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US5108779A Expired / Lapsed US ⏱️ 0.0 years remaining

Diamond crystal growth process

Assignee: General Electric Co
•
Filing: 1990-12-24
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Granted: 1992-04-28
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Expires: 2010-12-24
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Abstract

Abstract The steady state operating parameters of a low pressure chemical vapor deposition process for making diamond, i.e., nucleation-growth and graphite removal, are applied as controlled sequential steps to favor nucleation and growth.

Inventors

  • 👤 Steven M. Gasworth

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 10:36
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/14; C30B29/00; C30B29/02; C30B29/04

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 80 words
A method for making diamond by a chemical vapor deposition process, comprising: (a) exposing a movable substrate to a first chamber of an apparatus, said first chamber containing a stream of one or more gases containing carbon under conditions effective for diamond deposition, and (b) moving said substrate to a second chamber of said apparatus, said second chamber containing a stream of one or more gases substantially free of carbon under conditions effective for removing non-diamond carbon from said substrate.
Claim 2
Independent Claim 80 words
A method for making diamond by a chemical vapor deposition process, comprising: (a) exposing a movable substrate to a first chamber of an apparatus, said first chamber containing a stream of one or more gases containing carbon under conditions effective for diamond deposition, and (b) moving said substrate to a second chamber of said apparatus, said second chamber containing a stream of one or more gases substantially free of carbon under conditions effective for removing non-diamond carbon from said substrate.
Claim 3
Dependent Claim 44 words
The method of claim 1 wherein the conditions of said first chamber which is effective for diamond deposition include a filament having a temperature between about 2000 deg. C and about 2500 deg. C and a hydrocarbon-rich gas mixture comprising hydrogen and a hydrocarbon.
Claim 4
Dependent Claim 10 words
The method of claim 2 wherein the hydrocarbon is methane.
Claim 5
Dependent Claim 20 words
The method of claim 3 wherein the hydrocarbon-hydrogen gas mixture comprises from about 2 to about 25 volume percent hydrocarbon.
Claim 6
Independent Claim 36 words
The method of 2 wherein the conditions of said second chamber is effective for removing non-diamond carbon includes hydrogen gas and a filament having a temperature between about 2000 deg. C and about 2500 deg. C.
Claim 7
Independent Claim 36 words
The method of 2 wherein the conditions of said second chamber is effective for removing non-diamond carbon includes hydrogen gas and a filament having a temperature between about 2000 deg. C and about 2500 deg. C.
Claim 8
Dependent Claim 19 words
The method as recited in claim 1 further comprising limiting the number of diamond nucleation sites on said substrate.
Claim 9
Dependent Claim 27 words
The method of claim 1 wherein the exposure time of said substrate to each of said first and second chambers of said apparatus is not the same.
Claim 10
Dependent Claim 35 words
The method of claim 7 wherein the exposure time of said substrate to said first chamber of said apparatus is longer than the exposure time of said substrate to said second chamber of said apparatus.

References Cited (Backward Citations)

US3030188A Cited
US3652444A Cited
US4058430A Cited
US4434188A Cited
US4707384A Cited
US4806321A Cited
US4664743A Cited
US4986214A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-04-28 1995-10-28 1996-04-28 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-04-28 1999-10-28 2000-04-28 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-04-28 2003-10-28 2004-04-28 $7700.00 Window Closed / Lapsed

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