US5130764A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multi layer photopolymeric structure for the manufacturing of mesfet devices with submicrometric gate and variable length recessed channel
Assignee: Leonardo SpA
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Filing: 1989-07-06
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Granted: 1992-07-14
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Expires: 2009-07-06
Abstract
Abstract A technique utilizing conventional photolithography to manufacture GaAs MESFET devices having sub-micrometric gate and variable length recessed channel. The structure of these devices consists of two photopolymeric layers separated by a metal interface. The upper, stencil layer sets the aperture of the submicrometric gate. The lower planarizing layer defines the recessed channel, through the metal interface, which acts as a template. The length of such channel may be varied through suitable choice of exposure time of the planarizing photopolymer. By adopting such multilayer structures it is possible to obtain gate lengths of ˜b μm and recessed channel lengths form 0.8 to 3 μm, with a process yield typically better than 90%, simultaneously. Furthermore, by using a thicker planarizing layer in this structure it is possible to obtain a relatively thick metal deposit (typically about 0.8 μm), such as a Ti/Pt/Au overlayer over ohmic contacts and gate pads.
Inventors
- 👤 Antonio Cetronio
- 👤 Sergio Moretti
- 👤 Vittoria Compagnucci
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:34
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/061; H10D30/0612; G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/094; H10P; H10P76/00; H10P76/20; H10P76/202; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948; Y10S438/95
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
151 words
In a multilayer photopolymeric structure for preparing a multilayer resist system (MLR) for the manufacture of a MESFET device incorporating a submicrometric gate and a recessed channel, comprising a substrate, a planarizing photopolymer layer on the substrate, a thin metal film layer for defining the submicrometric structure on the planarizing layer, and a stencil photopolymer layer overlying the film layer, the improvement comprising: a planarizing layer that is unexposed to light prior to deposition of the other layers of the MLR; and a second thin metal film layer interposed between the planarizing layer and the structure-defining thin metal film layer, the second thin metal film layer having etching characteristics so differing from those of the structure-defining thin metal film layer that the structure-defining thin metal film may be etched to produce the desired high-definition submicrometric structure without etching the second thin metal film layer or damaging or hardening the planarizing photopolymer.
Claim 2
Dependent Claim
151 words
In a multilayer photopolymeric structure for preparing a multilayer resist system (MLR) for the manufacture of a MESFET device incorporating a submicrometric gate and a recessed channel, comprising a substrate, a planarizing photopolymer layer on the substrate, a thin metal film layer for defining the submicrometric structure on the planarizing layer, and a stencil photopolymer layer overlying the film layer, the improvement comprising: a planarizing layer that is unexposed to light prior to deposition of the other layers of the MLR; and a second thin metal film layer interposed between the planarizing layer and the structure-defining thin metal film layer, the second thin metal film layer having etching characteristics so differing from those of the structure-defining thin metal film layer that the structure-defining thin metal film may be etched to produce the desired high-definition submicrometric structure without etching the second thin metal film layer or damaging or hardening the planarizing photopolymer.
Claim 3
Dependent Claim
21 words
The multilayer photopolymeric structure of claim 1, wherein the second thin metal film layer is firmly adherent to the planarizing layer.
Claim 4
Dependent Claim
36 words
The multilayer photopolymeric structure of claim 1, wherein the substrate is constituted of gallium arsenide, the structure-defining thin metal film layer is constituted of gold, and the second thin metal film layer is constituted of aluminum.
Claim 5
Dependent Claim
215 words
A multilayered resist (MLR) structure for the manufacture of a MESFET device incorporating a submicrometric gate and a recessed channel, prepared by a method comprising the steps of: (a) exposing the stencil photopolymer layer of the multilayer photopolymeric structure of claim 1 to light through a template to selectively harden the photopolymer, the thus hardened photopolymer being insensitive to subsequent exposure to light; (b) developing the stencil layer; (c) selectively etching the thin metal film layer, using the developed stencil layer as a template, to define the aperture of the submicrometric gate of the MESFET in said thin metal film layer, without etching any of said second thin metal film layer; (d) selectively etching the second thin metal film layer, using the developed stencil layer and the etched thin metal film layer as a template, under conditions permitting a limited amount of undercutting of the second thin metal film layer; (e) exposing the planarizing photopolymer layer to light, using the stencil layer and the second thin metal film layer as a template; and (f) developing the planarizing photopolymer layer, the planarizing layer being undercut in relation to the degree of its exposure in step (e), and the extent of the undercut determining the dimensions of the recessed channel of the MESFET, thereby producing the MLR.
Claim 6
Dependent Claim
26 words
The MLR structure of claim 4, wherein the second thin metal film layer of said multilayer polymeric structure is firmly adherent to the planarizing surface thereof.
Claim 7
Dependent Claim
42 words
The MLR structure of claim 4, wherein the substrate of said multilayer photopolymeric structure is constituted of gallium arsenide, the structure-defining thin metal film layer thereof is constituted of gold, and the second thin metal film layer thereof is constituted of aluminum.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-07-14 | 1996-01-13 | 1996-07-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-07-14 | 2000-01-13 | 2000-07-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-07-14 | 2004-01-13 | 2004-07-14 | $7700.00 | Window Closed / Lapsed |