US5133603A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for observing alignment marks on a mask and wafer
Assignee: Canon Inc
•
Filing: 1991-07-23
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Granted: 1992-07-28
•
Expires: 2011-07-23
Abstract
Abstract An observation device for use in observation of a first object and a second object onto which a pattern of the first object is to be projected, the observation device includes a light source; a polarization beam splitter provided between the light source and the first object, for receiving light from the light source and for directing the same to the first and second objects; a first phase converting element provided between the first and second objects, for changing the state of polarization of the light from the light source as incident on the first phase converting element; and a second phase converting element provided to be disposed or to be selectively disposed between the first object and the polarization beam splitter, for changing the state of polarization of reflection light from the first object as incident on the second phase converting element; wherein the first and second objects can be observed by detecting, through the polarization beam splitter, reflection light reflected by the second object ane passing through the first object or by detecting the reflection light and reflection light from the first object.
Inventors
- 👤 Akiyoshi Suzuki
- 👤 Hideki Ina
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 12:19
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7065
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
172 words
An observation device for use in observation of first and second objects opposed to each other, said device comprising: a light source; a polarization beam splitter disposed between said light source and the first object, for receiving light from said light source and for directing at least a portion of the received light to the first and second objects; a first polarization member disposed on a light path between the first and second objects, for changing a state of polarization of received light; and a second polarization member disposed on a light path between said polarization beam splitter and the first object, for changing a state of polarization of received light; wherein, for observation of the first and second objects, first reflection light from the first object is detected through the action of said second polarization member and said polarization beam splitter, while second reflection light from the second object is detected through the action of said first polarization member, the first object, and second polarization member and said polarization beam splitter.
Claim 2
Dependent Claim
172 words
An observation device for use in observation of first and second objects opposed to each other, said device comprising: a light source; a polarization beam splitter disposed between said light source and the first object, for receiving light from said light source and for directing at least a portion of the received light to the first and second objects; a first polarization member disposed on a light path between the first and second objects, for changing a state of polarization of received light; and a second polarization member disposed on a light path between said polarization beam splitter and the first object, for changing a state of polarization of received light; wherein, for observation of the first and second objects, first reflection light from the first object is detected through the action of said second polarization member and said polarization beam splitter, while second reflection light from the second object is detected through the action of said first polarization member, the first object, and second polarization member and said polarization beam splitter.
Claim 3
Dependent Claim
15 words
A device according to claim 1, wherein said first polarization member comprises a quarter waveplate.
Claim 4
Dependent Claim
47 words
A device according to claim 2, wherein said second polarization member comprises an optical crystal with a crystal axis, and wherein said second polarization member is rotatable to change the orientation of the crystal axis with respect to a plane of polarization of the first reflection light.
Claim 5
Dependent Claim
62 words
A device according to claim 3, further comprising image pickup means for receiving the first refection light and the second reflection light to observe images of the first and second objects, and adjusting means for rotating said second polarization member in accordance with a level of an output signal from said image pickup means to adjust the orientation of said crystal axis.
Claim 6
Dependent Claim
34 words
A device according to claim 4, further comprising modulating means for modulating the intensity of light from said light source in accordance with the level of the output signal from said image pickup means.
Claim 7
Dependent Claim
36 words
A device according to claim 1, wherein said light source comprises a laser which is equipped with an arrangement for substantially avoiding production of a speckle pattern on the first object with light from said laser.
Claim 8
Dependent Claim
30 words
A device according to claim 1, wherein said light source comprises an optical fiber and a condensing optical system for directing light from said fiber to said polarization beam splitter.
Claim 9
Dependent Claim
44 words
A device according to claim 1, wherein said light source provides rectilinearly polarized light and wherein said polarization beam splitter functions so that the direction of polarization of the light from said light source agrees to the polarizing direction of said polarization beam splitter.
Claim 10
Dependent Claim
40 words
A device according to claim 1, wherein said first polarization member has a reflection surface and serves to change the state of polarization of the received light by reflecting the received light with its reflection surface, while shifting a phase.
