US5144411A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and structure for providing improved insulation in vlsi and ulsi circuits
Assignee: International Business Machines Corp
•
Filing: 1990-09-28
•
Granted: 1992-09-01
•
Expires: 2010-09-28
Abstract
Abstract An improved VLSI or ULSI structure and a method of forming the same are provided. The structure starts with a base member having a plurality of supports formed thereon and extending upwardly therefrom. A selectively removable material is deposited on the base member and around the supports. An insulating cap is formed over the supports and the removable material. Access openings are provided through the cover (or base) and the removable material is removed through the access openings. Thereafter a partial vacuum is formed in the space evacuated by the removable material, and the access openings sealed to provide a dielectric medium around the supports and between the base and cap member having a dielectric constant of less than 2.0.
Inventors
- 👤 Carter W. Kaanta
- 👤 Stanley Roberts
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 10:51
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/495; H10W20/01; H10W20/031; H10W20/063; H10W20/0633; H10W20/069; H10W20/0693; H10W20/071; H10W20/072; H10W20/45; H10W20/46
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
133 words
A VLSI or ULSI chip carrier structure for mounting a chip comprising: a. a dielectric base member of insulating material, b. a plurality of discrete spaced metal conducting lines formed on said base member and extending upwardly therefrom; c. a dielectric cap member of insulating material superimposed over said base member and supported at least in part by said metal lines; d. said cap member, said base member, and said metal lines defining a plurality of spaces therebetween, each of said spaces having a dielectric constant of less than 2.0; e. wherein said cap member is characterized by the presence of access openings, said access openings being sealed with an insulating material, and said cap member further characterized by the presence of openings for providing interlayer contact, said openings being filled with metal.
Claim 2
Dependent Claim
133 words
A VLSI or ULSI chip carrier structure for mounting a chip comprising: a. a dielectric base member of insulating material, b. a plurality of discrete spaced metal conducting lines formed on said base member and extending upwardly therefrom; c. a dielectric cap member of insulating material superimposed over said base member and supported at least in part by said metal lines; d. said cap member, said base member, and said metal lines defining a plurality of spaces therebetween, each of said spaces having a dielectric constant of less than 2.0; e. wherein said cap member is characterized by the presence of access openings, said access openings being sealed with an insulating material, and said cap member further characterized by the presence of openings for providing interlayer contact, said openings being filled with metal.
Claim 3
Dependent Claim
18 words
The invention as defined in claim 1 wherein said cap member is supported directly on said metal lines.
Claim 4
Dependent Claim
36 words
The invention as defined in claim 1 wherein a plurality of insulation stanchions are formed on said metal lines, and said cap member is supported directly on said insulation stanchions and indirectly on said metal lines.
Claim 5
Dependent Claim
22 words
The invention as defined in claim 1 further characterized by metal vias extending through said cap member and contacting said metal lines.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-09-01 | 1996-03-02 | 1996-09-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-09-01 | 2000-03-02 | 2000-09-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-09-01 | 2004-03-02 | 2004-09-01 | $7700.00 | Window Closed / Lapsed |