US5137750A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of making a thin film head with contoured pole face edges for undershoot reduction
Assignee: Seagate Technology LLC
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Filing: 1991-05-20
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Granted: 1992-08-11
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Expires: 2011-05-20
Abstract
Abstract A thin film magnetic read/write head is manufactured using Al 2 O 3 dams. The Al 2 O 3 dams are formed using a sacrificial layer which is deposited upon a bottom pole layer. An Al 2 O 3 layer is deposited over the sacrificial layer. When the sacrificial layer is removed, the Al 2 O 3 layer forms dams between which a top pole piece is deposited. The sacrificial layer is removed using lapping and a selected chemical etch; partial lapping or chemical etch followed by chemical etch of the sacrificial layer which lifts-off overlying Al 2 O 3 ; depositing photoresist dams and chemically etching the encapsulation layer and the sacrificial layer; or removal through physical or thermal shock of the Al 2 O 3 layer sputtered at zero bias followed by a selective chemical etch of the sacrificial layer. The thin film magnetic head of the present invention has pole tips which provide an outside pole face contour that is significantly different from a pole tip contour along a gap region. This reduces an undershoot effect in readback pulses in a readback signal. The altered contour can be used on both top and bottom pole tips to eliminate both leading and trailing undershoots. Additionally, in shielded probe heads for vertical recording a gap region contour can be altered to achieve a similar reduction in leading undershoot.
Inventors
- 👤 Nurul Amin
- 👤 John Bortins
- 👤 Ying D. Yan
- 👤 Beat G. Keel
- 👤 Nathan Curland
- 👤 Tim Madsen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 17:17
CPC Classifications
G; G11; G11B; G11B5/00; G11B5/127; G11B5/1278; G11B5/31; G11B5/3109; G11B5/3116; G11B5/3163; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/4902; Y10T29/49021; Y10T29/49032; Y10T29/49036; Y10T29/49043; Y10T29/49044
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
120 words
A method of manufacturing a thin film magnetic head comprising: depositing a bottom pole layer over a substrate; depositing a sacrificial layer over the bottom pole layer; depositing an encapsulation layer over the sacrificial layer and the substrate; removing a portion of the sacrificial layer to form first and second dams from the encapsulation layer; depositing a magnetic gap layer over the bottom pole layer; and depositing an upper pole layer between the first and second dams and over the bottom pole layer, wherein the upper pole layer has an upper pole contour along an edge which is far from the magnetic gap layer and the upper pole contour is significantly different from a contour of the magnetic gap layer.
Claim 2
Independent Claim
120 words
A method of manufacturing a thin film magnetic head comprising: depositing a bottom pole layer over a substrate; depositing a sacrificial layer over the bottom pole layer; depositing an encapsulation layer over the sacrificial layer and the substrate; removing a portion of the sacrificial layer to form first and second dams from the encapsulation layer; depositing a magnetic gap layer over the bottom pole layer; and depositing an upper pole layer between the first and second dams and over the bottom pole layer, wherein the upper pole layer has an upper pole contour along an edge which is far from the magnetic gap layer and the upper pole contour is significantly different from a contour of the magnetic gap layer.
Claim 3
Dependent Claim
13 words
The method of claim 1 wherein the upper pole contour includes buck horns.
Claim 4
Dependent Claim
18 words
The method of claim 1 wherein the contour of the magnetic gap layer is a generally straight line.
Claim 5
Dependent Claim
51 words
The method of claim 1 wherein depositing a bottom pole layer comprises depositing a bottom pole layer which has a bottom pole contour along an edge which is far from the magnetic gap layer, wherein the bottom pole contour is a significantly different from a contour of the magnetic gap layer.
Claim 6
Dependent Claim
12 words
The method of claim 4 wherein bottom pole contour includes buck horns.
Claim 7
Dependent Claim
18 words
The method of claim 4 wherein the contour of the magnetic gap layer is a generally straight line.
Claim 8
Dependent Claim
43 words
The method of claim 1 wherein the gap layer has a gap layer thickness and the upper pole layer has a variable upper pole layer thickness, the upper pole layer thickness varies by more than about one half of the gap layer thickness.
