US5138158A
Expired / Lapsed
US
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Surface analysis method and apparatus
Assignee: Hitachi Ltd
•
Filing: 1989-07-11
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Granted: 1992-08-11
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Expires: 2009-07-11
Abstract
Abstract Described is a surface analysis method for analyzing energy of particles such as photoelectrons which are emitted from a sample surface by the irradiation of light with wavelengths ranging from the soft x-ray region to the vacuum ultraviolet region using an optical system including a reflective optical element to the sample surface so as to obtain chemical state information about the sample surface, wherein the beam diameter of the light on the sample surface is reduced to 1 μm or less in terms of full width at half maximum of the beam intensity profile on the sample surface so that the chemical state information about the sample surface can be obtained with high sensitivity and high resolution, and an apparatus for implementing this method.
Inventors
- 👤 Ken Ninomiya
- 👤 Shigeru Nishimatsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 10:25
CPC Classifications
G; G01; G01N; G01N23/00; G01N23/22; G01N23/227; G01N23/2273
Claims Analysis
Total Claims: 63
Claim 1
Independent Claim
78 words
A surface analysis method for analyzing energies of particles which are emitted from a sample surface by irradiating said sample surface with light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region through an optical system including a reflective optical element, wherein a beam diameter of said light on said sample surface is 1 μm or less in terms of full width at half maximum of a beam intensity profile on said sample surface.
Claim 2
Dependent Claim
78 words
A surface analysis method for analyzing energies of particles which are emitted from a sample surface by irradiating said sample surface with light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region through an optical system including a reflective optical element, wherein a beam diameter of said light on said sample surface is 1 μm or less in terms of full width at half maximum of a beam intensity profile on said sample surface.
Claim 3
Dependent Claim
16 words
A surface analysis method according to claim 1, wherein said particles are electrons, photons, or both.
Claim 4
Dependent Claim
13 words
A surface analysis method according to claim 1, wherein said particles are photoelectrons.
Claim 5
Dependent Claim
47 words
A surface analysis method according to claim 1, wherein said reflective optical element is a combination of at least two of an axisymmetric ellipsoid mirror, an axisymmetric hyperboloid mirror, and an axisymmetric paraboloid mirror, or a combination of portions of at least two of said axisymmetric mirrors.
Claim 6
Dependent Claim
33 words
A surface analysis method according to claim 4, wherein said optical system focuses the light on said sample surface, a shape of said focused light being modified by a pinhole or a slit.
Claim 7
Dependent Claim
24 words
A surface analysis method according to claim 4, wherein said optical system further includes a pinhole of a slit placed before said sample surface.
Claim 8
Dependent Claim
30 words
A surface analysis method according to claim 4, wherein said sample is moved relative to an optical axis of said optical system to measure a distribution on said sample surface.
Claim 9
Dependent Claim
33 words
A surface analysis method according to claim 4, wherein a distribution on said sample surface is measured by deflecting the light through the optical system to scan the light on said sample surface.
Claim 10
Dependent Claim
36 words
A surface analysis method according to claim 4, wherein a distribution on said sample surface is measured by changing a position of a light source generating said light to scan the light on said sample surface.
Claim 11
Dependent Claim
42 words
A surface analysis method according to claim 9, wherein said light source is a target irradiated with a particle beam, and wherein the position of said light source is changed by changing an irradiation position of the particle beam on the target.
Claim 12
Dependent Claim
17 words
A surface analysis method according to claim 10, wherein an intensity of said particle beam is modulated.
Claim 13
Dependent Claim
56 words
A surface analysis method according to claim 4, wherein while one or more of a position, an intensity, and a diameter of the light on the sample surface is monitored, one or more of a position, an angle to an optical axis of said optical system, and a curvature of the reflective optical element is adjusted.
Claim 14
Dependent Claim
59 words
A surface analysis method according to claim 4, wherein while one or more of a position, an intensity, and a diameter of the light is monitored on the way to the sample surface, one or more of a position, an angle to an optical axis of said optical system, and a curvature of the reflective optical element is adjusted.
Claim 15
Dependent Claim
27 words
A surface analysis method according to claim 4, wherein said energies of said particles emitted from the sample surface are analyzed with a projection type energy analyzer.
