Apparatus for processing fluid and method of driving the same

Claim 1

An apparatus for processing fluid, comprising: a housing; a fluid processor accommodated in said housing and having a fluid in-flow port and a fluid out-flow port; fluid in- and out-flow spaces respectively provided for said respective fluid in- and out-flow ports and having respective fluid ports; a pair of wall means defining said respective fluid in- and out-flow spaces; a flexible member provided for deformation on at least one of said wall means and capable of being reciprocally deformed to cause processing fluid pressure variations; an operation chamber provided in correspondence to said flexible member; fluid pressure supply means for supplying fluid pressure to said operation chamber for causing reciprocal deformation operation of said flexible member; and a pair of port on-off means for communicating and blocking said fluid ports; said pair of port on-off means including first on-off means for communicating and blocking said fluid in-flow space fluid port and second on-off means for communicating and blocking said fluid out-flow space fluid port; and said fluid pressure supply means including a first pressure source for providing a fluid pressure to said operation chamber, a second pressure source for providing a negative or atmospheric fluid pressure to said operation chamber, a first pressure supply flow path for communicating said first pressure source and said operation chamber with each other, a second pressure supply flow path for communicating said second pressure source and said operation chamber with each other, and switching means for switching said first and second pressure supply flow paths for communicating and blocking.

Claim 2

An apparatus for processing fluid, comprising: a housing; a fluid processor accommodated in said housing and having a fluid in-flow port and a fluid out-flow port; fluid in- and out-flow spaces respectively provided for said respective fluid in- and out-flow ports and having respective fluid ports; a pair of wall means defining said respective fluid in- and out-flow spaces; a flexible member provided for deformation on at least one of said wall means and capable of being reciprocally deformed to cause processing fluid pressure variations; an operation chamber provided in correspondence to said flexible member; fluid pressure supply means for supplying fluid pressure to said operation chamber for causing reciprocal deformation operation of said flexible member; and a pair of port on-off means for communicating and blocking said fluid ports; said pair of port on-off means including first on-off means for communicating and blocking said fluid in-flow space fluid port and second on-off means for communicating and blocking said fluid out-flow space fluid port; and said fluid pressure supply means including a first pressure source for providing a fluid pressure to said operation chamber, a second pressure source for providing a negative or atmospheric fluid pressure to said operation chamber, a first pressure supply flow path for communicating said first pressure source and said operation chamber with each other, a second pressure supply flow path for communicating said second pressure source and said operation chamber with each other, and switching means for switching said first and second pressure supply flow paths for communicating and blocking.

Claim 11

An apparatus for processing fluid comprising: a housing; a fluid processor accommodated in said housing and having a fluid in-flow port and a fluid out-flow port; fluid in- and out-flow spaces provided for said respective fluid in- and out-flow ports and having respective fluid ports; a pair of wall means defining said respective fluid in- and out-flow spaces; a flexible member provided for deformation on said wall means defining said fluid in-flow space and capable of being reciprocally operated to generate pressure variations in processing fluid; an operation chamber provided in correspondence to said flexible member; fluid pressure supply flow means for providing a fluid pressure to said operation chamber for causing reciprocal operation of said flexible member; and port on-off means for communicating and blocking said respective fluid ports and directing flow of fluid from said fluid in-flow space to said fluid out-flow space; said port on-off means including first on-off means for communicating and blocking said fluid in-flow space fluid port and a second on-off means for communicating and blocking said fluid out-flow space fluid port; said fluid pressure supply means including a first pressure source for providing a positive fluid pressure to said operation chamber, a second pressure source for providing a negative or atmospheric fluid pressure to said operation chamber, a first pressure supply flow path for communicating said first pressure source and said operation chamber with each other, a second pressure supply flow path for communicating said second pressure source and said operation chamber with each other, first communicating/blocking means for communicating and blocking said first pressure supply flow path and second communicating/blocking means for communicating and blocking said second pressure supply flow path; said apparatus further comprising control means for driving said port on-off means and said fluid pressure supply means by sequentially and repeatedly executing: a first step of rendering said first on-off means to be in a closed state; a second step of blocking said second communicating/blocking means after said first step; a third step of rendering said second on-off means to be in an open state after said second step; a fourth step of communicating said first communicating/blocking means after said third step; a fifth step for substantially simultaneously rendering said second on-off means to be in a closed state, blocking said first communicating/blocking means and communicating said second communicating means after said fourth step; a sixth step of rendering the first on-off means to be in an open state after the fifth step.

