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US5104480A Expired / Lapsed US ⏱️ 0.0 years remaining

Direct patterning of metals over a thermally inefficient surface using a laser

Assignee: Lockheed Martin Corp
•
Filing: 1990-10-12
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Granted: 1992-04-14
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Expires: 2010-10-12
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Abstract

Abstract Conductive patterns may be formed on the surface of thermally inefficient substrates by depositing a uniform layer of metal thereover whose upper surface is substantially UV light absorbing followed by laser ablation of the deposited metal to leave the deposited metal only in the desired metal pattern. Thermally efficient substrates may be rendered thermally inefficient by the deposition of a thermally inefficient material thereon. That thermally inefficient material may be either electrically insulating or a metal. A two layer metallization comprising a first, thermally inefficient reactive metal and a second UV light absorbing metal is preferred. When disposed on a thermally inefficient substrate, this two layer metallization ablates reactively as the two layers burn off together. This laser ablation process substantially roughens the surface of polymer dielectrics and may be used to repair open traces in printed circuit structures.

Inventors

  • 👤 Robert J. Wojnarowski
  • 👤 Charles W. Eichelberger

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 23:20
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/22; H05K3/225; B; B23; B23K; B23K26/00; B23K26/36; B23K26/40; H01; H01C; H01C17/00; H01C17/22; H01C17/24; H01C17/242; H05K3/02; H05K3/027; H05K3/06; H05K3/061; H05K3/062; H10; H10W; H10W70/00; H10W70/01; H10W70/05; B23K2103/00; B23K2103/02; B23K2103/04; B23K2103/05; B23K2103/08; B23K2103/12; B23K2103/14; B23K2103/15; B23K2103/16; B23K2103/166; B23K2103/172; B23K2103/18; B23K2103/26; B23K2103/30; B23K2103/42; B23K2103/50; B23K2103/54; H05K2201/00; H05K2201/01; H05K2201/0104; H05K2201/0112; H05K2201/03; H05K2201/0332; H05K2201/0335; H05K2201/0338; H05K2201/20; H05K2201/2081; H05K2203/00; H05K2203/03; H05K2203/0361; H05K2203/0384; H05K2203/17; H05K2203/173; H05K2203/175; H05K3/10; H05K3/108; H05K3/14; H05K3/143; H05K3/38; H05K3/381; H05K3/388

