Fabrication methods for micromechanical elements

Claim 2

A process for making an concave surface comprising; providing a member having a generally planar surface with wall means extending from said surface, growing bumper means into said wall means and forming a convexo-concave relationship with said wall means, removing said bumper means from said wall means such that said wall means retains the concave shape.

Claim 3

The process in claim 1 wherein said member includes a second generally planar surface and said wall means is provided by: masking and etching said second generally planar surface and said member to expose said first named generally planar surface of said member and to form a structure protruding from said first named generally planar surface of said member, said wall means being located on said protruding structure.

Claim 4

The process in claim 2 wherein said bumper means is oxide.

Claim 5

The process in claim 2 wherein said wall means is annular.

Claim 6

The process in claim 2 wherein said protruding structure is elongated and said wall means is elongated and comprises two walls on opposite sides of said protruding structure.

Claim 7

The process in claim 1 wherein said member includes a second generally planar surface and said wall means is provided by: masking and etching said second generally planar surface and said member to expose said first named generally planar surface of said member and to form a depression in said member which is defined by wall means and said first named generally planar surface.

Claim 8

The process in claim 6 wherein said wall means is annular.

Claim 9

The process in claim 6 wherein said wall means is elongated.

Claim 10

The process in claim 6 wherein said bumper means is oxide.

Claim 11

The process in claim 1 wherein said member is a silicon wafer and said wall means is provided by: forming a nitride layer on a silicon wafer, and masking and etching said silicon wafer and said nitride layer to expose at least a portion of said generally planar surface and to form a structure of said silicon wafer and said nitride layer which protrudes from said exposed portion of said generally planar surface, said wall means being located on the protruding structure.

Claim 12

The process in claim 1 wherein said member is a silicon wafer and said wall means is provided by: forming a nitride layer on a silicon wafer, and masking and etching said silicon wafer and said nitride layer to expose at least a portion of said generally planar surface and to form a depression in said silicon wafer which is defined by said wall means and said exposed portion of said generally planar surface.

Claim 13

The process in claim 1 wherein said wall means is provided by: forming a polysilicon layer on said generally planar surface, forming a nitride layer on said polysilicon layer, and masking and etching said polysilicon layer and said nitride layer to expose at least a portion of said generally planar surface and to form a structure of said polysilicon layer and said nitride layer which protrudes from said exposed portion of said generally planar surface, said wall means being located on the protruding structure.

Claim 14

The process in claim 1 wherein said wall means is provided by: forming a polysilicon layer on said member, forming a nitride layer on said polysilicon layer, and masking and etching said polysilicon layer and said nitride layer to expose at least a portion of said generally planar surface and to form a depression in said polysilicon layer and said nitride layer which is defined by said wall means and said exposed portion of said generally planar surface.

Claim 15

The process in claim 1 wherein said member includes a first nitride layer which is said generally planar surface and said wall means is provided by: forming a polysilicon layer on said first nitride layer, forming a second nitride layer on said polysilicon layer, and masking and etching said second nitride layer and said polysilicon layer to expose at least a portion of said first nitride layer and to form a structure of said second nitride layer and said polysilicon layer which protrudes from said exposed portion of said first nitride layer, said wall means being located on the protruding structure.

Claim 16

The process in claim 1 wherein said member includes a first nitride layer which is said generally planar surface and said wall means is provided by: forming a polysilicon layer on said first nitride layer, forming a second nitride layer on said polysilicon layer, and masking and etching said second nitride layer and said polysilicon layer to expose at least a portion of said first nitride layer and to form a depression in said second nitride layer and said polysilicon layer which is defined by said wall means and said exposed portion of said first nitride layer.

Claim 17

The process in claim 1 wherein said wall means is provided by: forming a first nitride layer on said member, forming a polysilicon layer on said first nitride layer, forming a second nitride layer on said polysilicon layer, and masking and etching said first nitride layer, said polysilicon layer, and said second nitride layer to to expose at least a portion of said generally planar surface to form a structure of said first nitride layer, said polysilicon layer, and said second nitride layer which protrudes from said exposed portion of said generally planar surface, said wall means being located on the protruding structure.

Claim 18

The process in claim 1 wherein said wall means is provided by forming a first nitride layer on said member, forming a polysilicon layer on said first nitride layer, forming a second nitride layer on said polysilicon layer, and masking and etching said first nitride layer, said polysilicon layer, and said second nitride layer to expose at least a portion of said generally planar surface and to form a depression in said first nitride layer, said polysilicon layer, and said second nitride layer which is defined by said wall means and said exposed portion of said generally planar surface.