Claim 12

An apparatus for processing fluid comprising: a housing; a fluid processor accommodated in said housing and having a fluid in-flow port and a fluid out-flow port; fluid in- and out-flow spaces provided for said respective fluid in- and out-flow ports and having respective fluid ports; a pair of wall means defining said respective fluid in- and out-flow spaces; a flexible member provided for deformation on said wall means defining said fluid in-flow space and capable of being reciprocally operated to generate pressure variations in processing fluid; an operation chamber provided in correspondence to said flexible member; fluid pressure supply flow means for providing a fluid pressure to said operation chamber for causing reciprocal operation of said flexible member; and port on-off means for communicating and blocking said respective fluid ports and directing flow of fluid from said fluid in-flow space to said fluid out-flow space; said port on-off means including first on-off means for communicating and blocking said fluid in-flow space fluid port and a second on-off means for communicating and blocking said fluid out-flow space fluid port; said fluid pressure supply means including a first pressure source for providing a positive fluid pressure to said operation chamber, a second pressure source for providing a negative or atmospheric fluid pressure to said operation chamber, a first pressure supply flow path for communicating said first pressure source and said operation chamber with each other, a second pressure supply flow path for communicating said second pressure source and said operation chamber with each other, first communicating/blocking means for communicating and blocking said first pressure supply flow path and second communicating/blocking means for communicating and blocking said second pressure supply flow path; said apparatus further comprising control means for driving said port on-off means and said fluid pressure supply means by sequentially and repeatedly executing: a first step of rendering said first on-off means to be in a closed state; a second step of blocking said second communicating/blocking means after said first step; a third step of rendering said second on-off means to be in an open state after said second step; a fourth step of communicating said first communicating/blocking means after said third step; a fifth step for substantially simultaneously rendering said second on-off means to be in a closed state, blocking said first communicating/blocking means and communicating said second communicating means after said fourth step; a sixth step of rendering the first on-off means to be in an open state after the fifth step.

Claim 13

A method of driving an apparatus for processing fluid; said apparatus for processing fluid comprising; a housing; a fluid processor accommodated in said housing and having a fluid in-flow port and a fluid out-flow port; fluid in- and out-flow spaces respectively provided for said respective fluid in- and out-flow ports and having respective fluid ports; a flexible member provided for deformation on at least one of said wall means and capable of being reciprocally deformed to cause fluid pressure variations; an operation chamber provided in correspondence to said flexible member; fluid pressure supply means for supplying fluid pressure to said operation chamber for causing reciprocal deformation operation of said flexible member; and a pair of port on-off means for reverse flow prevention, for communicating and blocking said fluid ports and directing the flow of fluid from said fluid in-flow space to said fluid out-flow space; said port on-off means including first on-off means for communicating and blocking said fluid in-flow space fluid port and second on-off means for communicating and blocking said fluid out-flow space fluid port; said fluid pressure supply means including a first pressure source for providing a positive fluid pressure to said operation chamber, a second pressure source for providing a negative or atmospheric fluid pressure to said operation chamber, a first pressure supply flow path for communicating said first pressure source and said operation chamber with each other, a second pressure supply flow path for communicating said pressure source and said operation chamber with each other, and switching means for switching said first and second pressure supply flow paths for communicating and blocking; said port on-off means and fluid pressure supply means being driven by sequentially and repeatedly executing: a first step of rendering said first on-off means to be in a closed state; a second step executed subsequent or substantially simultaneously to said first step to render said second on-off means to be in an open state and switch said fluid in-flow space side switching means to said first pressure supply flow means; a third step of rendering said second on-off means to be in a closed state; a fourth step executed subsequent or substantially simultaneously to said third step to render said first on-off means to be in an open state; and a fifth step executed subsequent or substantially simultaneously to said fourth step to switch said switching means to said second pressure supply flow path.