Claims Analysis

Total Claims: 32
Claim 1
Independent Claim 67 words
A method of producing a desired metal pattern on a surface of a thermally inefficient substrate comprising: depositing a layer of a first metal on said substrate; depositing a layer of a second, ultraviolet light absorbing metal on said first metal; exposing said second metal to intense ultraviolet light in accordance with said desired pattern to reactively ablate said first and second metals from said substrate together.
Claim 2
Independent Claim 67 words
A method of producing a desired metal pattern on a surface of a thermally inefficient substrate comprising: depositing a layer of a first metal on said substrate; depositing a layer of a second, ultraviolet light absorbing metal on said first metal; exposing said second metal to intense ultraviolet light in accordance with said desired pattern to reactively ablate said first and second metals from said substrate together.
Claim 3
Dependent Claim 49 words
The method recited in claim 1 wherein: said first metal is selected from the group consisting of titanium, chromium, magnesium, manganese, nichrome and stainless steel and alloys and mixtures thereof; and said second metal is selected from the group consisting of copper and gold and alloys and mixtures thereof.
Claim 4
Dependent Claim 19 words
The method recited in claim 2 wherein: said substrate is disposed in an oxidizing atmosphere during said exposing step.
Claim 5
Dependent Claim 21 words
The method recited in claim 3 wherein: said first and second metals burn off said substrate together during said exposing step.
Claim 6
Dependent Claim 12 words
The method recited in claim 4 wherein: said oxidizing atmosphere comprises air.
Claim 7
Dependent Claim 20 words
The method recited in claim 3 wherein the step of exposing comprises: scanning an ultraviolet laser beam across said substrate.
Claim 8
Dependent Claim 12 words
The method recited in claim 3 wherein: said oxidizing atmosphere comprises air.
Claim 9
Dependent Claim 23 words
The method recited in claim 1 further comprising: etching those portions of said substrate from which said first and second metals were ablated.
Claim 10
Dependent Claim 75 words
The method recited in claim 1 wherein said substrate is electrically conducting, said first metal is titanium and said method further comprises, after the exposing step, the steps of: removing said second metal from said titanium; allowing the then exposed titanium to form a surface coating of titanium oxide; and electroplating said substrate to build up electroplated metal in those areas from which said metals were ablated without building up electroplated metal on said titanium.
Claim 11
Dependent Claim 20 words
The method recited in claim 1 wherein the step of exposing comprises: scanning an ultraviolet laser beam across said substrate.
Claim 12
Independent Claim 97 words
A method of increasing the surface area of a polymer comprising: depositing a first layer of metal selected from the group consisting of titanium, chromium, nichrome, stainless steel, magnesium and manganese and alloys and mixtures thereof on said polymer; depositing a second layer of metal selected from the group consisting of copper and gold and alloys and mixtures thereof on said first layer of metal; laser ablating said second and first metal layers together in an oxidizing atmosphere under conditions in which said first layer of metal burns off to leave said polymer with a structured surface.
Claim 13
Independent Claim 97 words
A method of increasing the surface area of a polymer comprising: depositing a first layer of metal selected from the group consisting of titanium, chromium, nichrome, stainless steel, magnesium and manganese and alloys and mixtures thereof on said polymer; depositing a second layer of metal selected from the group consisting of copper and gold and alloys and mixtures thereof on said first layer of metal; laser ablating said second and first metal layers together in an oxidizing atmosphere under conditions in which said first layer of metal burns off to leave said polymer with a structured surface.
Claim 14
Independent Claim 100 words
A method of repairing a broken trace in a printed circuit comprising: depositing a layer of a first metal on said printed circuit, in ohmic contact with both pieces of said trace and across the gap between them; depositing a layer of a second, ultraviolet light absorbing metal on said first metal; laser albating said first and second metals from said printed circuit while leaving said metals in ohmic contact with both pieces of said broken circuit trace and continuous therebetween to leave said first and second metals as a conducting bridge connecting the two pieces of said broken trace.
Claim 15
Independent Claim 100 words
A method of repairing a broken trace in a printed circuit comprising: depositing a layer of a first metal on said printed circuit, in ohmic contact with both pieces of said trace and across the gap between them; depositing a layer of a second, ultraviolet light absorbing metal on said first metal; laser albating said first and second metals from said printed circuit while leaving said metals in ohmic contact with both pieces of said broken circuit trace and continuous therebetween to leave said first and second metals as a conducting bridge connecting the two pieces of said broken trace.
Claim 16
Independent Claim 53 words
A method of trimming a resistor comprising: depositing a layer of a first metal on said resistor; depositing a layer of a second, ultraviolet light absorbing, metal on said first metal; laser ablating said first and second metals together from said resistor in a pattern to provide said resistor with a desired resistance.
