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US5136166A
Expired / Lapsed
US
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Temperature stable magnetic deflection assembly
Assignee: Applied Materials Inc
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Filing: 1991-01-31
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Granted: 1992-08-04
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Expires: 2011-01-31
Abstract
Abstract A thermally stable magnetic deflection assembly for use in an electron or particle beam machine with several separately potted magnetic coils spaced apart and arranged in a particular vertical position on a central pipe. Non metallic, low coefficient of thermal expansion, highly thermally conductive materials are used throughout and means are provided for maintaining the entire assembly at a desired temperature. Also disclosed is a method of making a thermally stable magnetic deflection assembly.
Inventors
- 👤 Lydia J. Young
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 15:07
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/3002; H01J37/3007; H01J37/02; H01J37/04; H01J37/147; H01J37/1472; H01J37/1474; H01J37/1475; H01J2237/00; H01J2237/002; H01J2237/15; H01J2237/152; H01J2237/1526; H01J2237/30; H01J2237/317; H01J2237/3175
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
42 words
For a beam column of a lithography machine, a thermally stable magnetic deflection assembly comprising: a plurality of magnetic coils each formed of conductors; and means for spacing apart and arranging the coils, said means being formed of non-metallic thermally stable material.
Claim 2
Dependent Claim
42 words
For a beam column of a lithography machine, a thermally stable magnetic deflection assembly comprising: a plurality of magnetic coils each formed of conductors; and means for spacing apart and arranging the coils, said means being formed of non-metallic thermally stable material.
Claim 3
Dependent Claim
60 words
The assembly as claimed in claim 1, wherein said means for spacing apart comprises: a plurality of coil forms, each of said plurality of coils being wound on one of said plurality of coil forms; a pipe, said coils being stacked on said pipe; means for vertically spacing each coil from each other; and thermally conductive material coating each coil.
Claim 4
Dependent Claim
24 words
The assembly as claimed in claim 1, wherein each of said coils is individually cooled so as to be thermally independent of one another.
Claim 5
Dependent Claim
30 words
The assembly as claimed in claim 2, wherein said means for vertically spacing comprises a standoff formed integrally with one of said coil forms and extending beyond the coated coils.
Claim 6
Dependent Claim
20 words
The assembly as claimed in claim 3, wherein said means for vertically spacing comprises spacers of non-metallic thermally stable material.
Claim 7
Dependent Claim
21 words
The assembly as claimed in claim 1, wherein each of said coils are stacked on said pipe in a snug-fit relationship.
Claim 8
Dependent Claim
26 words
The assembly as claimed in claim 1, further comprising a shroud of non-metallic material surrounding said coils, said shroud defining a passage for circulating fluid coolant.
Claim 9
Dependent Claim
40 words
The assembly as claimed in claim 7, wherein said shroud comprises a plurality of shroud pieces of non-metallic material and surrounding some of said coils, and a cup-like shroud piece of non-metallic material and surrounding the remainder of said coils.
Claim 10
Dependent Claim
20 words
The assembly as claimed in claim 8, wherein said shroud pieces are separated by spacers of non-metallic thermally stable material.
Claim 11
Dependent Claim
62 words
For a beam column of a lithography machine, a thermally stable magnetic deflection assembly comprising: a plurality of magnetic coils each wound on a form of non-metallic thermally stable material; each coil being surrounded by thermally conductive material; a pipe of non-metallic thermally stable material; said coils being stacked on said pipe; and means for vertically spacing each coil from each other.
Claim 12
Dependent Claim
62 words
For a beam column of a lithography machine, a thermally stable magnetic deflection assembly comprising: a plurality of magnetic coils each wound on a form of non-metallic thermally stable material; each coil being surrounded by thermally conductive material; a pipe of non-metallic thermally stable material; said coils being stacked on said pipe; and means for vertically spacing each coil from each other.
References Cited (Backward Citations)
JPS5719947A
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EP0051733A1
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JPS61227356A
Cited
JPS6151737A
Cited
EP0244289A2
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JPS6441155A
Cited
US5012104A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-08-04 | 1996-02-03 | 1996-08-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-08-04 | 2000-02-03 | 2000-08-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-08-04 | 2004-02-03 | 2004-08-04 | $7700.00 | Window Closed / Lapsed |