US5137799A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrically conductive resist material, a process for its preparation and its use
Assignee: Hoechst AG
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Filing: 1990-02-02
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Granted: 1992-08-11
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Expires: 2010-02-02
Abstract
Abstract An electrically conductive resist material is disclosed, comprising at least one polymer which is sensitive to ionizing radiation and a soluble electrically conductive oligomer or polymer. A process for producing the resist material is also described, comprising admixing an electrically conductive oligomer or polymer dissolved in a solvent to at least one polymer which is sensitive to ionizing radiation. The resist material is useful in preparing electron beam resists which prevent electrostatic charging and resultant electrostatic fields.
Inventors
- 👤 Guenther Kaempf
- 👤 Michael Feldhues
- 👤 Ude Scheunemann
- 👤 Juergen Lingnau
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 17:10
CPC Classifications
C; C09; C09D; C09D5/00; C09D5/24; G; G03; G03F; G03F7/00; G03F7/004; G03F7/027; C09D5/08; C09D7/00; C09D7/40; G03F7/032; H; H01; H01B; H01B1/00; H01B1/06; H01B1/12; H01B1/124; H01B1/127
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
65 words
An electrically conductive resist material comprising in admixture, as a first component, at least one polymer which is sensitive to ionizing radiation selected from the group consisting of novolaks, polyacrylates, polymethacrylates, polyolefin sulfones, epoxidized polybutadienes, and chlorinated polystyrenes, and, as a second component an electrically conductive oligothiophene or polythiophene which is soluble in a solvent capable of dissolving the other components of the resist material.
Claim 2
Dependent Claim
65 words
An electrically conductive resist material comprising in admixture, as a first component, at least one polymer which is sensitive to ionizing radiation selected from the group consisting of novolaks, polyacrylates, polymethacrylates, polyolefin sulfones, epoxidized polybutadienes, and chlorinated polystyrenes, and, as a second component an electrically conductive oligothiophene or polythiophene which is soluble in a solvent capable of dissolving the other components of the resist material.
Claim 3
Dependent Claim
30 words
A resist material as claimed in claim 1, comprising about 0.01 to 10% by weight of said conductive oligomer or polymer, relative to the dry matter of the resist formulation.
Claim 4
Dependent Claim
29 words
A resist material as claimed in claim 2, comprising 0.1 to 5% by weight of said conductive oligomer or polymer, relative to the dry matter of the resist formulation.
Claim 5
Dependent Claim
22 words
A resist material as claimed in claim 1, wherein said soluble electrically conductive oligomer or polymer is a 3-substituted oligo- or polythiophene.
Claim 6
Dependent Claim
15 words
A resist material as claimed in claim 4, wherein said substituent is a 3-alkoxy group.
Claim 7
Dependent Claim
19 words
A resist material as claimed in claim 5, wherein said 3-alkoxy group comprises about 6 to 25 carbon atoms.
Claim 8
Dependent Claim
13 words
A resist material as claimed in claim 1, further comprising an alkali-soluble binder.
Claim 9
Dependent Claim
31 words
A resist material as claimed in claim 1, wherein said at least one polymer is crosslinkable or degradable by high-energy radiation, such that said resist material is developable in a solvent.
Claim 10
Dependent Claim
14 words
A resist material as claimed in claim 1, consisting essentially of the recited components.
Claim 11
Dependent Claim
14 words
A resist material as claims in claim 1, wherein said polymer is polymethyl methacrylate.
Claim 12
Dependent Claim
13 words
A resist material as claimed in claim 1, further comprising an adhesion promoter.
Claim 13
Dependent Claim
25 words
A resist material as claimed in claim 1 further comprising an additive selected from the group consisting of colorants, pigments, wetting agents, and flow-improving agents.
Claim 14
Dependent Claim
22 words
A resist material as claimed in claim 12, wherein said additive is selected from the group consisting of polyglycols and cellulose ethers.
Claim 15
Dependent Claim
17 words
A resist material as claimed in claim 1, wherein the electrically conductive polymer comprises polydodecyloxythiophene or polymethoxythiophene.
Claim 16
Dependent Claim
14 words
A resist material as claimed in claim 1, wherein said polymer comprises a novolak.
Claim 17
Dependent Claim
28 words
A resist material as claimed in claim 1, which consists essentially of said at least one polymer which is sensitive to ionizing radiation and said oligothiophene or polythiophene.
Claim 18
Dependent Claim
36 words
A resist material as claimed in claim 1 which is produced by dissolving said oligothiophene or polythiophene in a solvent and then admixing it with said at least one polymer which is sensitive to ionizing radiation.
Claim 19
Dependent Claim
24 words
A resist material as claimed in claim 1 which is produced by dissolving said first and said second components in a solvent and admixing.
Claim 20
Dependent Claim
12 words
A resist material as claimed in claim 1, further comprising a solvent.
Claim 21
Dependent Claim
36 words
A resist material as claimed in claim 1, wherein said at least one polymer sensitive to ionizing radiation is polymer selected from the group consisting of novolaks, polyolefin sulfones, chlorinated polystyrenes, chloromethylated polystyrenes, and epoxidized polybutadienes.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-08-11 | 1996-02-10 | 1996-08-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-08-11 | 2000-02-10 | 2000-08-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-08-11 | 2004-02-10 | 2004-08-11 | $7700.00 | Window Closed / Lapsed |