Claim 16
Dependent Claim
27 words
A surface analysis method according to claim 4, wherein a magnetic field whose magnetic flux density is 1 T or more is produced near the sample surface.
Claim 17
Dependent Claim
20 words
A surface analysis method according to claim 4, wherein an intensity of said light on said sample surface is modulated.
Claim 18
Dependent Claim
38 words
A surface analysis method according to claim 1, wherein said optical system includes a plurality of cylindrical mirrors, a plurality of spherical mirrors, or a plurality of cylindrical mirrors having grooves formed on the surfaces of said mirrors.
Claim 19
Dependent Claim
17 words
A surface analysis method according to claim 1, wherein said optical system does not employ Bragg reflection.
Claim 20
Dependent Claim
76 words
A surface analysis method for analyzing energies of particles which are emitted from a sample surface by irradiating said sample surface with light having energies in the range of 6 eV to 2000 eV through an optical system including a reflective optical element, wherein a beam diameter of said light on said sample surface is 1 μm or less in terms of full width at half maximum of a beam intensity profile on said sample surface.
Claim 21
Dependent Claim
76 words
A surface analysis method for analyzing energies of particles which are emitted from a sample surface by irradiating said sample surface with light having energies in the range of 6 eV to 2000 eV through an optical system including a reflective optical element, wherein a beam diameter of said light on said sample surface is 1 μm or less in terms of full width at half maximum of a beam intensity profile on said sample surface.
Claim 22
Dependent Claim
111 words
A surface analysis method for analyzing energies of particles which are emitted from a surface of a sample by irradiating said sample with light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region, said light being generated by irradiating a rear surface of said sample or a surface of a substance disposed on a rear surface of said sample with a particle beam having a beam diameter of 1 μm or less in terms of full width at half maximum of a beam intensity profile on the rear surface of said sample or on the surface of said substance disposed on said rear surface of said sample.
Claim 23
Dependent Claim
111 words
A surface analysis method for analyzing energies of particles which are emitted from a surface of a sample by irradiating said sample with light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region, said light being generated by irradiating a rear surface of said sample or a surface of a substance disposed on a rear surface of said sample with a particle beam having a beam diameter of 1 μm or less in terms of full width at half maximum of a beam intensity profile on the rear surface of said sample or on the surface of said substance disposed on said rear surface of said sample.
Claim 24
Dependent Claim
23 words
A surface analysis method according to claim 3, wherein said particles emitted from said surface of said sample are electrons, photons, or both.
Claim 25
Dependent Claim
20 words
A surface analysis method according to claim 20, wherein said particles emitted from said surface of said sample are photoelectrons.
Claim 26
Dependent Claim
50 words
A surface analysis method according to claim 20, wherein a distribution on said surface of said sample is measured by changing an irradiation position of said particle beam on said rear surface of said sample or on said surface of said substance disposed on said rear surface of said sample.
Claim 27
Dependent Claim
77 words
A surface analysis apparatus comprising: means for emitting light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region; an optical system including a reflective optical element for reducing a beam diameter of said light to 1 μm or less in terms of full width at half maximum of a beam intensity profile on said sample surface; and means for analyzing energies of particles emitted from said sample surface in response to said light.
Claim 28
Dependent Claim
77 words
A surface analysis apparatus comprising: means for emitting light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region; an optical system including a reflective optical element for reducing a beam diameter of said light to 1 μm or less in terms of full width at half maximum of a beam intensity profile on said sample surface; and means for analyzing energies of particles emitted from said sample surface in response to said light.
Claim 29
Dependent Claim
19 words
A surface analysis apparatus according to claim 24, wherein said analyzing means analyzes energies of electrons, photons, or both.
Claim 30
Dependent Claim
16 words
A surface analysis apparatus according to claim 24, wherein said analyzing means analyzes energies of photoelectrons.
Claim 31
Dependent Claim
47 words
A surface analysis apparatus according to claim 23, wherein said reflective optical element is a combination of at least two of an axisymmetric ellipsoid mirror, an axisymmetric hyperboloid mirror, and an axisymmetric paraboloid mirror, or a combination of portions of at least two of said axisymmetric mirrors.
