Encoder for setting optical path lengths of related beams

Claim 2

An encoder comprising: a light source; a first polarizing beam splitter for splitting a beam from said light source into beams R1 and R2; a λ/4 plate arranged in an optical path L1 for the beam R1 and an optical path L2 for the beam R2; first optical means for causing the beams R1 and R2 to be incident at a first position of a diffraction grating so that a positive first mode diffracted beam obtained by diffracting the beam R1 at the first position of said diffraction grating is guided along the optical path L1 and a negative second mode diffracted beam obtained by diffracting the beam R2 at the first position of said diffraction grating is guided along the optical path L2, and for superposing the positive first mode diffracted beam and the negative second mode diffracted beam on each other through said first polarizing beam splitter; a second polarizing beam splitter for splitting the positive first mode diffracted beam and the negative second mode diffracted beam from said first optical means from each other; a second λ/4 plate arranged in an optical path L3 for the positive first mode diffracted beam from said second polarizing beam splitter and an optical path L4 for the negative second mode diffracted beam from said second polarizing beam splitter; second optical means for causing the positive first mode diffracted beam and the negative second mode diffracted beam to be incident at a second position of said diffraction grating so that a positive first mode rediffracted beam obtained by diffracting the positive first mode diffracted beam at the second position of said diffraction grating is guided along the optical path L3 and a negative second mode rediffracted beam obtained by diffracting the negative second mode diffracted beam at the second position of said diffraction grating is guided along the optical path L4, and for superposing the positive first mode rediffracted beam and the negative second mode rediffracted beam on each other through said second polarizing beam splitter; and photoelectric converting means for causing the positive first mode rediffracted beam and the negative second mode rediffracted beam from said second optical means to interfere with each other to form an interference beam and for converting the inference beam into an electrical signal, wherein a difference between optical path lengths of beams incident on said converting means through the optical paths L1 and L4 and of beams incident on said converting means through the optical paths L2 and L4, and a difference between optical path lengths of beams incident on said converting means through the optical paths L1 and L3 and of beams incident on said converting means through the optical paths L2 and L3 are set to be larger than a coherent length of the beam from said light source.

Claim 3

An encoder according to claim 1, wherein said encoder comprises a rotary encoder, and said diffraction grating is formed along a rotational direction of a rotary scale.

Claim 4

An encoder according to claim 2, wherein the first and second positions on said diffraction grating are substantially symmetrical about a center of rotation of said rotary scale.

Claim 5

An encoder according to claim 1, wherein the optical path lengths are set by a medium having a refractive index different from that of air and located in an optical path.

Claim 6

An encoder according to claim 4, wherein said medium is a glass plate.

Claim 7

An encoder according to claim 1, wherein said light source comprises a semiconductor laser.

Claim 8

An encoder according to claim 6, wherein said semiconductor comprises a multimode semiconductor laser.

Claim 9

An encoder according to claim 1, wherein said photoelectric converting means comprises at least two light-receiving elements for detecting signals having different phases.

Claim 10

An encoder according to claim 1, wherein said first and second optical means cause the beams to be incident on said diffraction grating at an incident angle θ 0 =sin -1 (λ/2P) where λ is a wavelength of the beam and P is a grating pitch of said diffraction grating.

