielectric layer, said first conductive layer and said first dielectric layer thereby forming cone-shaped voids at said exposed portions of said starting substrate; f) placing blanketing second conductive layer superjacent said sacrificial layer and into said cone-shaped voids thereby connecting to said exposed portions of said starting substrate; g) isotropically etching said second conductive layer thereby exposing said sacrificial layer while leaving said second conductor residing inside said cone-shaped voids; h) removing said sacrificial layer thereby forming said self-aligned cathode emission tips; and i) sharpening said emission tips.

Claim 33

A process for forming conductive self-aligned emission cathode tips on a starting substrate for use in flat panel displays, said process comprising the steps of: a) forming a first dielectric layer superjacent and coextensive said starting substrate; b) placing and patterning a first conductive layer superjacent and coextensive said first dielectric layer, said patterning of said first conductive layer resulting in a conductive grid structure having a plurality of a first set of parallel conductive lines in intersection with a plurality of a second set of parallel conductive lines and a plurality of exposed portions of said first dielectric layer; c) forming a second dielectric layer superjacent and coextensive said conductive grid structure and exposed portions of said first dielectric layer d) etching a buried contact opening at each grid intersection thereby exposing portions of said starting substrate; e) forming a sacrificial layer superjacent and coextensive said second dielectric layer and the patterned edges of said second dielectric layer, said first conductive layer and said first dielectric layer thereby forming cone-shaped voids at said exposed portions of said starting substrate; f) placing blanketing second conductive layer superjacent said sacrificial layer and into said cone-shaped voids thereby connecting to said exposed portions of said starting substrate; g) isotropically etching said second conductive layer thereby exposing said sacrificial layer while leaving said second conductor residing inside said cone-shaped voids; h) removing said sacrificial layer thereby forming said self-aligned cathode emission tips; and i) sharpening said emission tips.

Claim 34

A process as recited in claim 30, wherein an additional step between steps "e" and "f" comprises etching said sacrificial layer thereby removing any film residue of said sacrificial layer present over said exposed portions of said starting substrate.

Claim 35

A process as recited in claim 31 wherein said etch is an isotropic etch.

Claim 36

A process as recited in claim 31 wherein said etch is an anisotropic etch.

Claim 37

A process as recited in claim 30, wherein said second conductive layer is single crystalline silicon formed by epitaxial growth.

Claim 38

A process as recited in claim 30, wherein said starting substrate is silicon.

Claim 39

A process as recited in claim 30, wherein said first and said second conductive layers are metal.

Claim 40

A process as recited in claim 30, wherein said first and said second conductive layers are doped polysilicon.

Claim 41

A process as recited in claim 30, wherein said first conductive layer is metal and said second conductive layer is conductively doped polysilicon.

Claim 42

A process as recited in claim 30, wherein said first conductive layer is conductively doped polysilicon and said second conductive layer is metal.

Claim 43

A process as recited in claim 30, wherein said forming of said sacrificial layer results in a step coverage such that said sacrificial layer does not coat said exposed substrate and instead forms sacrificial film buildup at the top of said patterned edges while tapering inward and thereby becoming thinner at the bottom of said patterned edges.

Claim 44

A process as recited in claim 40, wherein said sacrificial layer comprises a dielectric layer.

Claim 45

A process as recited in claim 30, wherein said forming said sacrificial layer is a process selected from the group consisting essentially of film sputtering, plasma CVD and CVD TEOS.