Claim 17
Independent Claim 53 words
A method of trimming a resistor comprising: depositing a layer of a first metal on said resistor; depositing a layer of a second, ultraviolet light absorbing, metal on said first metal; laser ablating said first and second metals together from said resistor in a pattern to provide said resistor with a desired resistance.
Claim 18
Independent Claim 78 words
A method of producing a metal pattern on a surface of a high thermal conductivity substrate comprising: depositing a layer of a first thermally inefficient metal on said substrate, said layer being thick enough to render the resulting surface thermally inefficient; depositing a layer of a second, ultraviolet light absorbing metal on said first metal; exposing said second metal to intense ultraviolet light in the inverse of said pattern to ablate said second metal from said first metal.
Claim 19
Independent Claim 78 words
A method of producing a metal pattern on a surface of a high thermal conductivity substrate comprising: depositing a layer of a first thermally inefficient metal on said substrate, said layer being thick enough to render the resulting surface thermally inefficient; depositing a layer of a second, ultraviolet light absorbing metal on said first metal; exposing said second metal to intense ultraviolet light in the inverse of said pattern to ablate said second metal from said first metal.
Claim 20
Dependent Claim 39 words
The method recited in claim 14 wherein: said first metal is selected from the group consisting of titanium, chromium, magnesium, manganese, nichrome and stainless steel; and said second metal is selected from the group consisting of copper and gold.
Claim 21
Dependent Claim 19 words
The method recited in claim 15 wherein: said substrate is disposed in an oxidizing atmosphere during said exposing step.
Claim 22
Dependent Claim 12 words
The method recited in claim 16 wherein: said oxidizing atmosphere comprises oxygen.
Claim 23
Dependent Claim 20 words
The method recited in claim 17 wherein the step of exposing comprises: scanning an ultraviolet laser beam across said substrate.
Claim 24
Dependent Claim 25 words
The method recited in claim 15 further comprising: etching exposed portions of said first metal with an etchant which does not attack said second metal.
Claim 25
Dependent Claim 76 words
The method recited in claim 14 wherein said substrate is electrically conducting, said first metal is titanium and said method further comprises, after the step of exposing, the steps of: selectively removing said second metal from said titanium; allowing the then exposed titanium to form a surface coating of titanium oxide; and electroplating said substrate to build up electroplated metal in those areas from which said metals were ablated without building up electroplated metal on said
Claim 26
Dependent Claim 20 words
The method recited in claim 14 wherein the step of exposing comprises: scanning an ultraviolet laser beam across said substrate.
Claim 27
Independent Claim 114 words
A method of producing a metal pattern on a surface of a high thermal conductivity substrate comprising: depositing a first layer of a metal on said substrate, depositing a second layer of a metal on said first layer of metal; depositing a third layer of a thermally inefficient metal on said second layer of metal, said third thick enough to render the resulting surface thermally inefficient; depositing a fourth layer of an ultraviolet light absorbing metal on said third layer of metal; exposing said fourth layer of metal to intense ultraviolet light in the inverse of said pattern to ablate said fourth layer of metal from the surface of said third layer of metal.
Claim 28
Independent Claim 114 words
A method of producing a metal pattern on a surface of a high thermal conductivity substrate comprising: depositing a first layer of a metal on said substrate, depositing a second layer of a metal on said first layer of metal; depositing a third layer of a thermally inefficient metal on said second layer of metal, said third thick enough to render the resulting surface thermally inefficient; depositing a fourth layer of an ultraviolet light absorbing metal on said third layer of metal; exposing said fourth layer of metal to intense ultraviolet light in the inverse of said pattern to ablate said fourth layer of metal from the surface of said third layer of metal.
Claim 29
Dependent Claim 40 words
The method recited in claim 22 further comprising the step of: etching exposed portions of said third layer of metal with an etchant to which said fourth layer of metal is substantially immune to pattern said third layer of metal.
Claim 30
Dependent Claim 33 words
The method recited in claim 23 further comprising the step of: etching exposed portions of said second layer of metal with an etchant to which said third layer of metal is substantially immune.
Claim 31
Dependent Claim 33 words
The method recited in claim 24 further comprising the step of: etching exposed portions of said first layer of metal with an etchant to which said second layer of metal is substantially immune.
Claim 32
Dependent Claim 22 words
The method recited in claim 22 wherein: said first and third layers comprise titanium; and said second and fourth layers comprise copper.

References Cited (Backward Citations)

US3867217A Cited
US4037075A Cited
US4259433A Cited
US4874920A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-04-14 1995-10-14 1996-04-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-04-14 1999-10-14 2000-04-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-04-14 2003-10-14 2004-04-14 $7700.00 Window Closed / Lapsed

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