US5136362A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrical contact with diffusion barrier
Assignee: Micron Technology Inc
•
Filing: 1990-11-27
•
Granted: 1992-08-04
•
Expires: 2010-11-27
Abstract
Abstract A device is provided by forming a diffusion barrier at the interface between a metalized contact and the surface of a semiconductor substrate. A three-layer sandwich is formed over the contact region and then annealed in free nitrogen. The sandwich is made of a titanium nitride layer interposed between layers of titanium. During the anneal, material from the titanium layer adjacent to the substrate migrates thereinto to produce a highly conductive diffusion region of titanium silicide. Concurrently during the anneal the other layer of titanium, which is exposed to the nitrogen atmosphere, is converted into a backing layer of titanium nitride which enhances the barrier effect of the titanium nitride layer at the center of the sandwich structure. The conversion of titanium to titanium nitride causes a physical expansion in the layer involved. This serves to enhance the thickness of the barrier layer at all locations, but of particular significance at the corners of the contact well. A diffusion region of controlled depth and the deposition of minimal amounts of titanium remote from the contact side itself are advantageous results of the disclosed process.
Inventors
- 👤 Malcolm K. Grief
- 👤 Trung Doan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 05:42
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/032; H10W20/047; H10W20/048; H10D; H10D64/00; H10D64/60; H10D64/62; H10W20/033; H10W20/035; H10W20/40
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
211 words
A diffusion barrier for a semiconductor device to prevent the migration of silicon from the substrate in which the device is formed across an interface between an electrical contact formed in a contact well having a bottom and sides and a portion of the surface of the substrate electrically coupled thereto, said diffusion barrier comprising: (a) a diffusion region of titanium silicide in the portion of the surface of the substrate electrically coupled to the electrical contact; (b) a first composite strata of titanium nitride disposed at the bottom of said well between the surface of said diffusion region and the electrical contact, said composite strata of titanium nitride comprising a first base layer contacting the surface of the substrate and a first backing layer overlying said first base layer and annealed to form said first composite strata; (c) a peripheral layer of titanium formed on the sides of the contact well; and (d) a second composite strata of titanium nitride formed on the sides of said contact well over said peripheral layer of titanium, said second composite strata of titanium nitride comprising a second base layer contacting said peripheral layer of titanium and a second backing layer overlying said second base layer and annealed to form said second composite strata.
Claim 2
Dependent Claim
211 words
A diffusion barrier for a semiconductor device to prevent the migration of silicon from the substrate in which the device is formed across an interface between an electrical contact formed in a contact well having a bottom and sides and a portion of the surface of the substrate electrically coupled thereto, said diffusion barrier comprising: (a) a diffusion region of titanium silicide in the portion of the surface of the substrate electrically coupled to the electrical contact; (b) a first composite strata of titanium nitride disposed at the bottom of said well between the surface of said diffusion region and the electrical contact, said composite strata of titanium nitride comprising a first base layer contacting the surface of the substrate and a first backing layer overlying said first base layer and annealed to form said first composite strata; (c) a peripheral layer of titanium formed on the sides of the contact well; and (d) a second composite strata of titanium nitride formed on the sides of said contact well over said peripheral layer of titanium, said second composite strata of titanium nitride comprising a second base layer contacting said peripheral layer of titanium and a second backing layer overlying said second base layer and annealed to form said second composite strata.
Claim 3
Dependent Claim
32 words
A diffusion barrier as recited in claim 1, wherein said diffusion region is formed by the migration of titanium from a first layer of titanium formed on the surface of the substrate.
Claim 4
Dependent Claim
24 words
A diffusion barrier as recited in claim 2, wherein said diffusion region is formed by heating the substrate and said first layer of titanium.
Claim 5
Dependent Claim
19 words
A diffusion barrier as recited in claim 2 wherein said first layer of titanium is formed by sputter deposition.
Claim 6
Dependent Claim
52 words
A diffusion barrier as recited in claim 1, wherein: (a) said first base layer comprises titanium nitride formed on the surface of the substrate by reactive sputter deposition; and (b) said first backing layer comprises titanium nitride formed by annealing a first backing layer of titanium deposited on said first base layer.
Claim 7
Dependent Claim
25 words
A diffusion barrier as recited in claim 5, wherein said first backing layer of titanium, is formed on said first base layer by sputter deposition.