Claim 19

A process for making micromechanical structures comprising; providing a member having a generally planar surface with wall means extending from said surface, growing bumper means into said wall means and forming a convexo-concave relationship with said wall means, removing one of said means from the other of said means such that the remaining means is attached to said member, forming a sacrificial layer on at least a portion of at least said remaining means, forming a structural layer on at least a portion of said sacrificial layer, patterning said structural layer, removing said sacrificial layer such that said remaining means and said patterned structural layer are movable relative to each other.

Claim 20

A process for making micromechanical structures comprising; providing a member having a generally planar surface with wall means extending from said surface, growing bumper means into said wall means and forming a convexo-concave relationship with said wall means, removing one of said means from the other of said means such that the remaining means is attached to said member, forming a sacrificial layer on at least a portion of at least said remaining means, forming a structural layer on at least a portion of said sacrificial layer, patterning said structural layer, removing said sacrificial layer such that said remaining means and said patterned structural layer are movable relative to each other.

Claim 21

The process in claim 18 wherein said member includes a second generally planar surface and said wall means is provided by: masking and etching said second generally planar surface and said member to expose said first named generally planar surface of said member and to form a structure protruding from said first named generally planar surface of said member, said wall means being located on said protruding structure.

Claim 22

The process in claim 19 wherein said bumper means is oxide.

Claim 23

The process in claim 19 wherein said sacrificial layer comprises one of silicon oxide or silicon nitride and said structural layer comprises one of polysilicon, silicon nitride, metal silicide, or metal.

Claim 24

The process in claim 19 wherein said wall means is annular and said structural layer has an annular recessed cavity receiving said protruding structure.

Claim 25

The process in claim 19 wherein said protruding structure is elongated and said wall means is elongated and said structural layer has a slot receiving said protruding structure.

Claim 26

The process in claim 18 wherein said member includes a second generally planar surface and said wall means is provided by: masking and etching said second generally planar surface and said member to expose said first named generally planar surface of said member and to form a depression in said member which is defined by wall means and said first named generally planar surface.

Claim 27

The process in claim 24 wherein said bumper means is oxide.

Claim 28

The process in claim 24 wherein said wall means is annular.

Claim 29

The process in claim 24 wherein said wall means is elongated.

Claim 30

The process in claim 18 wherein said step of removing one of said means from the other of said means such that the remaining means is attached to said member comprises removing said bumper means from said wall means.

Claim 31

The process in claim 18 wherein said step of removing one of said means from the other of said means such that the remaining means is attached to said member comprises removing said wall means from said bumper means.

Claim 32

A process for making a micromechanical device upon a substrate, comprising: providing a substrate; forming a first nitride layer upon said substrate; forming a doped polysilicon layer upon said first nitride layer; forming a second nitride layer upon said doped polysilicon layer; masking and etching said second nitride layer and said doped polysilicon layer to expose at least a portion of said first nitride layer and to form a structure with at least one wall means protruding from said exposed portion of said first nitride layer; growing oxide bumper means into said wall means of said protruding structure and forming a convexo-concave relationship with said wall means; etching said oxide bumper to remove the same from said wall means of said protruding structure while retaining the concave surface of said wall means; forming a sacrificial layer on at least a portion of said exposed portion of said first nitride layer and said protruding structure; forming a structural layer on at least a portion of said sacrificial layer; patterning said structural layer to form a moving structure for movement relative to said protruding structure and exposing portions of said sacrificial layer; and etching said sacrificial layer to release said moving structure from said protruding structure and providing for relative movement between said moving structure and said protruding structure.

Claim 33

A process for making a micromechanical device upon a substrate, comprising: providing a substrate; forming a first nitride layer upon said substrate; forming a doped polysilicon layer upon said first nitride layer; forming a second nitride layer upon said doped polysilicon layer; masking and etching said second nitride layer and said doped polysilicon layer to expose at least a portion of said first nitride layer and to form a structure with at least one wall means protruding from said exposed portion of said first nitride layer; growing oxide bumper means into said wall means of said protruding structure and forming a convexo-concave relationship with said wall means; etching said oxide bumper to remove the same from said wall means of said protruding structure while retaining the concave surface of said wall means; forming a sacrificial layer on at least a portion of said exposed portion of said first nitride layer and said protruding structure; forming a structural layer on at least a portion of said sacrificial layer; patterning said structural layer to form a moving structure for movement relative to said protruding structure and exposing portions of said sacrificial layer; and etching said sacrificial layer to release said moving structure from said protruding structure and providing for relative movement between said moving structure and said protruding structure.

