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US5144049A
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Volatile liquid precursors for the chemical vapor deposition of copper
Assignee: Versum Materials US LLC
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Filing: 1991-10-23
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Granted: 1992-09-01
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Expires: 2011-10-23
Abstract
Abstract Volatile liquid organometallic copper complexes are provided which are capable of selectively depositing a copper film onto metallic or other electrically conducting portions of a substrate surface under CVD conditions. There organometallic copper complexes are represented by the structural formula: <IMAGE> wherein R1 and R3 are each independently C1-C8 perfluoroalkyl, R2 is H, F or C1 -C8 perfluoroalkyl, R4 is H, C 1 -C8 alkyl, or Si(R6)3, each R5 is independently H or C1 -C8 alkyl and each R 6 is independently phenyl or C1 -C8 alkyl. A process for depositing copper films using these organometalic copper complexes is also provided.
Inventors
- 👤 John A. T. Norman
- 👤 Beth A. Muratore
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 21:22
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/06; C23C16/18; C07; C07F; C07F7/00; C07F7/02; C07F7/08; C07F7/0803; Y; Y10; Y10S; Y10S977/00; Y10S977/70; Y10S977/832; Y10S977/835; Y10S977/84; Y10S977/89; Y10S977/892
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
99 words
A volatile liquid organometallic copper complex capable of selectively depositing a copper film onto metallic or other electrically conducting portions of a substrate surface under CVD conditions, said complex having the structural formula: ##STR6## wherein R 1 and R 3 are each independently C 1 -C 8 perfluoroalkyl, R 2 is H, F or C 1-C 8 perfluoroalkyl, R 4 is H, C 1 -C 8 alkyl, or Si(R 6 ) 3 , each R 5 is independently H or C 1 14 C 8 alkyl and each R 6 is independently phenyl or C 1 -C 8 alkyl.
Claim 2
Dependent Claim
99 words
A volatile liquid organometallic copper complex capable of selectively depositing a copper film onto metallic or other electrically conducting portions of a substrate surface under CVD conditions, said complex having the structural formula: ##STR6## wherein R 1 and R 3 are each independently C 1 -C 8 perfluoroalkyl, R 2 is H, F or C 1-C 8 perfluoroalkyl, R 4 is H, C 1 -C 8 alkyl, or Si(R 6 ) 3 , each R 5 is independently H or C 1 14 C 8 alkyl and each R 6 is independently phenyl or C 1 -C 8 alkyl.
Claim 3
Dependent Claim
13 words
A complex in accordance with claim 1 wherein each R 5 is H.
Claim 4
Dependent Claim
12 words
A complex in accordance with claim 2 wherein R 4 is H.
Claim 5
Dependent Claim
15 words
A complex in accordance with claim 3 wherein each R 6 is a methyl group.
Claim 6
Dependent Claim
12 words
A complex in accordance with claim 1 wherein R 2 is H.
Claim 7
Dependent Claim
18 words
A complex in accordance with claim 5 wherein both R 1 and R 3 are CF 3 .
Claim 8
Dependent Claim
21 words
A complex in accordance with claim 1 wherein C(R 4 )(R 5 )═C(R 5 ) Si(R 6 ) 3 represents trimethylvinylsilane.
Claim 9
Dependent Claim
20 words
A complex in accordance with claim 1 wherein C(R 4 )(R 5 )═C(R 5 )Si(R 6 ) 3 represents diethylmethylvinylsilane.
Claim 10
Dependent Claim
14 words
A complex in accordance with claim 1 wherein said complex is a Cu+1(hexafluoroacetylacetonate).silylolefin complex.
References Cited (Backward Citations)
US3356527A
Cited
US3594216A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-09-01 | 1996-03-02 | 1996-09-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-09-01 | 2000-03-02 | 2000-09-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-09-01 | 2004-03-02 | 2004-09-01 | $7700.00 | Window Closed / Lapsed |