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US5123636A
Expired / Lapsed
US
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Low-contaminate work surface for processing semiconductor grade silicon
Assignee: Dow Silicones Corp
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Filing: 1991-01-25
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Granted: 1992-06-23
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Expires: 2011-01-25
Abstract
Abstract The present invention is a low-contaminate work surface for processing semiconductor grade silicon. The work surface is comprised of a parallel array of silicon elements forming a planar surface. The silicon elements are of comparable purity with the semiconductor grade silicon to be process, thus minimizing contact contamination. In an additional embodiment of the present invention, the low-contaminate work surface is part of a work station which provides for initial screening and sizing of the semiconductor grade silicon being processed.
Inventors
- 👤 Richard C. Dumler
- 👤 Matthew J. Stavely
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 19:53
CPC Classifications
B; B28; B28D; B28D5/00; B28D5/0058; B28D5/0082; B07; B07B; B07B1/00; B07B1/12; B07B1/46; B07B1/4609; B28D5/0076
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
24 words
A low-contaminate work surface for processing semiconductor grade silicon, the work surface comprising: an array of silicon elements, said array forming a planar surface.
Claim 2
Dependent Claim
24 words
A low-contaminate work surface for processing semiconductor grade silicon, the work surface comprising: an array of silicon elements, said array forming a planar surface.
Claim 3
Dependent Claim
38 words
A low-contaminate work surface for processing semiconductor grade silicon, the work surface comprising: a parallel array of silicon elements, said array forming a planar surface, where position of the silicon elements is maintained by means of adjustable supports.
Claim 4
Dependent Claim
38 words
A low-contaminate work surface for processing semiconductor grade silicon, the work surface comprising: a parallel array of silicon elements, said array forming a planar surface, where position of the silicon elements is maintained by means of adjustable supports.
Claim 5
Dependent Claim
24 words
A low-contaminate work station according to claim 2, where the adjustable supports are positioned to provide gaps between the parallel array of silicon elements.
Claim 6
Dependent Claim
19 words
A low-contaminate work station according to claim 2, where the silicon elements are rods with a semicircular cross section.
Claim 7
Dependent Claim
26 words
A low-contaminate work station according to claim 4, where the adjustable support contains a semicircular longitudinal channel which conforms to the shape of the silicon element.
Claim 8
Dependent Claim
70 words
A low-contaminate work station for preparing silicon pieces, the work station comprising: (A) a parallel array of silicon elements forming a planar surface, where position of the silicon elements is maintained by means of adjustable supports; (B) the adjustable supports are adjustably mounted on to one or more cross-members supported on a base; and (C) the base houses a removable collection receptacle positioned beneath the parallel array of silicon elements.
Claim 9
Dependent Claim
70 words
A low-contaminate work station for preparing silicon pieces, the work station comprising: (A) a parallel array of silicon elements forming a planar surface, where position of the silicon elements is maintained by means of adjustable supports; (B) the adjustable supports are adjustably mounted on to one or more cross-members supported on a base; and (C) the base houses a removable collection receptacle positioned beneath the parallel array of silicon elements.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-06-23 | 1995-12-23 | 1996-06-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-06-23 | 1999-12-23 | 2000-06-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-06-23 | 2003-12-23 | 2004-06-23 | $7700.00 | Window Closed / Lapsed |