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US5130296A
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Method of preparing an oxide superconducting thin film on a substrate with a plurality of grooves
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1991-03-29
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Granted: 1992-07-14
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Expires: 2011-03-29
Abstract
Abstract When an oxide superconducting thin film is formed on a substrate by a vapor phase method such as laser ablation, for example, a plurality of grooves are formed on the substrate by photolithography or beam application in the same direction with an average groove-to-groove pitch of not more than 10 μm, so that the oxide superconducting thin film is formed on a surface provided with such a plurality of grooves. Thus promoted is growth of crystals of the oxide superconducting thin film in parallel with the grooves, whereby respective directions of a-axes and c-axes are regulated to some extent. This improves critical current density of the oxide superconducting thin film.
Inventors
- 👤 Satoshi Takano
- 👤 Shigeru Okuda
- 👤 Noriyuki Yoshida
- 👤 Noriki Hayashi
- 👤 Kenichi Sato
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 11:39
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0576; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/73; Y10S505/732
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
77 words
A method of preparing an oxide superconducting thin film, comprising the steps of: preparing a non-single crystalline substrate; forming a plurality of grooves of from about 0.2 to about 100 μm in width and from about 0.05 to 100 μm in depth, extending in the same direction, on a surface of said substrate to be provided with an oxide superconducting thin films; and forming an oxide superconducting thin film on said surface by a vapor phase method.
Claim 2
Independent Claim
77 words
A method of preparing an oxide superconducting thin film, comprising the steps of: preparing a non-single crystalline substrate; forming a plurality of grooves of from about 0.2 to about 100 μm in width and from about 0.05 to 100 μm in depth, extending in the same direction, on a surface of said substrate to be provided with an oxide superconducting thin films; and forming an oxide superconducting thin film on said surface by a vapor phase method.
Claim 3
Dependent Claim
37 words
A method of preparing an oxide superconducting thin film in accordance with claim 1, wherein said substrate is formed of a long material, and said grooves are formed to extend along the longitudinal direction of said substrate.
Claim 4
Dependent Claim
32 words
A method of preparing an oxide superconducting thin film in accordance with claim 1, wherein an average pitch between said plurality of grooves is selected to be not more than 10 μm.
Claim 5
Dependent Claim
22 words
A method of preparing an oxide superconducting thin film in accordance with claim 1, wherein said vapor phase method is laser ablation.
Claim 6
Dependent Claim
26 words
A method of preparing an oxide superconducting thin film in accordance with claim 1, wherein said grooves are formed by one of photolithography and beam application.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-07-14 | 1996-01-13 | 1996-07-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-07-14 | 2000-01-13 | 2000-07-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-07-14 | 2004-01-13 | 2004-07-14 | $7700.00 | Window Closed / Lapsed |