Claim 8
Dependent Claim
52 words
A diffusion barrier as recited in claim 1, wherein: (a) said second base layer comprises titanium nitride formed on said peripheral layer of titanium by reactive sputter deposition; and (b) said second backing layer comprises titanium nitride formed by annealing a second backing layer of titanium deposited on said second base layer.
Claim 9
Dependent Claim
27 words
A diffusion barrier as recited in claim 1, wherein said second backing layer of titanium is integrally and simultaneously formed with said first backing layer of titanium.
Claim 10
Dependent Claim
29 words
A diffusion barrier as recited in claim 1, wherein said first composite strata of titanium nitride is integrally and simultaneously formed with said second composite strata of titanium nitride.
Claim 11
Dependent Claim
159 words
A diffusion barrier at the portion of the surface of a semiconductor substrate electrically coupled to a metalized electrical contact formed in a contact well having a bottom and sides, said diffusion barrier comprising: (a) a diffusion region of titanium silicide in the portion of the surface of the substrate electrically coupled to the electrical contact, said diffusion region having been formed during annealing of the semiconductor substrate by migration of titanium from a first layer of titanium formed on the surface of the substrate; and (b) a composite strata of titanium nitride disposed in the bottom of said contact well between the surface of said diffusion region and the electrical contact and along the sides of said contact well, said composite strata of titanium nitride comprising a base layer of titanium nitride contacting the surface of said diffusion region and a backing layer of titanium overlying said base layer and annealed in nitrogen to form said composite strata.
Claim 12
Dependent Claim
159 words
A diffusion barrier at the portion of the surface of a semiconductor substrate electrically coupled to a metalized electrical contact formed in a contact well having a bottom and sides, said diffusion barrier comprising: (a) a diffusion region of titanium silicide in the portion of the surface of the substrate electrically coupled to the electrical contact, said diffusion region having been formed during annealing of the semiconductor substrate by migration of titanium from a first layer of titanium formed on the surface of the substrate; and (b) a composite strata of titanium nitride disposed in the bottom of said contact well between the surface of said diffusion region and the electrical contact and along the sides of said contact well, said composite strata of titanium nitride comprising a base layer of titanium nitride contacting the surface of said diffusion region and a backing layer of titanium overlying said base layer and annealed in nitrogen to form said composite strata.
Claim 13
Dependent Claim
47 words
A diffusion barrier as recited in claim 10, wherein said composite strata of titanium nitride is capable of preventing migration of silicon from the substrate into the electrical contact, thereby minimizing pitting of the portion of the surface of the substrate electrically coupled to the electrical contact.
Claim 14
Dependent Claim
33 words
A diffusion barrier as recited in claim 10, wherein the thickness of said composite strata of titanium nitride is sufficient to prevent the migration of silicon from the substrate into the electrical contact.
Claim 15
Dependent Claim
172 words
An electrical contact formed through an insulative layer on a substrate to the surface thereof, the electrical contact comprising: (a) a contact well in the insulative layer, said contact well having a bottom and sides normal thereto, said bottom of said contact well defining a contact surface on the substrate; (b) a diffusion region of titanium silicide in said contact surface, said diffusion region having been formed during annealing of the semiconductor substrate by the migration of titanium from a first layer of titanium nitride on the surface of said contact region; (c) a composite strata of titanium nitride disposed on the bottom of said contact well on the surface of said diffusion region and on the sides of said contact well, said composite strata comprising a base layer contacting the surface of said diffusion region and a backing layer of titanium overlying said base layer and annealed in nitrogen to form said composite strata; and (d) a metalized contact engaging said composite strata of titanium nitride and filling said contact well.
Claim 16
Dependent Claim
172 words
An electrical contact formed through an insulative layer on a substrate to the surface thereof, the electrical contact comprising: (a) a contact well in the insulative layer, said contact well having a bottom and sides normal thereto, said bottom of said contact well defining a contact surface on the substrate; (b) a diffusion region of titanium silicide in said contact surface, said diffusion region having been formed during annealing of the semiconductor substrate by the migration of titanium from a first layer of titanium nitride on the surface of said contact region; (c) a composite strata of titanium nitride disposed on the bottom of said contact well on the surface of said diffusion region and on the sides of said contact well, said composite strata comprising a base layer contacting the surface of said diffusion region and a backing layer of titanium overlying said base layer and annealed in nitrogen to form said composite strata; and (d) a metalized contact engaging said composite strata of titanium nitride and filling said contact well.