Claim 34

A process for making a micromechanical device upon a substrate, comprising: providing a substrate; forming a first nitride layer upon said substrate; forming a doped polysilicon layer upon said first nitride layer; forming a second nitride layer upon said doped polysilicon layer; masking and etching said second nitride layer, said doped polysilicon layer and said first nitride layer to expose at least a portion of said substrate and to form a substrate with at least one wall means protruding from said exposed portion of said substrate; growing oxide bumper means into said wall means of said protruding structure and forming a convexo-concave relationship with said wall means; etching said oxide bumper to remove the same from said wall means of said protruding structure while retaining the concave surface of said wall means; forming a sacrificial layer on said at least a portion of exposed portion of said substrate and said protruding structure; forming a structural layer on at least a portion of said sacrificial layer; patterning said structural layer to form a moving structure for movement relative to said protruding structure and exposing portions of said sacrificial layer; and etching said sacrificial layer to release said moving structure from said protruding structure and providing for relative movement between said moving structure and said protruding structure.

Claim 35

A process for making a micromechanical device upon a substrate, comprising: providing a substrate; forming a first nitride layer upon said substrate; forming a doped polysilicon layer upon said first nitride layer; forming a second nitride layer upon said doped polysilicon layer; masking and etching said second nitride layer, said doped polysilicon layer and said first nitride layer to expose at least a portion of said substrate and to form a substrate with at least one wall means protruding from said exposed portion of said substrate; growing oxide bumper means into said wall means of said protruding structure and forming a convexo-concave relationship with said wall means; etching said oxide bumper to remove the same from said wall means of said protruding structure while retaining the concave surface of said wall means; forming a sacrificial layer on said at least a portion of exposed portion of said substrate and said protruding structure; forming a structural layer on at least a portion of said sacrificial layer; patterning said structural layer to form a moving structure for movement relative to said protruding structure and exposing portions of said sacrificial layer; and etching said sacrificial layer to release said moving structure from said protruding structure and providing for relative movement between said moving structure and said protruding structure.

Claim 36

A process for making a micromechanical device upon a substrate, comprising: providing a substrate; forming a doped polysilicon layer upon said substrate; forming a nitride layer upon said doped polysilicon layer; masking and etching said doped polysilicon layer and said nitride layer to expose at least a portion of said substrate and to form a structure with at least one wall means protruding from said exposed portion of said substrate; growing oxide bumper means into said wall means of said protruding structure and forming a convexo-concave relationship with said wall means; etching said oxide bumper to remove the same from said wall means of said protruding structure while retaining the concave surface of said wall means; forming a sacrificial layer on at least a portion of said exposed portion of said substrate and said protruding structure; forming a structural layer on at least a portion of said sacrificial layer; patterning said structural layer to form a moving structure for movement relative to said protruding structure and exposing portions of said sacrificial layer; and etching said sacrificial layer to release said moving structure from said protruding structure and providing for relative movement between said moving structure and said protruding structure.

Claim 37

A process for making a micromechanical device upon a substrate, comprising: providing a substrate; forming a doped polysilicon layer upon said substrate; forming a nitride layer upon said doped polysilicon layer; masking and etching said doped polysilicon layer and said nitride layer to expose at least a portion of said substrate and to form a structure with at least one wall means protruding from said exposed portion of said substrate; growing oxide bumper means into said wall means of said protruding structure and forming a convexo-concave relationship with said wall means; etching said oxide bumper to remove the same from said wall means of said protruding structure while retaining the concave surface of said wall means; forming a sacrificial layer on at least a portion of said exposed portion of said substrate and said protruding structure; forming a structural layer on at least a portion of said sacrificial layer; patterning said structural layer to form a moving structure for movement relative to said protruding structure and exposing portions of said sacrificial layer; and etching said sacrificial layer to release said moving structure from said protruding structure and providing for relative movement between said moving structure and said protruding structure.

Claim 38

A process for making a micromechanical device upon a substrate, comprising: providing a substrate; forming a a nitride layer upon said substrate; masking and etching said nitride layer and the substrate to expose at least a portion of said substrate and to form a structure with at least one wall means protruding from said exposed portion of said substrate; growing oxide bumper means into said wall means of said protruding structure and forming a convexo-concave relationship with said wall means; etching said oxide bumper to remove the same from said wall means of said protruding structure while retaining the concave surface of said wall means; forming a scarificial layer on at least a portion of said exposed portion of said substrate and said protruding structure; forming a structural layer on at least a portion of said sacrifical layer; patterning said structural layer to form a moving structure for movement relative protruding structure and exposing portions of said sacrificial layer; and etching said sacrificial layer to release said moving structure from said protruding structure and providing for relative movement between said moving structure and said protruding structure.