Claim 14

A method of driving an apparatus for processing fluid; said apparatus for processing fluid comprising; a housing; a fluid processor accommodated in said housing and having a fluid in-flow port and a fluid out-flow port; fluid in- and out-flow spaces respectively provided for said respective fluid in- and out-flow ports and having respective fluid ports; a flexible member provided for deformation on at least one of said wall means and capable of being reciprocally deformed to cause fluid pressure variations; an operation chamber provided in correspondence to said flexible member; fluid pressure supply means for supplying fluid pressure to said operation chamber for causing reciprocal deformation operation of said flexible member; and a pair of port on-off means for reverse flow prevention, for communicating and blocking said fluid ports and directing the flow of fluid from said fluid in-flow space to said fluid out-flow space; said port on-off means including first on-off means for communicating and blocking said fluid in-flow space fluid port and second on-off means for communicating and blocking said fluid out-flow space fluid port; said fluid pressure supply means including a first pressure source for providing a positive fluid pressure to said operation chamber, a second pressure source for providing a negative or atmospheric fluid pressure to said operation chamber, a first pressure supply flow path for communicating said first pressure source and said operation chamber with each other, a second pressure supply flow path for communicating said pressure source and said operation chamber with each other, and switching means for switching said first and second pressure supply flow paths for communicating and blocking; said port on-off means and fluid pressure supply means being driven by sequentially and repeatedly executing: a first step of rendering said first on-off means to be in a closed state; a second step executed subsequent or substantially simultaneously to said first step to render said second on-off means to be in an open state and switch said fluid in-flow space side switching means to said first pressure supply flow means; a third step of rendering said second on-off means to be in a closed state; a fourth step executed subsequent or substantially simultaneously to said third step to render said first on-off means to be in an open state; and a fifth step executed subsequent or substantially simultaneously to said fourth step to switch said switching means to said second pressure supply flow path.

Claim 16

A method of driving an apparatus for processing fluid; said apparatus for processing fluid comprising: a housing; a fluid processor accommodated in said housing and having a fluid in-flow port and a fluid out-flow port; fluid in- and out-flow spaces respectively provided for said respective fluid in- and out-flow ports and having respective fluid ports a pair of wall means defining said respective fluid in- and out-flow spaces; a flexible member provided for deformation on at least one of said wall means and capable of being reciprocally deformed to cause fluid pressure variations; an operation chamber provided in correspondence to said flexible member; fluid pressure supply means for supplying fluid pressure to said operation chamber for causing reciprocal deformation operation of said flexible member; and a pair of port on-off means for reverse flow prevention, for communicating and blocking said fluid ports and directing the flow of fluid from said fluid in-flow space to said fluid out-flow space; said port on-off means including first on-off means for communicating and blocking said fluid in-flow space fluid port and second on-off means for communicating and blocking said fluid out-flow space fluid port; said fluid pressure supply means including a first pressure source for providing a positive fluid pressure to said operation member, a second pressure source for providing a negative or atmospheric fluid pressure to said operation chamber, a first pressure supply flow path for communicating said first pressure source and said operation chamber with each other, a second pressure supply flow path for communicating said second pressure source and said operation chamber with each other, and switching means for switching said first and second pressure supply flow paths for communicating and blocking; said switching means including first switching means on the side of said fluid in-flow space and second switching means on the side of said fluid out-flow space; said port on-off means and fluid pressure supply means being driven by sequentially and repeatedly executing: a first step of rendering said first on-off means to be in a closed state; a second step of switching said second switching means to said second pressure supply flow path and switching said first switching means to said first pressure supply flow path; a third step of rendering said second on-off means to be in an open state and switching said second switching means to said first pressure supply flow path; a fourth step of rendering said second on-off means to be in a closed state; a fifth step of rendering said first on-off means to be in an open state; and a sixth step of switching said first switching means to said second pressure supply flow path.