Claim 32
Dependent Claim
33 words
A surface analysis apparatus according to claim 27, wherein said optical system focuses the light on said sample, surface, a shape of said focused light being modified by a pinhole or a slit.
Claim 33
Dependent Claim
23 words
A surface analysis apparatus according to claim 27, wherein said optical system includes a pinhole or a slit placed before the sample surface.
Claim 34
Dependent Claim
15 words
A surface analysis apparatus according to claim 27, further comprising means for moving said sample.
Claim 35
Dependent Claim
21 words
A surface analysis apparatus according to claim 27, further comprising light deflection means for scanning the light on said sample surface.
Claim 36
Dependent Claim
30 words
A surface analysis apparatus according to claim 27, further comprising means for changing a position of a light source generating said light for scanning the light on said sample surface.
Claim 37
Dependent Claim
35 words
A surface analysis apparatus according to claim 32, wherein said light source is a target irradiated by a particle beam, and wherein said light source position changing means scans the particle beam on the target.
Claim 38
Dependent Claim
22 words
A surface analysis apparatus according to claim 33 further comprising modulating means is provided for modulating an intensity of said particle beam.
Claim 39
Dependent Claim
65 words
A surface analysis method according to claim 27, further comprising: monitor means for monitoring one or more of a position, an intensity, and a diameter of the light on the sample; and adjustment means responsive to said monitor means for adjusting one or more of a position, an angle to an optical axis of said optical system, and a curvature of the reflective optical element.
Claim 40
Dependent Claim
65 words
A surface analysis apparatus according to claim 27, further comprising: monitor means for monitoring a position, an intensity, and a diameter of the light on the way to said sample surface; and adjustment means responsive to said monitor means for adjusting one or more of a position, an angle to an optical axis of said optical system, and a curvature of the reflective optical element.
Claim 41
Dependent Claim
27 words
A surface analysis apparatus according to claim 27, wherein the means for analyzing energies of particles emitted from the sample surface is a projection type energy analyzer.
Claim 42
Dependent Claim
23 words
A surface analysis apparatus according to claim 27, further comprising magnetic field generating means for producing a magnetic field near the sample surface.
Claim 43
Dependent Claim
23 words
A surface analysis apparatus according to claim 27, further comprising modulating means for modulating an intensity of said light on said sample surface.
Claim 44
Dependent Claim
55 words
A surface analysis apparatus according to claim 7, wherein an adjustable heat source is provided near at least one of said axisymmetric ellipsoid mirror, said axisymmetric hyperboloid mirror, and said axisymmetric paraboloid mirror for adjusting a curvature of at least one of said axisymmetric ellipsoid mirror, said axisymmetric hyperboloid mirror, and said axisymmetric paraboloid mirror.
Claim 45
Dependent Claim
37 words
A surface analysis apparatus according to claim 24, wherein said optical system includes a plurality of cylindrical mirrors, a plurality of spherical mirrors, or a plurality of cylindrical mirrors having grooves formed on surfaces of said mirrors.
Claim 46
Dependent Claim
17 words
A surface analysis apparatus according to claim 24, wherein said optical system does not employ Bragg reflection.
Claim 47
Dependent Claim
75 words
A surface analysis apparatus comprising: means for emitting light having energies in the range of 6 eV to 2000 eV; an optical system including a reflective optical element for reducing a beam diameter of said light to 1 μm or less in terms of full width at half maximum of a beam intensity profile on said sample surface; and means for analyzing energies of particles emitted from said sample surface in response to said light.
Claim 48
Dependent Claim
75 words
A surface analysis apparatus comprising: means for emitting light having energies in the range of 6 eV to 2000 eV; an optical system including a reflective optical element for reducing a beam diameter of said light to 1 μm or less in terms of full width at half maximum of a beam intensity profile on said sample surface; and means for analyzing energies of particles emitted from said sample surface in response to said light.
Claim 49
Dependent Claim
119 words
A surface analysis apparatus comprising: means for irradiating a particle beam on a rear of a sample surface or on a surface of a substance disposed on a rear surface of a sample to generate light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region; control means for reducing a beam diameter of said particle beam to 1 μm or less in terms of full width at half maximum of a beam intensity profile on the rear surface of said sample or on the surface of the substance disposed on said rear surface of said sample; and means for analyzing energies of particles emitted from said surface of said sample in response to said light.
