US5116463A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Detecting completion of electroless via fill
Assignee: Microelectronics and Computer Technology Corp
•
Filing: 1991-06-19
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Granted: 1992-05-26
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Expires: 2011-06-19
Abstract
Abstract A method for detecting the completion of electrolessly depositing metal into a via. The method includes providing a non-autocatalytic detection mask with an opening over a via containing an autocatalytic material, electrolessly depositing a conductive metal into the via which fails to plate to the mask, and continuing the deposition until metal in the via contacts the mask, at which time the electrochemical potential of the mask changes and the metal plates to and covers the entire mask. The completion of the electroless via fill can be detected by changes in both the appearance and electrochemical potential of the mask.
Inventors
- 👤 Charles W. C. Lin
- 👤 Randy L. German
- 👤 Ian Y. K. Yee
- 👤 David M. Sigmond
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 17:40
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/40; H05K3/42; H05K3/422; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H10W70/095; H05K2203/00; H05K2203/16; H05K2203/163; H05K3/46; H05K3/4644
Claims Analysis
Total Claims: 42
Claim 1
Independent Claim
246 words
A method for electrolessly fabricating metal pillars in a dielectric and indicating the pillars are fabricated, comprising the following steps: providing a flat first dielectric base; depositing a first electrically conductive metal over the first dielectric; depositing a second dielectric layer over the first metal; depositing over the second dielectric an electrically conductive detection mask containing an opening above a portion of the first metal; etching the second dielectric through the detection mask opening to form a via which exposes the portion of the first metal; electrolessly depositing a second electrically conductive metal into the via through the opening in the detection mask, wherein the first metal is autocatalytic to the electroless deposition, the detection mask is non-autocatalytic to the electroless deposition, and the second metal deposits on the exposed portion of the first metal and partially fills the via but fails to electrically connect the first metal to the detection mask and fails to deposit on the detection mask; continuing to electrolessly deposit the second metal into the via until the second metal fills the via, thereby forming a metal pillar in the via which electrically connects the first metal to the detection mask, at which time the second metal begins to deposit on the detection mask; continuing to electrolessly deposit the second metal until the second metal with a different visual appearance than the detection mask covers the top surface of the detection mask; and then discontinuing the electroless deposition of the second metal.
Claim 2
Independent Claim
246 words
A method for electrolessly fabricating metal pillars in a dielectric and indicating the pillars are fabricated, comprising the following steps: providing a flat first dielectric base; depositing a first electrically conductive metal over the first dielectric; depositing a second dielectric layer over the first metal; depositing over the second dielectric an electrically conductive detection mask containing an opening above a portion of the first metal; etching the second dielectric through the detection mask opening to form a via which exposes the portion of the first metal; electrolessly depositing a second electrically conductive metal into the via through the opening in the detection mask, wherein the first metal is autocatalytic to the electroless deposition, the detection mask is non-autocatalytic to the electroless deposition, and the second metal deposits on the exposed portion of the first metal and partially fills the via but fails to electrically connect the first metal to the detection mask and fails to deposit on the detection mask; continuing to electrolessly deposit the second metal into the via until the second metal fills the via, thereby forming a metal pillar in the via which electrically connects the first metal to the detection mask, at which time the second metal begins to deposit on the detection mask; continuing to electrolessly deposit the second metal until the second metal with a different visual appearance than the detection mask covers the top surface of the detection mask; and then discontinuing the electroless deposition of the second metal.
Claim 3
Dependent Claim
39 words
The method of claim 1, further comprising after discontinuing the electroless deposition of the second metal: removing the second metal which covers the detection mask without removing the detection mask or the second metal in the detection mask opening.