Claim 11

A drive system having an encoder, comprising: driving means having a drive source; and an encoder for detecting a drive state of said driving means, said encoder being provided with light source, a diffraction grating formed in a drive output section of said driving means, a first polarizing beam splitter for splitting a beam from said light source into beams R1 and R2, a λ/4 plate arranged in an optical path L1 for the beam R1 and an optical path L2 for the beam R2, first optical means for causing the beams R1 and R2 to be incident at a first position of said diffraction grating so that a positive first mode diffracted beam obtained by diffracting the beam R1 at the first position of said diffraction grating is guided along the optical path L1 and a negative second mode diffracted beam obtained by diffracting the beam R2 at the first position of said diffraction grating is guided along the optical path L2, and for superposing the positive first mode diffracted beam and the negative second mode diffracted beam on each other through said first polarizing beam splitter, a second polarizing beam splitter for splitting the positive first mode diffracted beam and the negative second mode diffracted beam from said first optical means from each other, a second λ/4 plate arranged in an optical path L3 for the positive first mode diffracted beam from said second polarizing beam splitter and an optical path L4 for the negative second mode diffracted beam from said second polarizing beam splitter, second optical means for causing the positive first mode diffracted beam and the negative second mode diffracted beam to be incident at a second position of said diffraction grating so that a positive first mode diffracted beam obtained by diffracting the positive first mode diffracted beam at the second position of said diffraction grating is guided along the optical path L3 and a negative second mode rediffracted beam obtained by diffracting the negative second mode diffracted beam at the second position of said diffraction grating is guided along the optical path L4, and for superposing the positive first mode rediffracted beam and the negative second mode rediffracted beam on each other through said second polarizing beam splitter, and photoelectric converting means for causing the positive first mode rediffracted beam and the negative second mode rediffracted beam from said second optical means to interfere with each other to form an interference beam and for converting the interference beam into an electrical signal, and for obtaining a signal representing the drive state, wherein a difference between optical path lengths of beams incident on said converting means through the optical paths L1 and L4 and of beams incident on said converting means through the optical paths L2 and L4, and a difference between optical path lengths of beams incident on said converting means through the optical paths L1 and L3 and of beams incident on said converting means through the optical paths L2 and L3 are set to be larger than a coherent length of a beam from said light source.

Claim 12

A drive system having an encoder, comprising: driving means having a drive source; and an encoder for detecting a drive state of said driving means, said encoder being provided with light source, a diffraction grating formed in a drive output section of said driving means, a first polarizing beam splitter for splitting a beam from said light source into beams R1 and R2, a λ/4 plate arranged in an optical path L1 for the beam R1 and an optical path L2 for the beam R2, first optical means for causing the beams R1 and R2 to be incident at a first position of said diffraction grating so that a positive first mode diffracted beam obtained by diffracting the beam R1 at the first position of said diffraction grating is guided along the optical path L1 and a negative second mode diffracted beam obtained by diffracting the beam R2 at the first position of said diffraction grating is guided along the optical path L2, and for superposing the positive first mode diffracted beam and the negative second mode diffracted beam on each other through said first polarizing beam splitter, a second polarizing beam splitter for splitting the positive first mode diffracted beam and the negative second mode diffracted beam from said first optical means from each other, a second λ/4 plate arranged in an optical path L3 for the positive first mode diffracted beam from said second polarizing beam splitter and an optical path L4 for the negative second mode diffracted beam from said second polarizing beam splitter, second optical means for causing the positive first mode diffracted beam and the negative second mode diffracted beam to be incident at a second position of said diffraction grating so that a positive first mode diffracted beam obtained by diffracting the positive first mode diffracted beam at the second position of said diffraction grating is guided along the optical path L3 and a negative second mode rediffracted beam obtained by diffracting the negative second mode diffracted beam at the second position of said diffraction grating is guided along the optical path L4, and for superposing the positive first mode rediffracted beam and the negative second mode rediffracted beam on each other through said second polarizing beam splitter, and photoelectric converting means for causing the positive first mode rediffracted beam and the negative second mode rediffracted beam from said second optical means to interfere with each other to form an interference beam and for converting the interference beam into an electrical signal, and for obtaining a signal representing the drive state, wherein a difference between optical path lengths of beams incident on said converting means through the optical paths L1 and L4 and of beams incident on said converting means through the optical paths L2 and L4, and a difference between optical path lengths of beams incident on said converting means through the optical paths L1 and L3 and of beams incident on said converting means through the optical paths L2 and L3 are set to be larger than a coherent length of a beam from said light source.

Claim 13

A system according to claim 10, further comprising: setting means for setting the drive state of said driving means; and control means for controlling said driving means on the basis of an output from said encoder so as to obtain a state set by said setting means.