Claim 39

A process for making a micromechanical device upon a substrate, comprising: providing a substrate; forming a a nitride layer upon said substrate; masking and etching said nitride layer and the substrate to expose at least a portion of said substrate and to form a structure with at least one wall means protruding from said exposed portion of said substrate; growing oxide bumper means into said wall means of said protruding structure and forming a convexo-concave relationship with said wall means; etching said oxide bumper to remove the same from said wall means of said protruding structure while retaining the concave surface of said wall means; forming a scarificial layer on at least a portion of said exposed portion of said substrate and said protruding structure; forming a structural layer on at least a portion of said sacrifical layer; patterning said structural layer to form a moving structure for movement relative protruding structure and exposing portions of said sacrificial layer; and etching said sacrificial layer to release said moving structure from said protruding structure and providing for relative movement between said moving structure and said protruding structure.

Claim 40

A process for making a micromechanical device upon a substrate, comprising: providing a substrate; forming a first nitride layer upon said substrate; forming a doped polysilicon layer upon said first nitride layer; forming a second nitride layer upon said doped polysilicon layer; masking and etching said second nitride layer and said doped polysilicon layer to expose at least a portion of said first nitride layer and to form a depression in said second nitride layer and said doped polysilicon layer which is defined by wall means and said exposed first nitride layer; growing oxide bumper means into said wall means of said depression and forming a convexo-concave relationship with said wall means; etching said oxide bumper to remove the same from said wall means of said depression while retaining the concave surface of said wall means; forming a sacrificial layer on said exposed portion of said first nitride layer, said wall means and at least a portion of the remaining portion of said second nitride layer; forming a structural layer on at least a portion of said sacrificial layer; patterning said structural layer to form a moving structure for movement relative to a structure forming said depression and exposing portions of said sacrificial layer; and etching said sacrificial layer to release said moving structure from said structure forming the derpession and providing for relative movement therebetween.

Claim 41

A process for making a micromechanical device upon a substrate, comprising: providing a substrate; forming a first nitride layer upon said substrate; forming a doped polysilicon layer upon said first nitride layer; forming a second nitride layer upon said doped polysilicon layer; masking and etching said second nitride layer and said doped polysilicon layer to expose at least a portion of said first nitride layer and to form a depression in said second nitride layer and said doped polysilicon layer which is defined by wall means and said exposed first nitride layer; growing oxide bumper means into said wall means of said depression and forming a convexo-concave relationship with said wall means; etching said oxide bumper to remove the same from said wall means of said depression while retaining the concave surface of said wall means; forming a sacrificial layer on said exposed portion of said first nitride layer, said wall means and at least a portion of the remaining portion of said second nitride layer; forming a structural layer on at least a portion of said sacrificial layer; patterning said structural layer to form a moving structure for movement relative to a structure forming said depression and exposing portions of said sacrificial layer; and etching said sacrificial layer to release said moving structure from said structure forming the derpession and providing for relative movement therebetween.

Claim 42

A process for making a micromechanical device upon a substrate, comprising: providing a substrate; forming a first nitride layer upon said substrate; forming a doped polysilicon layer upon said first nitride layer; forming a second nitride layer upon said doped polysilicon layer; masking and etching said second nitride layer, said doped polysilicon layer, and said first nitride layer to expose at least a portion of said substrate and to form a depression in said second nitride layer, said doped polysilicon layer and said first nitride layer which is defined by wall means and said exposed portion of said substrate; growing oxide bumper means into said wall means of said depression and forming a convexo-concave relationship with said wall means; etching said oxide bumper to remove the same from said wall means of said depression while retaining the concave surface of said wall means; forming a sacrificial layer on said exposed portion of said substrate, said wall means and at least a portion of the remaining portion of said second nitride layer; forming a structural layer on at least a portion of said sacrificial layer; patterning said structural layer to form a moving structure for movement relative to a structure forming said depression and exposing portions of said sacrificial layer; and etching said sacrificial layer to release said moving structure from said structure forming the depression and providing for relative movement therebetween.