Claim 17

A method of driving an apparatus for processing fluid; said apparatus for processing fluid comprising: a housing; a fluid processor accommodated in said housing and having a fluid in-flow port and a fluid out-flow port; fluid in- and out-flow spaces respectively provided for said respective fluid in- and out-flow ports and having respective fluid ports a pair of wall means defining said respective fluid in- and out-flow spaces; a flexible member provided for deformation on at least one of said wall means and capable of being reciprocally deformed to cause fluid pressure variations; an operation chamber provided in correspondence to said flexible member; fluid pressure supply means for supplying fluid pressure to said operation chamber for causing reciprocal deformation operation of said flexible member; and a pair of port on-off means for reverse flow prevention, for communicating and blocking said fluid ports and directing the flow of fluid from said fluid in-flow space to said fluid out-flow space; said port on-off means including first on-off means for communicating and blocking said fluid in-flow space fluid port and second on-off means for communicating and blocking said fluid out-flow space fluid port; said fluid pressure supply means including a first pressure source for providing a positive fluid pressure to said operation member, a second pressure source for providing a negative or atmospheric fluid pressure to said operation chamber, a first pressure supply flow path for communicating said first pressure source and said operation chamber with each other, a second pressure supply flow path for communicating said second pressure source and said operation chamber with each other, and switching means for switching said first and second pressure supply flow paths for communicating and blocking; said switching means including first switching means on the side of said fluid in-flow space and second switching means on the side of said fluid out-flow space; said port on-off means and fluid pressure supply means being driven by sequentially and repeatedly executing: a first step of rendering said first on-off means to be in a closed state; a second step of switching said second switching means to said second pressure supply flow path and switching said first switching means to said first pressure supply flow path; a third step of rendering said second on-off means to be in an open state and switching said second switching means to said first pressure supply flow path; a fourth step of rendering said second on-off means to be in a closed state; a fifth step of rendering said first on-off means to be in an open state; and a sixth step of switching said first switching means to said second pressure supply flow path.

Claim 19

A method of driving an apparatus for processing fluid; said apparatus for processing fluid comprising: a housing; a fluid processor accommodated in said housing and having a fluid in-flow port and a fluid out-flow port; fluid in- and out-flow spaces respectively provided for said respective fluid in- and out-flow ports and having respective fluid ports; a pair of wall means defining said respective fluid in- and out-flow spaces; a flexible member provided for deformation on at least one of said wall means and capable of being reciprocally deformed to cause fluid pressure variations; an operation chamber provided in correspondence to said flexible member; fluid pressure supply means for supplying fluid pressure to said operation chamber for causing reciprocal deformation operation of said flexible member; and a pair of port on-off means for reverse flow prevention, for communicating and blocking said fluid ports and directing the flow of fluid from said fluid in-flow space to said fluid out-flow space; said port on-off means including first on-off means for communicating and blocking said fluid in-flow space fluid port and second on-off means for communicating and blocking said fluid out-flow space fluid port; said fluid pressure supply means including a first pressure source for providing a positive fluid pressure to said operation chamber, a second pressure source for providing a negative or atmospheric fluid pressure to said operation chamber, a first pressure supply flow path for communicating said first pressure source and said operation chamber with each other, a second pressure supply flow path for communicating said second pressure source and said operation chamber with each other, and switching means for switching said first and second pressure supply flow paths for communicating and blocking; said switching means including first switching means on the side of said fluid in-flow space and second switching means on the side of said fluid out-flow space; said port on-off means and said fluid pressure supply means being driven by sequentially and repeatedly executing: a first step of rendering said first on-off means to be in a closed state; a second step of rendering said second on-off means to be in an open state and switching said first switching means to said first pressure supply flow path and switching said second switching means to said first pressure supply flow path; a third step of rendering said second on-off means to be in a closed state; a fourth step of rendering said first on-off means to be in an open state; a fifth step of rendering said first switching means to said second pressure supply flow path; and a sixth step of switching said second switching means to said second pressure supply flow path.

