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US5105302A Expired / Lapsed US ⏱️ 0.0 years remaining

Spatial light modulator

Assignee: KDDI Corp
•
Filing: 1990-02-22
•
Granted: 1992-04-14
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Expires: 2010-02-22
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Abstract

Abstract A spatial light modulator is disclosed, in which a low dark resistance single-crystal plate is used which is formed of Bi 12 MO 20 (where M is Si, Ge or Ti) or similar type crystal, doped with phosphorus (P) in the range of 0.03≦P≦0.2 in atomic percentage to provide a dark resistivity far lower than that of an undoped crystal, and a high dark resistance layer, which is of the same crystal structure as that of the single-crystal plate and lattice-matched therewith and has photoconductivity, electro-optic effect and a high dark resistivity, is provided on the light incident side of the single-crystal plate. A tapered low dark resistance single-crystal plate may be used which is formed of Bi 12 MO 20 (where M=Si, Ge, or Ti) or similar sillenite type crystal, doped with phosphorus (P) in the range of 0.03≦P≦0.2 in atomic percentage to provide a dark resistivity far lower than that of a phosphorus-free crystal, and a high dark resistance layer, which has the same crystal structure as that of the tapered single-crystal plate and produces photoconductivity and the electro-optic effect and a high dark resistivity, is provided on the light incident side of the tapered single-crystal plate, whereby the image write sensitivity and resolution can be made uniform throughout the device.

Inventors

  • 👤 Yasuyuki Nagao
  • 👤 Yoshinori Mimura

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 16:22
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/03; G02F1/0338

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 137 words
A spatial light modulator which performs recording and read-out of an optical image through utilization of photoconductivity and electro-optic effect of a single-crystal of a sillenite type crystal structure, characterized by: a low dark resistance single-crystal plate of a sillenite structure having a low dark resistivity by impurity doping; a high dark resistance layer provided on the light incident side of said low dark resistance single-crystal plate and higher in dark resistivity than said low dark resistance single-crystal plate, having sillenite structure lattice-matched to said low dark resistance single-crystal plate; an insulating layer provided on the other side of said high dark resistance layer; and transparent electrodes provided on the other side of said high dark resistance layer; and transparent electrodes provided on the other side of said low dark resistance single-crystal plate and said insulating layer.
Claim 2
Dependent Claim 137 words
A spatial light modulator which performs recording and read-out of an optical image through utilization of photoconductivity and electro-optic effect of a single-crystal of a sillenite type crystal structure, characterized by: a low dark resistance single-crystal plate of a sillenite structure having a low dark resistivity by impurity doping; a high dark resistance layer provided on the light incident side of said low dark resistance single-crystal plate and higher in dark resistivity than said low dark resistance single-crystal plate, having sillenite structure lattice-matched to said low dark resistance single-crystal plate; an insulating layer provided on the other side of said high dark resistance layer; and transparent electrodes provided on the other side of said high dark resistance layer; and transparent electrodes provided on the other side of said low dark resistance single-crystal plate and said insulating layer.
Claim 3
Dependent Claim 30 words
A spatial light modulator according to claim 1, characterized in that said high dark resistance layer is formed of Bi 12 MO 20 (where M is Si, Ge, or Ti).
Claim 4
Dependent Claim 38 words
A spatial light modulator according to claim 1, characterized in that said low resistance single-crystal plate is formed of a crystal of Bi 10 MO 20 (where M is Si, Ge, or Ti) doped with a pentavalent element.
Claim 5
Dependent Claim 27 words
A spatial light modulator device according to claim 3, characterized in that said pentavalent element is at least one of phosphorus (P), antimony (Sb) and niobium (Nb).
Claim 6
Dependent Claim 40 words
A spatial light modulator according to claim 3, characterized in that said low dark resistance single-crystal plate is formed of said Bi 12 MO 20 doped with phosphorus (P) in the concentration range of between 0.03 and 0.2 atm %.
Claim 7
Dependent Claim 21 words
A spatial light modulator according to claim 1, characterzied in that said low dark resistance single-crystal plate has a tapered shape.
Claim 8
Dependent Claim 28 words
A spatial light modulator according to claim 1, characterized in that said high dark resistance layer is formed of Bi 12 MO 20 (where M=Si, Ge, or Ti).
Claim 9
Dependent Claim 39 words
A spatial light modulator according to claim 6, characterized in that said low dark resistance single-crystal plate is formed of a crystal of Bi 10 MO 20 (where M is Si, Ge, or Ti) doped with a pentavalent element.
Claim 10
Dependent Claim 26 words
A spatial light modulator according to claim 8, characterized in that said pentavalent element is at least one of phosphorus (P), antimony (Sb) and niobium (Nb).
Claim 11
Dependent Claim 40 words
A spatial light modulator according to claim 8, characterized in that said low dark resistance single-crystal plate is formed of said Bi 12 MO 20 doped with phosphorus (P) in the concentration range of between 0.03 and 0.2 atm %.

References Cited (Backward Citations)

US3566130A Cited
JPS63208022A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-04-14 1995-10-14 1996-04-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-04-14 1999-10-14 2000-04-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-04-14 2003-10-14 2004-04-14 $7700.00 Window Closed / Lapsed

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