Claim 50
Dependent Claim
119 words
A surface analysis apparatus comprising: means for irradiating a particle beam on a rear of a sample surface or on a surface of a substance disposed on a rear surface of a sample to generate light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region; control means for reducing a beam diameter of said particle beam to 1 μm or less in terms of full width at half maximum of a beam intensity profile on the rear surface of said sample or on the surface of the substance disposed on said rear surface of said sample; and means for analyzing energies of particles emitted from said surface of said sample in response to said light.
Claim 51
Dependent Claim
19 words
A surface analysis apparatus according to claim 44, wherein said analyzing means analyzes energies of electrons, photons, or both.
Claim 52
Dependent Claim
16 words
A surface analysis apparatus according to claim 44, wherein said analyzing means analyzes energies of photoelectrons.
Claim 53
Dependent Claim
38 words
A surface analysis apparatus according to claim 44, further comprising means for scanning the particle beam on said rear surface of said sample or on said surface of said substance disposed on said rear surface of said sample.
Claim 54
Dependent Claim
60 words
A surface analysis method for analyzing energies or particles which are emitted from a sample surface when light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region is focused on said sample surface using an optical system including a reflective optical element, wherein a resolution of analysis on the sample surface is 1 μm or less.
Claim 55
Dependent Claim
60 words
A surface analysis method for analyzing energies or particles which are emitted from a sample surface when light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region is focused on said sample surface using an optical system including a reflective optical element, wherein a resolution of analysis on the sample surface is 1 μm or less.
Claim 56
Dependent Claim
65 words
A surface analysis method for analyzing one or more of atomic species, composition, and chemical bonds on or near a sample surface by focusing light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region on said sample surface using an optical system including a reflective optical element, wherein a resolution of analysis on the sample surface is 1 μm or less.
Claim 57
Dependent Claim
65 words
A surface analysis method for analyzing one or more of atomic species, composition, and chemical bonds on or near a sample surface by focusing light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region on said sample surface using an optical system including a reflective optical element, wherein a resolution of analysis on the sample surface is 1 μm or less.
Claim 58
Dependent Claim
63 words
A surface analysis method for analyzing energies of electrons, light, or both which are emitted from a sample surface when light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region is focused on said sample surface using an optical system including a reflective optical element, wherein a resolution of analysis on the sample surface is 1 μm or less.
Claim 59
Dependent Claim
63 words
A surface analysis method for analyzing energies of electrons, light, or both which are emitted from a sample surface when light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region is focused on said sample surface using an optical system including a reflective optical element, wherein a resolution of analysis on the sample surface is 1 μm or less.
Claim 60
Dependent Claim
64 words
A surface analysis method for analyzing energies of photoelectrons, Auger electrons, or both which are emitted from a sample surface when light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region is focused on said sample surface using an optical system including a reflective optical element, wherein a resolution of analysis on the sample surface is 1 μm or less.
Claim 61
Dependent Claim
64 words
A surface analysis method for analyzing energies of photoelectrons, Auger electrons, or both which are emitted from a sample surface when light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region is focused on said sample surface using an optical system including a reflective optical element, wherein a resolution of analysis on the sample surface is 1 μm or less.
Claim 62
Dependent Claim
81 words
A surface analysis method for analyzing energies of particles which are emitted from a sample in response to light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region, said light being generated by a particle beam having a controlled beam diameter which irradiates a rear surface of the sample or a surface of a substance disposed on a rear surface of the sample, wherein a resolution of analysis on the sample surface is 1 μm or less.
Claim 63
Dependent Claim
81 words
A surface analysis method for analyzing energies of particles which are emitted from a sample in response to light having wavelengths ranging from a soft x-ray region to a vacuum ultraviolet region, said light being generated by a particle beam having a controlled beam diameter which irradiates a rear surface of the sample or a surface of a substance disposed on a rear surface of the sample, wherein a resolution of analysis on the sample surface is 1 μm or less.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-08-11 | 1996-02-10 | 1996-08-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-08-11 | 2000-02-10 | 2000-08-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-08-11 | 2004-02-10 | 2004-08-11 | $7700.00 | Window Closed / Lapsed |