Claim 20

A method of driving an apparatus for processing fluid; said apparatus for processing fluid comprising: a housing; a fluid processor accommodated in said housing and having a fluid in-flow port and a fluid out-flow port; fluid in- and out-flow spaces respectively provided for said respective fluid in- and out-flow ports and having respective fluid ports; a pair of wall means defining said respective fluid in- and out-flow spaces; a flexible member provided for deformation on at least one of said wall means and capable of being reciprocally deformed to cause fluid pressure variations; an operation chamber provided in correspondence to said flexible member; fluid pressure supply means for supplying fluid pressure to said operation chamber for causing reciprocal deformation operation of said flexible member; and a pair of port on-off means for reverse flow prevention, for communicating and blocking said fluid ports and directing the flow of fluid from said fluid in-flow space to said fluid out-flow space; said port on-off means including first on-off means for communicating and blocking said fluid in-flow space fluid port and second on-off means for communicating and blocking said fluid out-flow space fluid port; said fluid pressure supply means including a first pressure source for providing a positive fluid pressure to said operation chamber, a second pressure source for providing a negative or atmospheric fluid pressure to said operation chamber, a first pressure supply flow path for communicating said first pressure source and said operation chamber with each other, a second pressure supply flow path for communicating said second pressure source and said operation chamber with each other, and switching means for switching said first and second pressure supply flow paths for communicating and blocking; said switching means including first switching means on the side of said fluid in-flow space and second switching means on the side of said fluid out-flow space; said port on-off means and said fluid pressure supply means being driven by sequentially and repeatedly executing: a first step of rendering said first on-off means to be in a closed state; a second step of rendering said second on-off means to be in an open state and switching said first switching means to said first pressure supply flow path and switching said second switching means to said first pressure supply flow path; a third step of rendering said second on-off means to be in a closed state; a fourth step of rendering said first on-off means to be in an open state; a fifth step of rendering said first switching means to said second pressure supply flow path; and a sixth step of switching said second switching means to said second pressure supply flow path.

Claim 22

A method of driving an apparatus for processing fluid, said apparatus for processing fluid comprising: a housing; a fluid processor accommodated in said housing and having a fluid in-flow port and a fluid out-flow port; fluid in- and out-flow spaces respectively provided for said respective fluid in- and out-flow ports and having respective fluid ports; a pair of wall means defining said respective fluid in- and out-flow spaces; a flexible member provided for deformation on said wall means defining said fluid in-flow space and capable of being preciprocally deformed to cause fluid pressure variations; an operation chamber provided in correspondence to said flexible member; fluid pressure supply means for supplying fluid pressure to said operation chamber for causing reciprocal deformation operation of said flexible member; and a pair of port on-off means for reverse flow prevention, for communicating and blocking said fluid ports and directing the flow of fluid from said fluid in-flow space to said fluid out-flow space; said port on-off means including first on-off means for communicating and blocking said fluid in-flow space fluid port and second on-off means for communicating and blocking said fluid out-flow space fluid port; said fluid pressure supply means including a first pressure source for providing a positive fluid pressure to said operation chamber, a second pressure source for providing a negative or atmospheric fluid pressure to said operation chamber, a first pressure supply flow path for communicating said first pressure source and said operation chamber with each other, a second pressure supply flow path for communicating said second pressure source and said operation chamber with each other, first communicating/blocking means for communicating and blocking said first pressure supply flow path and second communicating/blocking means for communicating and blocking said second pressure supply flow path; said port on-off means and said fluid pressure supply means being driven by sequentially and repeatedly executing: a first step of rendering said first on-off means to be in a closed state; a second step of blocking said second communicating/blocking means after said first step; a third step of rendering said second on-off means to be in an open state after said second step; a fourth step of communicating said first communicating/blocking means after said third step; a fifth step of substantially simultaneously rendering said second on-off means to be in a closed state, blocking said first communicating/blocking means and communicating said second communicating/blocking means after said fourth step; and a sixth step of rendering said first on-off means to be in an open state after said fifth step.