Claim 4
Dependent Claim
107 words
The method of claim 2, further comprising after removing the second metal: depositing a second mask over the top surface of the detection mask, the second mask comprising an opening which exposes the second metal in and the detection mask adjacent to the detection mask opening; depositing a third electrically conductive metal into the second mask opening and on the exposed second metal and detection mask; removing the second mask, wherein the third metal is electrically connected to the first metal; and stripping the detection mask outside the third metal, wherein the unstripped detection mask provides adhesion between the overlaying third metal and the underlaying second dielectric.
Claim 5
Dependent Claim
106 words
The method of claim 1, further comprising after discontinuing the deposition of the second metal: depositing a second mask over the top surface of the second metal covering the detection mask, wherein the second mask covers the detection mask opening and detection mask regions adjacent the detection mask opening but exposes the second metal on the side of the adjacent regions opposite the detection mask opening; etching the exposed second metal; etching the detection mask exposed as a result of etching the second metal; and stripping the second mask, wherein the unetched detection mask provides adhesion between the overlaying second metal and the underlaying second dielectric.
Claim 6
Dependent Claim
13 words
The method of claim 1 wherein the first and second dielectrics are polymers.
Claim 7
Dependent Claim
23 words
The method of claim 1 wherein the first and second dielectrics are polymers selected from the group consisting of polyimide, polyquinoline and benzocyclobutene.
Claim 8
Dependent Claim
26 words
The method of claim 1 wherein first metal comprises copper, or copper coated with a coating selected from the group consisting of nickel and nickel alloys.
Claim 9
Dependent Claim
14 words
The method of claim 1 wherein the first metal is deposited by electroless plating.
Claim 10
Dependent Claim
19 words
The method of claim 1 wherein the first metal is selected from the group consisting of copper and nickel.
Claim 11
Dependent Claim
35 words
The method of claim 1, wherein as the second metal connects the first metal to the detection mask the electrochemical potential of the detection mask changes, and the change is detected by an electronic device.
Claim 12
Dependent Claim
23 words
The method of claim 1 wherein the second metal is selected from the group consisting of copper, chromium, nickel, gold, silver, and palladium.
Claim 13
Dependent Claim
25 words
The method of claim 1 wherein the detection mask is selected from the group consisting of chromium, aluminum, copper, titanium, nickel, tungsten, and combinations thereof.
Claim 14
Dependent Claim
21 words
The method of claim 1 wherein the detection mask contains a layer of chromium or titanium deposited on the second dielectric.
Claim 15
Dependent Claim
13 words
The method of claim 1 wherein the detection mask includes a conductive polymer.
Claim 16
Dependent Claim
11 words
The method of claim 3 wherein the second mask is photoresist.
Claim 17
Dependent Claim
14 words
The method of claim 1 wherein the second dielectric is etched by plasma etching.
Claim 18
Dependent Claim
15 words
The method of claim 1 wherein the second dielectric is etched by a laser beam.
Claim 19
Dependent Claim
15 words
The method of claim 2 wherein the second metal is removed by wet chemical etching.
Claim 20
Dependent Claim
13 words
The method of claim 2 wherein the second metal is removed by polishing.
Claim 21
Dependent Claim
23 words
The method of claim 1 wherein the first metal forms a horizontal conductive line and the second metal forms a vertical pillar thereon.
Claim 22
Dependent Claim
18 words
The method of claim 1 wherein the Second dielectric is etched through the opening in the detection mask.
Claim 23
Dependent Claim
22 words
The method of claim 1 wherein a plurality of uniform vertical metal pillars are formed over a plurality of first metal lines.
Claim 24
Dependent Claim
15 words
The method of claim 22, further comprising at least 300 first metal lines per inch.
Claim 25
Independent Claim
141 words
A method for visually indicating the completion of electrolessly plating metal into a via in a dielectric, comprising: providing a dielectric; depositing a non-autocatalytic detection mask with an opening on a surface of the dielectric; the dielectric; providing an autocatalytic material in the via; electrolessly plating an electrically conductive metal through the detection mask opening into the via, wherein the metal begins to fill the via but fails to plate on the detection mask until metal filled in the via is connected to the detection mask; and continuing to electrolessly plate the metal after the metal filled in the via is connected to the detection mask so that the metal plates to and covers the entire top surface of the detection mask, thereby providing a visual indication that the via is filled with metal and the electroless plating can be discontinued.