Claim 11
Dependent Claim
15 words
A device according to claim 1, wherein said second polarization member comprises a quarter waveplate.
Claim 12
Dependent Claim
18 words
A device according to claim 1, wherein the second polarization member is demountably supported on the light path.
Claim 13
Dependent Claim
144 words
An observation system for observing a mask and a wafer opposed to each other with a quarter waveplate interposed therebetween, said observation system comprising: a light source; a photodetector; and a detection optical system having a polarization beam splitter and an auxiliary quarter waveplate, wherein said polarization beam splitter is disposed between said light source and said auxiliary quarter waveplate, wherein said detection optical system serves to direct light from said light source of the mask and the wafer through the action of said polarization beam splitter and auxiliary quarter waveplate, serves to direct first reflection light from the mask to said photodector through the action of said auxiliary quarter waveplate and said polarization beam splitter, and serves to direct second reflection light from the wafer to said photodetector through the action of the mask, said auxiliary quarter waveplate, and said polarization beam splitter.
Claim 14
Dependent Claim
144 words
An observation system for observing a mask and a wafer opposed to each other with a quarter waveplate interposed therebetween, said observation system comprising: a light source; a photodetector; and a detection optical system having a polarization beam splitter and an auxiliary quarter waveplate, wherein said polarization beam splitter is disposed between said light source and said auxiliary quarter waveplate, wherein said detection optical system serves to direct light from said light source of the mask and the wafer through the action of said polarization beam splitter and auxiliary quarter waveplate, serves to direct first reflection light from the mask to said photodector through the action of said auxiliary quarter waveplate and said polarization beam splitter, and serves to direct second reflection light from the wafer to said photodetector through the action of the mask, said auxiliary quarter waveplate, and said polarization beam splitter.
Claim 15
Dependent Claim
18 words
An observation system according to claim 12, wherein said auxiliary quarter waveplate is demountably mounted on said system.
Claim 16
Dependent Claim
40 words
An observation system according to claim 12, wherein said photodetector comprises an image pickup device and wherein, with the first and second reflection light, images of marks of the mask and the wafer are formed on said image pickup device.
Claim 17
Dependent Claim
37 words
An observation system according to claim 14, wherein said auxiliary quarter waveplate is rotatable about an optical axis of said detection optical system in accordance with a level of an output signal from said image pickup device.
Claim 18
Dependent Claim
32 words
An observation system according to claim 14, further comprising means for modulating the light from said light source in accordance with a level of an output signal from said image pickup device.
Claim 19
Dependent Claim
32 words
An observation system according to claim 15, further comprising means for modulating the light from said light source in accordance with the level of the output signal from said image pickup device.
Claim 20
Dependent Claim
19 words
An observation system according to claim 12, wherein said light source comprises an optical fiber for emitting the light.
Claim 21
Dependent Claim
18 words
An observation system according to claim 12, wherein said light source comprises a laser for emitting the light.
Claim 22
Dependent Claim
192 words
A projection exposure apparatus, comprising: a projection optical system for projecting an image of a pattern of mask upon a wafer, said projection optical system having a first quarter waveplate; a light source; an image pickup device; a detection optical system having a polarization beam splitter and a second quarter waveplate, wherein said polarization beam splitter is disposed between said light source and said second quarter waveplate, wherein said detection optical system serves to direct light from said light source to the mask and the wafer through the action of said polarization beam splitter and said second quarter waveplate, serves to direct first refection light from the mask to said image pickup device through the action of said second quarter waveplate and said polarization beam splitter, and serves to direct second reflection light from the wafer to said image pickup device through the action of the mask, said second quarter waveplate and said polarization beam splitter, whereby images of marks of the mask and the wafer are projected on said image pickup device; and a rotating mechanism for rotating said second quarter waveplate about an optical axis of said detection optical system.