Claim 43

A process for making a micromechanical device upon a substrate, comprising: providing a substrate; forming a first nitride layer upon said substrate; forming a doped polysilicon layer upon said first nitride layer; forming a second nitride layer upon said doped polysilicon layer; masking and etching said second nitride layer, said doped polysilicon layer, and said first nitride layer to expose at least a portion of said substrate and to form a depression in said second nitride layer, said doped polysilicon layer and said first nitride layer which is defined by wall means and said exposed portion of said substrate; growing oxide bumper means into said wall means of said depression and forming a convexo-concave relationship with said wall means; etching said oxide bumper to remove the same from said wall means of said depression while retaining the concave surface of said wall means; forming a sacrificial layer on said exposed portion of said substrate, said wall means and at least a portion of the remaining portion of said second nitride layer; forming a structural layer on at least a portion of said sacrificial layer; patterning said structural layer to form a moving structure for movement relative to a structure forming said depression and exposing portions of said sacrificial layer; and etching said sacrificial layer to release said moving structure from said structure forming the depression and providing for relative movement therebetween.

Claim 44

A process for making a micromechanical device upon a substrate, comprising: providing a substrate; forming a doped polysilicon layer upon said substrate; forming a nitride layer upon said doped polysilicon layer; masking and etching said nitride layer and said doped polysilicon layer to expose at least a portion of the substrate and to form a depression in said nitride layer and said doped polysilicon layer which is defined by wall means and said exposed portion of said substrate; growing oxide bumper means into said wall means of said depression and forming a convexo-concave relationship with said wall means; etching said oxide bumper to remove the same from said wall means of said depression while retaining the concave surface of said wall means of said depression while retaining the concave surface of said wall means; forming a sacrificial layer on said exposed portion of said substrate, said wall means and at least a portion of the remaining portion of said nitride layer; forming a structural layer on said at least a portion of sacrifical layer; patterning said structural layer to form a moving structure for movement relative to a structure forming said depression and exposing portions of said sacrificial layer; and etching said sacrtificial layer to release said moving structure from said structure forming the depression and providing for relative movement therebetween.

Claim 45

A process for making a micromechanical device upon a substrate, comprising: providing a substrate; forming a doped polysilicon layer upon said substrate; forming a nitride layer upon said doped polysilicon layer; masking and etching said nitride layer and said doped polysilicon layer to expose at least a portion of the substrate and to form a depression in said nitride layer and said doped polysilicon layer which is defined by wall means and said exposed portion of said substrate; growing oxide bumper means into said wall means of said depression and forming a convexo-concave relationship with said wall means; etching said oxide bumper to remove the same from said wall means of said depression while retaining the concave surface of said wall means of said depression while retaining the concave surface of said wall means; forming a sacrificial layer on said exposed portion of said substrate, said wall means and at least a portion of the remaining portion of said nitride layer; forming a structural layer on said at least a portion of sacrifical layer; patterning said structural layer to form a moving structure for movement relative to a structure forming said depression and exposing portions of said sacrificial layer; and etching said sacrtificial layer to release said moving structure from said structure forming the depression and providing for relative movement therebetween.

Claim 46

A process for making a micromechanical device on a substrate, comprising: forming a nitride layer upon the substrate; masking and etching said nitride layer and said substrate to expose at least a portion of said substrate and to form a depression in said nitride layer and the substrate which is defined by wall means and said exposed portion of said substrate; growing oxide bumper means into said wall means of said depression and forming a convexo-concave relationship with said wall means; etching said oxide bumper to remove the same from said wall means of said depression while retaining the concave surface of said wall means; forming a sacrificial layer on said exposed portion of said substrate, said wall means and at least a portion of the remaining portion of said nitride layer; forming a structural layer on at least a portion of said sacrificial layer; patterning said structural layer to form a moving structure for movement relative to a structure forming said depression and exposing portions of said sacrificial layer; and etching said sacrificial layer to release said moving structure from said structure forming the depression and providing for relative movement therebetween.

Claim 47

A process for making a micromechanical device on a substrate, comprising: forming a nitride layer upon the substrate; masking and etching said nitride layer and said substrate to expose at least a portion of said substrate and to form a depression in said nitride layer and the substrate which is defined by wall means and said exposed portion of said substrate; growing oxide bumper means into said wall means of said depression and forming a convexo-concave relationship with said wall means; etching said oxide bumper to remove the same from said wall means of said depression while retaining the concave surface of said wall means; forming a sacrificial layer on said exposed portion of said substrate, said wall means and at least a portion of the remaining portion of said nitride layer; forming a structural layer on at least a portion of said sacrificial layer; patterning said structural layer to form a moving structure for movement relative to a structure forming said depression and exposing portions of said sacrificial layer; and etching said sacrificial layer to release said moving structure from said structure forming the depression and providing for relative movement therebetween.