Claim 26
Independent Claim
141 words
A method for visually indicating the completion of electrolessly plating metal into a via in a dielectric, comprising: providing a dielectric; depositing a non-autocatalytic detection mask with an opening on a surface of the dielectric; the dielectric; providing an autocatalytic material in the via; electrolessly plating an electrically conductive metal through the detection mask opening into the via, wherein the metal begins to fill the via but fails to plate on the detection mask until metal filled in the via is connected to the detection mask; and continuing to electrolessly plate the metal after the metal filled in the via is connected to the detection mask so that the metal plates to and covers the entire top surface of the detection mask, thereby providing a visual indication that the via is filled with metal and the electroless plating can be discontinued.
Claim 27
Independent Claim
224 words
A method for providing visual detection of the completion of electrolessly plating a metal pillar into a via in a dielectric, comprising the following steps in the sequence set forth: providing a dielectric with a top surface; depositing a non-autocatalytic detection mask layer on the dielectric top surface; forming a plurality of openings in the detection mask, wherein each opening exposes a separate portion of the dielectric top surface; etching the exposed portions of the dielectric to form a plurality of vertical vias in the dielectric; providing an autocatalytic material in each of the vias; electrolessly plating an electrically conductive metal through the detection mask openings into the vias, wherein the metal partially fills the vias but fails to plate to or cover the detection mask; continuing to electrolessly plate the metal through the detection mask openings into the vias until the metal fills a via to form a metal pillar which contacts the detection mask, thereby allowing the metal to begin to plate to the detection mask; continuing to electrolessly plate the metal until the metal fills all the vias and all the detection mask openings and covers the entire top surface of the detection mask with a uniform layer, thereby allowing visual detection that uniform metal pillars have been formed; and discontinuing the electroless plating as a result of the visual detection.
Claim 28
Independent Claim
224 words
A method for providing visual detection of the completion of electrolessly plating a metal pillar into a via in a dielectric, comprising the following steps in the sequence set forth: providing a dielectric with a top surface; depositing a non-autocatalytic detection mask layer on the dielectric top surface; forming a plurality of openings in the detection mask, wherein each opening exposes a separate portion of the dielectric top surface; etching the exposed portions of the dielectric to form a plurality of vertical vias in the dielectric; providing an autocatalytic material in each of the vias; electrolessly plating an electrically conductive metal through the detection mask openings into the vias, wherein the metal partially fills the vias but fails to plate to or cover the detection mask; continuing to electrolessly plate the metal through the detection mask openings into the vias until the metal fills a via to form a metal pillar which contacts the detection mask, thereby allowing the metal to begin to plate to the detection mask; continuing to electrolessly plate the metal until the metal fills all the vias and all the detection mask openings and covers the entire top surface of the detection mask with a uniform layer, thereby allowing visual detection that uniform metal pillars have been formed; and discontinuing the electroless plating as a result of the visual detection.
Claim 29
Dependent Claim
24 words
The method of claim 25 wherein the metal is selected from the group consisting of copper, chromium, nickel, silver, gold, palladium and combinations thereof.
Claim 30
Dependent Claim
19 words
The method of claim 25 wherein the detection mask contains at least one of chromium or a conductive polymer.
Claim 31
Dependent Claim
20 words
The method of claim 25 wherein the dielectric is a non-conductive polymer and the detection mask is a conductive polymer.
Claim 32
Dependent Claim
31 words
The method of claim 25, wherein prior to electrolessly plating the metal, a second electrically conductive base metal is exposed at the ends of the vias opposite the dielectric top surface.