Claim 9
Independent Claim
282 words
A method of manufacturing a thin film magnetic head comprising: depositing a first photoresist dam and a second photoresist dam upon a substrate; depositing a bottom pole layer over the substrate and between the first and second photoresist dams; depositing a sacrificial layer over the bottom pole and between the first and second photoresist dams, wherein the sacrificial layer is in substantial alignment with the bottom pole layer; removing the first and second photoresist dams; depositing an encapsulation layer over the sacrificial layer and the substrate; removing the sacrificial layer to form a first encapsulation layer dam and a second encapsulation layer dam from the encapsulation layer wherein the first and second encapsulation layer dams are in substantial alignment with the bottom pole layer wherein removing the sacrificial layer comprises: depositing a first photoresist dam and a second photoresist dam upon the encapsulation layer; applying a selective chemical etch to the encapsulation layer wherein a portion of the encapsulation layer is removed to form the first and second dams; and removing the first photoresist dam and the second photoresist dam; depositing a third photoresist dam over the first encapsulation layer dam; depositing a fourth photoresist dam over the second encapsulation layer dam; depositing an upper pole layer between the first and second encapsulation layer dams and between the third and fourth photoresist dams and over the bottom pole layer, wherein depositing an upper pole layer comprises depositing an upper pole layer which has an upper pole contour along an edge which is far from the magnetic gap layer and the upper pole contour is significantly different from a contour of the magnetic gap layer; and removing the third and fourth photoresist dams.
Claim 10
Independent Claim
282 words
A method of manufacturing a thin film magnetic head comprising: depositing a first photoresist dam and a second photoresist dam upon a substrate; depositing a bottom pole layer over the substrate and between the first and second photoresist dams; depositing a sacrificial layer over the bottom pole and between the first and second photoresist dams, wherein the sacrificial layer is in substantial alignment with the bottom pole layer; removing the first and second photoresist dams; depositing an encapsulation layer over the sacrificial layer and the substrate; removing the sacrificial layer to form a first encapsulation layer dam and a second encapsulation layer dam from the encapsulation layer wherein the first and second encapsulation layer dams are in substantial alignment with the bottom pole layer wherein removing the sacrificial layer comprises: depositing a first photoresist dam and a second photoresist dam upon the encapsulation layer; applying a selective chemical etch to the encapsulation layer wherein a portion of the encapsulation layer is removed to form the first and second dams; and removing the first photoresist dam and the second photoresist dam; depositing a third photoresist dam over the first encapsulation layer dam; depositing a fourth photoresist dam over the second encapsulation layer dam; depositing an upper pole layer between the first and second encapsulation layer dams and between the third and fourth photoresist dams and over the bottom pole layer, wherein depositing an upper pole layer comprises depositing an upper pole layer which has an upper pole contour along an edge which is far from the magnetic gap layer and the upper pole contour is significantly different from a contour of the magnetic gap layer; and removing the third and fourth photoresist dams.
Claim 11
Dependent Claim
13 words
The method of claim 8 wherein the upper pole contour includes buck horns.
Claim 12
Dependent Claim
18 words
The method of claim 8 wherein the contour of the magnetic gap layer is a generally straight line.
Claim 13
Dependent Claim
50 words
The method of claim 8 wherein depositing a bottom pole layer comprises depositing a bottom pole layer which has a bottom pole contour along an edge which is far from the magnetic gap layer wherein the bottom pole contour is significantly different from a contour of the magnetic gap layer.
Claim 14
Dependent Claim
13 words
The method of claim 11 wherein the bottom pole contour includes buck horns.
Claim 15
Dependent Claim
18 words
The method of claim 11 wherein the contour of the magnetic gap layer is a generally straight line.
Claim 16
Dependent Claim
44 words
The method of claim 8 wherein the gap layer has a gap layer thickness and the upper pole layer has a variable upper pole layer thickness, the variable upper pole layer thickness varies by more than about one half of the gap layer thickness.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-08-11 | 1996-02-10 | 1996-08-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-08-11 | 2000-02-10 | 2000-08-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-08-11 | 2004-02-10 | 2004-08-11 | $7700.00 | Window Closed / Lapsed |