Claim 23
Dependent Claim
192 words
A projection exposure apparatus, comprising: a projection optical system for projecting an image of a pattern of mask upon a wafer, said projection optical system having a first quarter waveplate; a light source; an image pickup device; a detection optical system having a polarization beam splitter and a second quarter waveplate, wherein said polarization beam splitter is disposed between said light source and said second quarter waveplate, wherein said detection optical system serves to direct light from said light source to the mask and the wafer through the action of said polarization beam splitter and said second quarter waveplate, serves to direct first refection light from the mask to said image pickup device through the action of said second quarter waveplate and said polarization beam splitter, and serves to direct second reflection light from the wafer to said image pickup device through the action of the mask, said second quarter waveplate and said polarization beam splitter, whereby images of marks of the mask and the wafer are projected on said image pickup device; and a rotating mechanism for rotating said second quarter waveplate about an optical axis of said detection optical system.
Claim 24
Dependent Claim
17 words
An apparatus according to claim 20, wherein said second quarter waveplate is demountably mounted on said apparatus.
Claim 25
Dependent Claim
27 words
An apparatus according to claim 20, wherein said second quarter waveplate is rotatable in accordance with a level of an output signal from said image pickup device.
Claim 26
Dependent Claim
34 words
An apparatus according to claim 20, further comprising means for modulating the intensity of the light from said light source in accordance with a level of an output signal from said image pickup device.
Claim 27
Dependent Claim
15 words
An apparatus according to claim 20, wherein said first quarter waveplate comprises a reflection plate.
Claim 28
Independent Claim
137 words
A method of observing marks of a mask and a wafer opposed to each other with a quarter waveplate interposed therebetween, said method comprising the steps of: illuminating the mask with polarized light to thereby illuminate the wafer through the action of the mask and the quarter waveplate; detecting reflection light, produced by the illumination of the wafer, through the action of the quarter waveplate and the mask and a polarization beam splitter; and changing the state of polarization of reflection light produced by the illuminated mask between the mask and the polarization beam splitter so that at least a portion of the reflection light from the mask is directed to a path of refection light produced by the wafer, such that the reflection light from the mask is used to detect the marks of the mask.
Claim 29
Independent Claim
137 words
A method of observing marks of a mask and a wafer opposed to each other with a quarter waveplate interposed therebetween, said method comprising the steps of: illuminating the mask with polarized light to thereby illuminate the wafer through the action of the mask and the quarter waveplate; detecting reflection light, produced by the illumination of the wafer, through the action of the quarter waveplate and the mask and a polarization beam splitter; and changing the state of polarization of reflection light produced by the illuminated mask between the mask and the polarization beam splitter so that at least a portion of the reflection light from the mask is directed to a path of refection light produced by the wafer, such that the reflection light from the mask is used to detect the marks of the mask.
Claim 30
Dependent Claim
35 words
A method according to claim 25, further comprising the step of forming images of the marks of the mask and the wafer with reflection light from the mask and the reflection light from the wafer.
Claim 31
Dependent Claim
21 words
A method according to claim 26, further comprising the step of photoelectrically observing the marks of the mask and the wafer.
Claim 32
Dependent Claim
25 words
A method according to claim 27, wherein said changing step comprises the step of using a second quarter waveplate to change the stage of polarization.
Claim 33
Dependent Claim
21 words
A method according to claim 27, wherein said illuminating step comprises the step of illuminating the mask with modulatable light intensity.
Claim 34
Dependent Claim
29 words
A method according to claim 25, wherein said illuminating step comprises the step of illuminating the mask with the polarized light through the action of the polarization beam splitter.
Claim 35
Dependent Claim
29 words
A method according to claim 26, wherein said illuminating step comprises the step of illuminating the mask with the polarized light through the action of the polarization beam splitter.
References Cited (Backward Citations)
US3853398A
Cited
US4389084A
Cited
US4406546A
Cited
US4645924A
Cited
US4655601A
Cited
US4634240A
Cited
JPS60261138A
Cited
JPH01191418A
Cited
JPH01191419A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-07-28 | 1996-01-27 | 1996-07-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-07-28 | 2000-01-27 | 2000-07-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-07-28 | 2004-01-27 | 2004-07-28 | $7700.00 | Window Closed / Lapsed |