Claim 33
Independent Claim
130 words
A method for indicating the completion of electrolessly depositing metal into a via, comprising: providing a via in a dielectric; providing an autocatalytic material in the via; providing over the dielectric an electrically conductive non-autocatayltic detection mask with an opening above the via; electrolessly depositing an electrically conductive metal into the via wherein the metal begins to deposit on the autocatalytic material and fill the via but fails to deposit on the detection mask; and continuing the electroless deposition until the metal filled in the via electrically connects the autocatalytic material to the detection mask, at which time the metal begins to deposit a uniform layer over the entire detection mask, thereby providing a visual indication that the via is filled with metal and the electroless deposition can be discontinued.
Claim 34
Independent Claim
130 words
A method for indicating the completion of electrolessly depositing metal into a via, comprising: providing a via in a dielectric; providing an autocatalytic material in the via; providing over the dielectric an electrically conductive non-autocatayltic detection mask with an opening above the via; electrolessly depositing an electrically conductive metal into the via wherein the metal begins to deposit on the autocatalytic material and fill the via but fails to deposit on the detection mask; and continuing the electroless deposition until the metal filled in the via electrically connects the autocatalytic material to the detection mask, at which time the metal begins to deposit a uniform layer over the entire detection mask, thereby providing a visual indication that the via is filled with metal and the electroless deposition can be discontinued.
Claim 35
Dependent Claim
21 words
The method of claim 30, wherein the detection mask is metallic, the dielectric is a polymer, and the via is vertical.
Claim 36
Dependent Claim
20 words
The method of claim 31, wherein the metal comprises copper or nickel, and the detection mask comprises chromium or titanium.
Claim 37
Independent Claim
146 words
A method for electronically detecting the completion of electrolessly depositing metal into a via, comprising: providing a via in a dielectric; providing an autocatalytic material in the via; providing over the dielectric an electrically conductive non-autocatayltic detection mask with an opening above the via; providing an electronic device which is responsive to a change in the electrochemical potential of the detection mask; electrolessly depositing an electrically conductive metal into the via wherein the metal begins to deposit on the autocatalytic material and fill the via but fails to deposit on the detection mask; continuing the electroless deposition until the metal filled in the via electrically connects the autocatalytic material to the detection mask thereby changing the electrochemical potential of the detection mask; and detecting the change in electrochemical potential by the electronic device, whereby the device sends an electrical signal to indicate via fill is completed.
Claim 38
Independent Claim
146 words
A method for electronically detecting the completion of electrolessly depositing metal into a via, comprising: providing a via in a dielectric; providing an autocatalytic material in the via; providing over the dielectric an electrically conductive non-autocatayltic detection mask with an opening above the via; providing an electronic device which is responsive to a change in the electrochemical potential of the detection mask; electrolessly depositing an electrically conductive metal into the via wherein the metal begins to deposit on the autocatalytic material and fill the via but fails to deposit on the detection mask; continuing the electroless deposition until the metal filled in the via electrically connects the autocatalytic material to the detection mask thereby changing the electrochemical potential of the detection mask; and detecting the change in electrochemical potential by the electronic device, whereby the device sends an electrical signal to indicate via fill is completed.
Claim 39
Dependent Claim
17 words
The method of claim 33, wherein the electrochemical potential of the detection mask changes approximately 0.2 volts.
Claim 40
Dependent Claim
22 words
The method of claim 34, wherein the electrochemical potential of the detection mask changes from approximately 0 volts to approximately 0.2 volts.
Claim 41
Dependent Claim
22 words
The method of claim 33, wherein the detection mask is a metallic, the dielectric is a polymer, and the via is vertical.
Claim 42
Dependent Claim
20 words
The method of claim 36, wherein the metal comprises copper or nickel, and the detection mask comprises chromium or titanium.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-05-26 | 1995-11-25 | 1996-05-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-05-26 | 1999-11-25 | 2000-05-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-05-26 | 2003-11-25 | 2004-05-26 | $7700.00 | Window Closed / Lapsed |