US5127733A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Integrated optical precision measuring device
Assignee: Dr Johannes Heidenhain GmbH
•
Filing: 1990-05-25
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Granted: 1992-07-07
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Expires: 2010-05-25
Abstract
Abstract A photoelectric measuring device for measuring the relative position between two objects utilizing interfering lightwave patterns is provided. Two diffraction gratings having an equal grid constants are provided to perpendicularly impinge beam bundles into circular coupling-in gratings of the integrated optical circuit. In addition, an integrated light source may be coupled-out of the integrated optical circuit.
Inventors
- 👤 Michael Allgauer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:50
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/124; G01; G01D; G01D5/00; G01D5/26; G01D5/32; G01D5/34; G01D5/36; G01D5/38; G02B6/24; G02B6/26; G02B6/34
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
80 words
Apparatus for coupling light beams with a substrate containing an integrated optical circuit comprising: a light emitting source; a diffraction element for diffracting light from said light emission source into at least one diffracted beam bundle; a coupling element having circular gratings; and diffraction means for directing said diffracted beam bundle to said coupling element so that said diffracted beam bundle impinges perpendicularly upon said coupling element wherein said diffraction element and said diffraction means have an equivalent grid constant.
Claim 2
Dependent Claim
80 words
Apparatus for coupling light beams with a substrate containing an integrated optical circuit comprising: a light emitting source; a diffraction element for diffracting light from said light emission source into at least one diffracted beam bundle; a coupling element having circular gratings; and diffraction means for directing said diffracted beam bundle to said coupling element so that said diffracted beam bundle impinges perpendicularly upon said coupling element wherein said diffraction element and said diffraction means have an equivalent grid constant.
Claim 3
Dependent Claim
11 words
Apparatus according to claim 1 wherein said diffraction means is movable.
Claim 4
Dependent Claim
11 words
Apparatus according to claim 1 wherein said diffraction element is movable.
Claim 5
Dependent Claim
18 words
Apparatus according to claim 1 wherein said light emitting source comprises an integrated component of said optical circuit.
Claim 6
Dependent Claim
17 words
Apparatus according to claim 1 wherein said diffraction element comprises an integrated component of said optical circuit.
Claim 7
Dependent Claim
17 words
Apparatus according to claim 1 wherein said diffraction means comprises an integrated component of said optical circuit.
Claim 8
Dependent Claim
17 words
Apparatus according to claim 1 wherein said diffraction element and diffraction means are constructed as linear gratings.
Claim 9
Dependent Claim
18 words
Apparatus according to claim 1 wherein said diffraction element and said diffraction means are constructed as radial gratings.
Claim 10
Dependent Claim
50 words
Apparatus according to claim 1 further comprising: waveguide means for directing beam bundles from said coupling element; coupling means disposed to receive said beam bundles directed by said waveguide means for bringing said beam bundles into interference; and detection means for detecting phase displaced electrical signals from said coupling means.
Claim 11
Dependent Claim
13 words
Apparatus according to claim 9 wherein said coupling means is a 2×3 coupler.
Claim 12
Dependent Claim
36 words
Apparatus according to claim 1 wherein said substrate comprises a top surface and a bottom surface and said diffraction element is disposed on said top surface and said coupling element is disposed on said bottom surface.
Claim 13
Dependent Claim
18 words
Apparatus according to claim 11 wherein said light emitting source comprises an integrated component of said optical circuit.
Claim 14
Dependent Claim
22 words
Apparatus according to claim 12 further comprising a second coupling element wherein said light emitting source impinges perpendicularly upon said diffraction element.
Claim 15
Dependent Claim
13 words
Apparatus according to claim 13 wherein said second coupling element has circular gratings.
Claim 16
Dependent Claim
17 words
Apparatus according to claim 9 wherein said detection means comprises an integrated component of said integrated circuit.
Claim 17
Dependent Claim
69 words
Apparatus for coupling light beams with a substrate containing an integrated optical circuit comprising: a light emitting source creating a light beam; diffraction means for diffracting said light beam; means for perpendicularly impinging said light beam onto said diffraction means; a coupler comprising circular gratings; and means for perpendicularly impinging said diffracted beam onto said coupler comprising a diffraction element having an equivalent grid constant to said diffraction means.
Claim 18
Dependent Claim
69 words
Apparatus for coupling light beams with a substrate containing an integrated optical circuit comprising: a light emitting source creating a light beam; diffraction means for diffracting said light beam; means for perpendicularly impinging said light beam onto said diffraction means; a coupler comprising circular gratings; and means for perpendicularly impinging said diffracted beam onto said coupler comprising a diffraction element having an equivalent grid constant to said diffraction means.
Claim 19
Dependent Claim
18 words
Apparatus according to claim 16 wherein said light emitting source comprises an integrated component of said optical circuit.
Claim 20
Dependent Claim
23 words
Apparatus according to claim 16 wherein said means for perpendicularly impinging said light beam onto said diffraction means comprises a circular coupling-out grating.
Claim 21
Dependent Claim
87 words
Apparatus for coupling light beams with a substrate containing an integrated optical circuit comprising: a light emitting source; a diffraction element for diffracting light from said light emission source into at least one diffracted beam bundle; a coupling element having circular gratings located on said substrate; and diffraction means located on said substrate for directing said diffracted beam bundle to said coupling element so that said diffracted beam bundle impinges perpendicularly upon said coupling element wherein said diffraction element and said diffraction means have equivalent grid constants.
Claim 22
Dependent Claim
87 words
Apparatus for coupling light beams with a substrate containing an integrated optical circuit comprising: a light emitting source; a diffraction element for diffracting light from said light emission source into at least one diffracted beam bundle; a coupling element having circular gratings located on said substrate; and diffraction means located on said substrate for directing said diffracted beam bundle to said coupling element so that said diffracted beam bundle impinges perpendicularly upon said coupling element wherein said diffraction element and said diffraction means have equivalent grid constants.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-07-07 | 1996-01-06 | 1996-07-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-07-07 | 2000-01-06 | 2000-07-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-07-07 | 2004-01-06 | 2004-07-07 | $7700.00 | Window Closed / Lapsed |