Claim 17
Dependent Claim
36 words
An electrical contact as recited in claim 13, wherein said composite strata of titanium nitride is capable of preventing migration of silicon from the substrate into said metalized contact, thereby minimizing pitting of said contact surface.
Claim 18
Dependent Claim
33 words
An electrical contact as recited in claim 13, wherein the thickness of said composite strata of titanium nitride is sufficient to prevent the migration of silicon from the substrate into said metalized contact.
Claim 19
Dependent Claim
186 words
An intermediate semiconductor structure for annealing in nitrogen to produce a diffusion barrier for preventing migration of silicon from a semiconductor substrate across the interface between an electrical contact formed in a contact well having a bottom and sides and the portion of the surface of the substrate electrically coupled to the electrical contact, said intermediate semiconductor structure comprising: (a) a first layer of titanium on the bottom and sides of said well and contacting the portion of the surface of the substrate to be electrically coupled to the electrical contact; (b) a base layer of titanium nitride formed on said first layer of titanium at the bottom and sides of said well; and (c) a backing layer of titanium on said first base layer of titanium nitride at the bottom and sides of said well; whereby annealing of said intermediate semiconductor structure in nitrogen causes titanium from said first layer of titanium to migrate into the semiconductor substrate forming there a diffusion region of titanium silicate and causes said backing layer of titanium to form titanium nitride at the bottom and sides of said well.
Claim 20
Dependent Claim
186 words
An intermediate semiconductor structure for annealing in nitrogen to produce a diffusion barrier for preventing migration of silicon from a semiconductor substrate across the interface between an electrical contact formed in a contact well having a bottom and sides and the portion of the surface of the substrate electrically coupled to the electrical contact, said intermediate semiconductor structure comprising: (a) a first layer of titanium on the bottom and sides of said well and contacting the portion of the surface of the substrate to be electrically coupled to the electrical contact; (b) a base layer of titanium nitride formed on said first layer of titanium at the bottom and sides of said well; and (c) a backing layer of titanium on said first base layer of titanium nitride at the bottom and sides of said well; whereby annealing of said intermediate semiconductor structure in nitrogen causes titanium from said first layer of titanium to migrate into the semiconductor substrate forming there a diffusion region of titanium silicate and causes said backing layer of titanium to form titanium nitride at the bottom and sides of said well.
Claim 21
Dependent Claim
20 words
An intermediate semiconductor structure as recited in claim 16, wherein said first layer of titanium is formed by sputter deposition.
Claim 22
Dependent Claim
22 words
An intermediate semiconductor structure as recited in claim 16, wherein said base layer of titanium nitride is formed by reactive sputter deposition.
Claim 23
Dependent Claim
20 words
An intermediate semiconductor structure as recited in claim 16, wherein said backing layer of titanium is formed by sputter deposition.
Claim 24
Dependent Claim
35 words
An intermediate semiconductor structure as recited in claim 16, wherein said first layer of titanium, said base layer of titanium nitride, and said backing layer of titanium are each formed in the same semiconductor chamber.
Claim 25
Dependent Claim
172 words
An intermediate semiconductor structure comprising: (a) a semiconductor substrate; (b) a layer of insulation on the surface of said semiconductor substrate; (c) a contact well formed through said layer of insulation to the surface of said semiconductor substrate, said contact well having a bottom and sides normal thereto, said bottom of said contact well defining a contact surface on the substrate; (d) a first layer of titanium on said sides of said well and on said contact surface; (e) a base layer of titanium nitride formed on said first layer of titanium at the bottom and sides of said well; and (f) a backing layer of titanium on said base layer of titanium nitride at the bottom and sides of said well; whereby annealing of said intermediate semiconductor structure in nitrogen causes titanium from said first layer of titanium to migrate into the semiconductor substrate forming there a diffusion region of titanium silicate and causes said backing layer of titanium to form titanium nitride at the bottom and sides of said well.