Claim 23

A method of driving an apparatus for processing fluid, said apparatus for processing fluid comprising: a housing; a fluid processor accommodated in said housing and having a fluid in-flow port and a fluid out-flow port; fluid in- and out-flow spaces respectively provided for said respective fluid in- and out-flow ports and having respective fluid ports; a pair of wall means defining said respective fluid in- and out-flow spaces; a flexible member provided for deformation on said wall means defining said fluid in-flow space and capable of being preciprocally deformed to cause fluid pressure variations; an operation chamber provided in correspondence to said flexible member; fluid pressure supply means for supplying fluid pressure to said operation chamber for causing reciprocal deformation operation of said flexible member; and a pair of port on-off means for reverse flow prevention, for communicating and blocking said fluid ports and directing the flow of fluid from said fluid in-flow space to said fluid out-flow space; said port on-off means including first on-off means for communicating and blocking said fluid in-flow space fluid port and second on-off means for communicating and blocking said fluid out-flow space fluid port; said fluid pressure supply means including a first pressure source for providing a positive fluid pressure to said operation chamber, a second pressure source for providing a negative or atmospheric fluid pressure to said operation chamber, a first pressure supply flow path for communicating said first pressure source and said operation chamber with each other, a second pressure supply flow path for communicating said second pressure source and said operation chamber with each other, first communicating/blocking means for communicating and blocking said first pressure supply flow path and second communicating/blocking means for communicating and blocking said second pressure supply flow path; said port on-off means and said fluid pressure supply means being driven by sequentially and repeatedly executing: a first step of rendering said first on-off means to be in a closed state; a second step of blocking said second communicating/blocking means after said first step; a third step of rendering said second on-off means to be in an open state after said second step; a fourth step of communicating said first communicating/blocking means after said third step; a fifth step of substantially simultaneously rendering said second on-off means to be in a closed state, blocking said first communicating/blocking means and communicating said second communicating/blocking means after said fourth step; and a sixth step of rendering said first on-off means to be in an open state after said fifth step.

Claim 24

An apparatus for processing fluid, comprising: a housing; a fluid processor accommodated in said housing and having a fluid in-flow port and a fluid out-flow port; fluid in- and out-flow spaces respectively provided for said respective fluid in- and out-flow ports and having respective fluid ports; a pair of wall means defining said respective fluid in- and out-flow spaces; a flexible member provided for deformation on at least one of said wall means and capable of being reciprocally deformed to cause processing fluid pressure variations; an operation chamber provided in correspondence to said flexible member; fluid pressure supply means for supplying fluid pressure to said operation chamber for causing reciprocal deformation operation of said flexible member; and a pair of port on-off means for communicating and blocking said fluid ports; said pair of port on-off means including first on-off means for communicating and blocking said fluid in-flow space fluid port and second on-off means for communicating and blocking said fluid out-flow space fluid port; and said fluid pressure supply means including a first pressure source for applying a pressure rise to said operation chamber, a second pressure source for applying a pressure fall to said operation chamber, a first pressure supply flow path for communicating said first pressure source and said operation chamber with each other, a second pressure supply flow path for communicating said second pressure source and said operation chamber with each other, and switching means for switching said first and second pressure supply flow paths for communicating and blocking.

Claim 25

An apparatus for processing fluid, comprising: a housing; a fluid processor accommodated in said housing and having a fluid in-flow port and a fluid out-flow port; fluid in- and out-flow spaces respectively provided for said respective fluid in- and out-flow ports and having respective fluid ports; a pair of wall means defining said respective fluid in- and out-flow spaces; a flexible member provided for deformation on at least one of said wall means and capable of being reciprocally deformed to cause processing fluid pressure variations; an operation chamber provided in correspondence to said flexible member; fluid pressure supply means for supplying fluid pressure to said operation chamber for causing reciprocal deformation operation of said flexible member; and a pair of port on-off means for communicating and blocking said fluid ports; said pair of port on-off means including first on-off means for communicating and blocking said fluid in-flow space fluid port and second on-off means for communicating and blocking said fluid out-flow space fluid port; and said fluid pressure supply means including a first pressure source for applying a pressure rise to said operation chamber, a second pressure source for applying a pressure fall to said operation chamber, a first pressure supply flow path for communicating said first pressure source and said operation chamber with each other, a second pressure supply flow path for communicating said second pressure source and said operation chamber with each other, and switching means for switching said first and second pressure supply flow paths for communicating and blocking.