Abstract Disclosed is a method for transforming a rejected semiconductor product wafer, originally having epitaxial silicon on a low resistivity substrate, into a recycled EPI-on-silicon wafer targeted for reuse as a lower cost higher quality material suitable for new semiconductor product fabrication. The method comprises the steps of removing the old semiconductor product layers, rounding the edges of the wafer if necessary, polishing the wafer surface, thermally treating the wafer to drive lattice imperfections from the surface to create fresh inpurity getter sites in the wafer body, and introducing a new epitaxial silicon layer. The low cost feature is provided by the reuse of the original substrate wafer. The high quality feature is provided by the targeted redistribution of oxygen induced defects from the recycled substrate wafer surface.
A method of reclaiming a semiconductor wafer comprising the steps of: stripping all layers from said wafer which had been added to the original wafer to construct the rejected semiconductor product; reestablishing said wafer's edge rounded contour; repolishing said wafer's front surface; redistributing the oxygen induced defects in said wafer's lattice to create a new defect-free Denuded Zone near said wafer's front surface and fresh getter sites in the bulk lattice of said wafer to getter impurities; and forming a fresh layer of epitaxial silicon to meet the future product requirements of said wafer.
Claim 2
Dependent Claim
23 words
A method as in claim 1 which further comprises the step of, after said step of stripping, reestablishing said wafer's edge rounded contour.
Claim 3
Dependent Claim
37 words
A method reestablishing said wafer's edge rounded contour as in claim 2 wherein said step of reestablishing said wafer's edge contour is performed if the thickness of the original epitaxial layer is greater than approximately eight microns.
Claim 4
Dependent Claim
23 words
A method as in claim 2 wherein said step of reestablishing said wafer edge contouring precedes said step of repolishing said wafer's frontside.
Claim 5
Dependent Claim
21 words
A method as in claim 1 wherein said step of redistributing the oxygen induced defects follow the said step of repolishing.
Claim 6
Dependent Claim
28 words
A method as in claim 1 wherein said step of redistributing the oxygen induced defects comprises a first step of subjecting the wafer to an oxygen/ chlorine ambient.
Claim 7
Dependent Claim
20 words
A method as in claim 6 wherein said oxygen/chlorine ambient has a first temperature of greater than approximately 1,150° C.
Claim 8
Dependent Claim
31 words
A method as in claim 7 wherein said step of redistributing further comprises the step of subjecting said wafer to second temperature less than said first temperature, following said first step.
Claim 9
Dependent Claim
21 words
A method as in claim 8 wherein said second temperature is within the range of approximately 550° C. to 750° C.
Claim 10
Dependent Claim
39 words
A method as in claim 1 wherein said step of forming a fresh layer of epitaxial silicon comprises the step of growing said layer of epitaxial silicon on said wafer following said step of redistributing said oxygen induced defects.