Claim 26
Dependent Claim
172 words
An intermediate semiconductor structure comprising: (a) a semiconductor substrate; (b) a layer of insulation on the surface of said semiconductor substrate; (c) a contact well formed through said layer of insulation to the surface of said semiconductor substrate, said contact well having a bottom and sides normal thereto, said bottom of said contact well defining a contact surface on the substrate; (d) a first layer of titanium on said sides of said well and on said contact surface; (e) a base layer of titanium nitride formed on said first layer of titanium at the bottom and sides of said well; and (f) a backing layer of titanium on said base layer of titanium nitride at the bottom and sides of said well; whereby annealing of said intermediate semiconductor structure in nitrogen causes titanium from said first layer of titanium to migrate into the semiconductor substrate forming there a diffusion region of titanium silicate and causes said backing layer of titanium to form titanium nitride at the bottom and sides of said well.
Claim 27
Dependent Claim
20 words
An intermediate semiconductor structure as recited in claim 21, wherein said first layer of titanium is formed by sputter deposition.
Claim 28
Dependent Claim
22 words
An intermediate semiconductor structure as recited in claim 21, wherein said base layer of titanium nitride is formed by reactive sputter deposition.
Claim 29
Dependent Claim
20 words
An intermediate semiconductor structure as recited in claim 21, wherein said backing layer of titanium is formed by sputter deposition.
Claim 30
Dependent Claim
35 words
An intermediate semiconductor structure as recited in claim 16, wherein said first layer of titanium, said base layer of titanium nitride, and said backing layer of titanium are each formed in a single semiconductor chamber.
Claim 31
Dependent Claim
151 words
An electrical contact formed through an insulative layer on a substrate to the surface thereof, the electrical contact comprising: (a) a contact well formed through the insulative layer, said contact well having a bottom and sides normal thereto, said bottom of said contact well defining a contact surface on the substrate; (b) a diffusion region of titanium silicide in said contact surface; (c) a peripheral layer of titanium deposited on said sides of said contact well; (d) a composite strata of titanium nitride formed on said peripheral layer of titanium and on said contact surface, said composite strata of titanium nitride comprising a base layer of titanium nitride contacting said bottom of said well and a backing layer of titanium overlying said base layer of titanium nitride and annealed to form said composite strata; and (e) a metalized contact engaging said composite strata of titanium nitride and filling said contact well.
Claim 32
Dependent Claim
151 words
An electrical contact formed through an insulative layer on a substrate to the surface thereof, the electrical contact comprising: (a) a contact well formed through the insulative layer, said contact well having a bottom and sides normal thereto, said bottom of said contact well defining a contact surface on the substrate; (b) a diffusion region of titanium silicide in said contact surface; (c) a peripheral layer of titanium deposited on said sides of said contact well; (d) a composite strata of titanium nitride formed on said peripheral layer of titanium and on said contact surface, said composite strata of titanium nitride comprising a base layer of titanium nitride contacting said bottom of said well and a backing layer of titanium overlying said base layer of titanium nitride and annealed to form said composite strata; and (e) a metalized contact engaging said composite strata of titanium nitride and filling said contact well.
Claim 33
Dependent Claim
29 words
An electrical contact as recited in claim 26, wherein said diffusion region is formed by the migration of titanium from a first layer of titanium on said contact surface.
Claim 34
Dependent Claim
24 words
An electrical contact as recited in claim 27, wherein said diffusion region is formed by heating the substrate and said first layer of titanium.
Claim 35
Dependent Claim
18 words
An electrical contact as recited in claim 26, wherein first layer of titanium is formed by sputter deposition.
Claim 36
Dependent Claim
54 words
An electrical contact as recited in claim 26, wherein: (a) said base layer comprises titanium nitride formed by reactive sputter deposition on said peripheral layer of titanium and on said contact surface; and (b) said backing layer comprises titanium nitride formed by annealing in nitrogen a layer of titanium deposited on said base layer.
Claim 37
Dependent Claim
21 words
An electrical contact as recited in claim 30, wherein said backing layer is formed on said base layer by sputter deposition.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-08-04 | 1996-02-03 | 1996-08-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-08-04 | 2000-02-03 | 2000-08-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-08-04 | 2004-02-03 | 2004-08-04 | $7700.00 | Window Closed / Lapsed |