Acoustic wave device using plate modes with surface-parallel displacement

Claim 2

A solid-state acoustic plate mode sensor comprising: (a) a piezoelectric substrate having a pair of opposed surfaces; (b) input transducer means affixed to said substrate for propagating acoustic plate modes through said substrate; (c) output transducer means affixed to said substrate for receiving acoustic plate modes propagated through said substrate from said input transducer means; (d) means for maintaining a liquid in contact over a predetermined portion of either or both surfaces of said substrate, said liquid creating perturbations in the velocity of said acoustic plate modes reflecting internally from said predetermined portion of said surface; (e) means for applying a rf signal to said input transducer; (f) means for receiving an rf signal from said output transducer; and (g) means for determining said velocity perturbations from said rf signals; and (h) means for monitoring and quantifying the concentration of a chemical species in said liquid resulting from sorption of said species onto or desorption from said surface.

Claim 3

The solid-state acoustic plate mode sensor of claim 1, wherein said input and output transducer means each comprise a pair of interdigital combs coplanar with one surface of said substrate.

Claim 4

The solid-state acoustic plate mode sensor of claim 1, wherein said means for maintaining a liquid comprises a liquid receiving cell having a liquid containing wall extending from a substrate surface.

Claim 5

The solid-state acoustic plate mode sensor of claim 1, wherein said predetermined portion of said surface is in intimate contact and covered by a thin film in contact with said liquid, said liquid causing changes on the surface of said film, said changes causing in-plane displacements at the film-liquid interface and perturbations in said acoustic plate modes in said substrate.

Claim 6

The solid-state acoustic plate mode sensor of claim 4, wherein said liquid is an electrolyte and said thin film is an electrode receiving material by electrodeposition: said perturbation in velocity of said acoustic plate modes being a function of variations in mass and mechanical properties of the material received by said electrode.

Claim 7

The solid-state acoustic plate mode sensor of claim 4, wherein said liquid is an electrolyte and said thin film is an electrode surrendering material by electrodissolution; said perturbation in velocity of said acoustic plate modes being a function of variations in mass and mechanical properties of the material surrendered by said electrode.

Claim 8

The solid-state acoustic plate mode sensor of claim 4, wherein said liquid is an electrolyte and said thin film is a metal film changing material by corrosion; said perturbation in velocity of said acoustic plate modes being a function of variations in mass and mechanical properties of the change in amount of material on said thin film.

Claim 9

The solid-state acoustic plate mode sensor of claim 4, wherein said liquid is a solution containing dissolved species and said thin film is a surface-immobilized reagent designed to ligate said solution species; said perturbation in velocity of said acoustic plate modes being a function of variations in concentration and identity of the solution species, such variations being reflected in the mass bound by said thin film on the device surface.

Claim 10

A solid state acoustic plate mode sensor comprising: (a) a piezoelectric substrate of thickness b having opposed parallel surfaces; (b) input interdigital transducer means having two combs, each of said comb having N fingers and a periodicity d, said transducer means affixed to and coplanar with one surface of said substrate, for propagating acoustic plate modes whose frequency spectrum can be approximated by: f.sub.n =(v.sub.o /2π)[(2π/d).sup.2 +(nπ/b).sup.2 ]1/2 where v o is the velocity of said acoustic plate mode in an unbounded piezoelectric solid, n is an integer, and where N>4(b/d) 2 , said acoustic plate modes propagated through the thickness of said substrate and reflected from each of said parallel surfaces; (c) output interdigital transducer means having two combs, each of said comb having N fingers and a periodicity d, said transducer means affixed to and coplanar with one surface of said substrate, for receiving said acoustic plate modes propagated through the thickness of said substrate; (d) means for maintaining a liquid in contact over a predetermined portion of either or both surfaces of said substrate, said liquid creating perturbations in the velocity of said acoustic plate modes internally reflecting from said predetermined portion of said surface; and (e) means for applying a rf signal to said input transducer; (f) means for receiving an rf signal from said output transducer; and (g) means for determining said velocity perturbations of said acoustic plate modes from said rf signals; and (b) means for monitoring and quantifying the concentration of a chemical species in said liquid resulting from sorption or desorption of said species onto or from said surface.

Claim 11

A solid state acoustic plate mode sensor comprising: (a) a piezoelectric substrate of thickness b having opposed parallel surfaces; (b) input interdigital transducer means having two combs, each of said comb having N fingers and a periodicity d, said transducer means affixed to and coplanar with one surface of said substrate, for propagating acoustic plate modes whose frequency spectrum can be approximated by: f.sub.n =(v.sub.o /2π)[(2π/d).sup.2 +(nπ/b).sup.2 ]1/2 where v o is the velocity of said acoustic plate mode in an unbounded piezoelectric solid, n is an integer, and where N>4(b/d) 2 , said acoustic plate modes propagated through the thickness of said substrate and reflected from each of said parallel surfaces; (c) output interdigital transducer means having two combs, each of said comb having N fingers and a periodicity d, said transducer means affixed to and coplanar with one surface of said substrate, for receiving said acoustic plate modes propagated through the thickness of said substrate; (d) means for maintaining a liquid in contact over a predetermined portion of either or both surfaces of said substrate, said liquid creating perturbations in the velocity of said acoustic plate modes internally reflecting from said predetermined portion of said surface; and (e) means for applying a rf signal to said input transducer; (f) means for receiving an rf signal from said output transducer; and (g) means for determining said velocity perturbations of said acoustic plate modes from said rf signals; and (b) means for monitoring and quantifying the concentration of a chemical species in said liquid resulting from sorption or desorption of said species onto or from said surface.

Claim 12

The solid-state acoustic plate mode sensor of claim 9, wherein said means for maintaining a liquid comprises a liquid receiving cell having a liquid containing wall extending from a substrate surface.

Claim 13

The solid-state acoustic plate mode sensor of claim 9, wherein said predetermined portion of said surface is covered by a thin film in contact with said liquid, said liquid causing changes on the surface of said film, said changes causing the perturbations in said acoustic plate modes in said substrate.

Claim 14

The solid-state acoustic plate mode sensor of claim 9, wherein said liquid is an electrolyte and said thin film is an electrode receiving material by electrodeposition; said perturbation in velocity of said acoustic plate modes being a function of variations in mass and mechanical properties of the material received by said electrode.

Claim 15

The solid-state acoustic plate mode sensor of claim 11, wherein said liquid is an electrolyte and said thin film is an electrode surrendering material by electrodissolution, said perturbation in velocity of said acoustic plate modes being a function of variations in mass and mechanical properties of the material surrendered by said electrode.

Claim 16

The solid-state acoustic plate mode sensor of claim 11, wherein said liquid is an electrolyte and said thin film is a metal film changing material by corrosion, said perturbation in velocity of said acoustic plate modes being a function of variations in mass and mechanical properties of the change in amount of material on said thin film.

Claim 17

The solid-state acoustic plate mode sensor of claim 11, wherein said liquid is a solution containing dissolved species and said thin film is a surface-immobilized reagent designed to ligate said solution species, said perturbation in velocity of said acoustic plate modes being a function of variations in concentration and identity of the solution species, such variations being reflected in the mass bound by said thin film on the device surface.