Patent US5114683A successfully refreshed from Google Patents.
US5114683A
Expired / Lapsed
US
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Thermal decomposition trap
Assignee: LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
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Filing: 1990-02-09
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Granted: 1992-05-19
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Expires: 2010-02-09
Abstract
Abstract A thermal decomposition trap includes a trap main body (21) having an inlet port (26) for supplying a gas to be thermally decomposed and an outlet port (27) for exhausting the gas, and a heater (23, 25) for heating the gas supplied in the trap main body (21). An oil trap (28) containing an oil and having an oil discharge port (29) and a valve (V3) connected thereto is formed on a bottom portion of the trap main body (21). Particles generated by thermal decomposition of the gas are precipitated in the oil in the oil trap (28). The oil containing the particles is easily discharged in a short time period by opening the valve (V3) mounted on the oil discharge port (29). An oil-free auxiliary pump is arranged between a reaction chamber and the thermal decomposition trap, whereby a mass flow rate of exhaust from rate in the reaction chamber is not reduced regardless of the arrangement of the thermal decomposition trap.
Inventors
- 👤 Ikuo Hirase
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 16:45
CPC Classifications
B; B01; B01D; B01D53/00; B01D53/34; B01D53/46; B01D53/68; B01D53/72
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
90 words
A thermal decomposition trap comprising a trap main body having an inlet port for supplying a gas to be thermally decomposed and an outlet port for exhausting the gas, and heating means for heating the gas supplied in said trap main body, wherein an oil trap containing an oil and having an oil discharge port and a valve connected thereto is formed on a bottom portion of said trap main body; and wherein a cooling means is located around said oil trap to prevent evaporation and decomposition of the oil.
Claim 2
Dependent Claim
90 words
A thermal decomposition trap comprising a trap main body having an inlet port for supplying a gas to be thermally decomposed and an outlet port for exhausting the gas, and heating means for heating the gas supplied in said trap main body, wherein an oil trap containing an oil and having an oil discharge port and a valve connected thereto is formed on a bottom portion of said trap main body; and wherein a cooling means is located around said oil trap to prevent evaporation and decomposition of the oil.
Claim 3
Dependent Claim
23 words
A trap according to claim 1, wherein said heating means are located at a central portion of, and around, said trap main body.
Claim 4
Dependent Claim
17 words
A trap according to claim 1, wherein metal mesh plates are located in said trap main body.
Claim 5
Dependent Claim
18 words
A trap according to claim 1, wherein said thermal decomposition trap has an inert gas supply inlet port.
Claim 6
Dependent Claim
145 words
A thermal decomposition apparatus comprising, in serial connection, a reaction chamber, a thermal decomposition trap for thermally decomposing a gas from said reaction chamber, and an oil-free auxiliary pump and a main pump for exhausting said reaction chamber; wherein said thermal decomposition trap comprises a trap main body having an inlet port for supplying a gas to be thermally decomposed and an outlet port for exhausting the gas, heating means for heating the gas supplied in said trap main body, and an oil trap, mounted on a bottom portion of said trap main body containing an oil, and having an oil discharge port and a valve connected thereto; said auxiliary pump is connected to an outlet port of said reaction chamber and said inlet port of said thermal decomposition trap; and said main pump is connected to said outlet portion of said thermal decomposition trap.
Claim 7
Dependent Claim
145 words
A thermal decomposition apparatus comprising, in serial connection, a reaction chamber, a thermal decomposition trap for thermally decomposing a gas from said reaction chamber, and an oil-free auxiliary pump and a main pump for exhausting said reaction chamber; wherein said thermal decomposition trap comprises a trap main body having an inlet port for supplying a gas to be thermally decomposed and an outlet port for exhausting the gas, heating means for heating the gas supplied in said trap main body, and an oil trap, mounted on a bottom portion of said trap main body containing an oil, and having an oil discharge port and a valve connected thereto; said auxiliary pump is connected to an outlet port of said reaction chamber and said inlet port of said thermal decomposition trap; and said main pump is connected to said outlet portion of said thermal decomposition trap.
Claim 8
Dependent Claim
14 words
An apparatus according to claim 5, wherein said main pump comprises a rotary pump.
Claim 9
Dependent Claim
28 words
An apparatus according to claim 5, wherein said auxiliary pump comprises a pump selected from the group consisting of a mechanical booster pump and a turbo molecular pump.
Claim 10
Dependent Claim
21 words
An apparatus according to claim 5, wherein an oil trap is located between said thermal decomposition trap and said main pump.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-05-19 | 1995-11-18 | 1996-05-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-05-19 | 1999-11-18 | 2000-05-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-05-19 | 2003-11-18 | 2004-05-19 | $7700.00 | Window Closed / Lapsed |