Abstract High speed silicon-on-insulator radiation hardened semiconductor devices and a method of fabricating same. Starting with a SIMOX wafer (10) having a layer of silicon (12) on a layer of buried oxide (11), P-well and N-well masks are aligned to an oversized polysilicon mask (16). This produces relatively thick source and drain regions (18) and relatively thin gate regions (17). The relatively thick source and drain regions (18) educe the risk of dry contact etch problems. N-channel and P-channel threshold voltages are adjusted prior to the formation of active areas, thus substantially eliminating edge and back channel leakage. A sacrificial thin oxide layer (21) is employed in fabricating the N-well and P-well implants so that both front and back channel threshold voltage adjustments are controlled. Good control of doping profiles is obtained, leading to excellent threshold voltage control and low edge and back channel leakages. The speed of devices fabricated using the method of the present invention is high due to reduced capacitances resulting from thinner silicon-on-insulator films. The present invention is fabricated using present equipment and available technology, and provides an easy, straight forward and cost-effective process to fabricate very high speed CMOS devices which are latch-up free and radiation hardened.
A silicon-on-insulator integrated device having improved edge leakage characteristics, said device comprising: an insulating semiconductor substrate comprising a silicon layer disposed on a buried oxide layer, the silicon layer having a thinned central portion for placement of a gate and relatively thicker source and drain regions adjacent the thinned central portion the central portion providing for a fully depleted device; implanted P-well locations formed on the substrate that have predetermined adjusted doping concentrations and profiles that minimize edge and back-channel leakages thereof; implanted N-well locations formed on the substrate adjacent the P-well locations that have predetermined adjusted doping concentrations and profiles that minimize edge and back-channel leakages thereof; wherein the silicon layer is located in one of the implanted P-well or N-well locations; a polysilicon gate disposed over the thinned central portion of the silicon layer and separated from the silicon layer by an oxide layer; a glass layer disposed over the substrate having vias disposed therein to provide for connection to the source and drain regions; and an electrically conductive layer disposed over the glass layer that provides electrical contacts.
Claim 2
Dependent Claim
181 words
A silicon-on-insulator integrated device having improved edge leakage characteristics, said device comprising: an insulating semiconductor substrate comprising a silicon layer disposed on a buried oxide layer, the silicon layer having a thinned central portion for placement of a gate and relatively thicker source and drain regions adjacent the thinned central portion the central portion providing for a fully depleted device; implanted P-well locations formed on the substrate that have predetermined adjusted doping concentrations and profiles that minimize edge and back-channel leakages thereof; implanted N-well locations formed on the substrate adjacent the P-well locations that have predetermined adjusted doping concentrations and profiles that minimize edge and back-channel leakages thereof; wherein the silicon layer is located in one of the implanted P-well or N-well locations; a polysilicon gate disposed over the thinned central portion of the silicon layer and separated from the silicon layer by an oxide layer; a glass layer disposed over the substrate having vias disposed therein to provide for connection to the source and drain regions; and an electrically conductive layer disposed over the glass layer that provides electrical contacts.
Claim 3
Dependent Claim
16 words
The device of claim 1 wherein the substrate comprises a separation by implanted oxygen silicon wafer.
Claim 4
Dependent Claim
43 words
The device of claim 2 wherein the separation by implanted oxygen silicon wafer has a base layer of silicon and a layer of silicon implanted oxygen that is approximately 3600 Angstroms thick and a layer of silicon that is approximately 2400 Angstroms thick.
Claim 5
Dependent Claim
16 words
The device of claim 1 wherein the glass layer disposed over the substrate comprises phosphoro-borosilicate glass.
Claim 6
Dependent Claim
15 words
The device of claim 2 wherein the electrically conductive layer comprises a metallic silicide material.
Claim 7
Dependent Claim
16 words
The device of claim 5 wherein the metallic silicide material comprises aluminum, tungsten or titanium tungsten.