US5103101A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multiphase printing for E-beam lithography
Assignee: Nikon Corp
•
Filing: 1991-03-04
•
Granted: 1992-04-07
•
Expires: 2011-03-04
Abstract
Abstract A method for a raster scan particle or light beam lithography system for writing in multiple passes interleaved in such a manner as to achieve a composite result nearly identical to normal single pass raster scan writing with overlapped spots. Multiple pass writing, achieved with little or no degradation or throughput or lithography quality, provides an ideal platform for implementation of known image averaging techniques to improve lithography quality. This technique is combined with the known writing technique of "Virtual Addressing" to improve resolution with little or no degradation of throughput.
Inventors
- 👤 C. Neil Berglund
- 👤 John R. Thomas
- 👤 John T. Poreda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 15:15
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3174; B; B82; B82Y; B82Y10/00; B82Y40/00; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70383; G03F7/704; H01J37/302; H01J37/3023; H01J37/3026; H01J2237/00; H01J2237/30; H01J2237/317; H01J2237/3175; H01J2237/31761; H01J2237/31762
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
166 words
In the generation of a pattern for use in the fabrication of integrated circuits in a rasterscan lithography system, the steps in the process comprising: forming a beam of a predetermined diameter defining the width of a pixel of the pattern; providing a material sensitive to said beam to be irradiated by the beam; forming a plurality of said pixels by directing said beam onto said material; controlling said beam as it forms said pixels to form an array of pixels, each pixel being an element of a feature of the pattern of a predetermined length and width; repeating the steps of forming and controlling a plurality of times, with each step forming a separate array of pixels, each pixel being an element of a predefined feature not formed in a previous step of forming such that the composite of all steps of forming forms a plurality of adjacent lines of said pixels, said lines defining a feature of the pattern of predetermined length and width.
Claim 2
Dependent Claim
166 words
In the generation of a pattern for use in the fabrication of integrated circuits in a rasterscan lithography system, the steps in the process comprising: forming a beam of a predetermined diameter defining the width of a pixel of the pattern; providing a material sensitive to said beam to be irradiated by the beam; forming a plurality of said pixels by directing said beam onto said material; controlling said beam as it forms said pixels to form an array of pixels, each pixel being an element of a feature of the pattern of a predetermined length and width; repeating the steps of forming and controlling a plurality of times, with each step forming a separate array of pixels, each pixel being an element of a predefined feature not formed in a previous step of forming such that the composite of all steps of forming forms a plurality of adjacent lines of said pixels, said lines defining a feature of the pattern of predetermined length and width.
Claim 3
Dependent Claim
12 words
The method of claim 1, wherein said beam is an electron beam.
Claim 4
Dependent Claim
12 words
The method of claim 1, wherein said beam is a light beam.
Claim 5
Dependent Claim
12 words
The method of claim 1, wherein said beam is an ion beam.
Claim 6
Dependent Claim
19 words
The method of claim 1, wherein each pixel overlaps an adjacent pixel by about 50% of a pixel width.
Claim 7
Dependent Claim
24 words
The method of claim 1, further comprising the step of defining an edge of said feature by forming only alternate pixels along said edge.
Claim 8
Dependent Claim
21 words
The method of claim 1, wherein the step of repeating includes repeating three times, thereby forming said pattern in four passes.
Claim 9
Dependent Claim
132 words
In the generation of a raster scan pattern, the steps comprising: forming a beam of a predetermined diameter defining the width of an element of the pattern; providing a material sensitive to said beam to be irradiated by the beam; forming a plurality of said elements by directing said beam onto said material; controlling said beam as it forms said elements to form a plurality of adjacent lines of said elements, said lines defining a portion of the pattern of a predetermined length and width; repeating the steps of forming and controlling a plurality of times, with each step forming a separate array of elements, each element being a portion of the same predefined feature and not being formed in a previous step of forming; and developing the pattern in the material.
Claim 10
Dependent Claim
132 words
In the generation of a raster scan pattern, the steps comprising: forming a beam of a predetermined diameter defining the width of an element of the pattern; providing a material sensitive to said beam to be irradiated by the beam; forming a plurality of said elements by directing said beam onto said material; controlling said beam as it forms said elements to form a plurality of adjacent lines of said elements, said lines defining a portion of the pattern of a predetermined length and width; repeating the steps of forming and controlling a plurality of times, with each step forming a separate array of elements, each element being a portion of the same predefined feature and not being formed in a previous step of forming; and developing the pattern in the material.
Claim 11
Dependent Claim
145 words
A rasterscan system for forming a pattern on a radiation sensitive material comprising: means for forming a radiating beam of a predetermined diameter defining the width of a pixel of the pattern; means for forming a plurality of said pixels on said material by directing said beam onto said material; means for controlling said beam as it forms said pixels to form an array of pixels, each pixel being a feature of the pattern; and means for repeating the forming of said pixels by passing said beam across said material a plurality of times, with each pass forming a separate array of pixels, each pixel being an element of a predefined feature not formed in a previous pass, such that all passes together form a plurality of adjacent lines of said pixels, said lines defining a feature of the pattern of predetermined length and width.
Claim 12
Dependent Claim
145 words
A rasterscan system for forming a pattern on a radiation sensitive material comprising: means for forming a radiating beam of a predetermined diameter defining the width of a pixel of the pattern; means for forming a plurality of said pixels on said material by directing said beam onto said material; means for controlling said beam as it forms said pixels to form an array of pixels, each pixel being a feature of the pattern; and means for repeating the forming of said pixels by passing said beam across said material a plurality of times, with each pass forming a separate array of pixels, each pixel being an element of a predefined feature not formed in a previous pass, such that all passes together form a plurality of adjacent lines of said pixels, said lines defining a feature of the pattern of predetermined length and width.
Claim 13
Dependent Claim
178 words
In the generation of patterns for lithography using a raster scanning pattern generation apparatus, a method of printing a raster pattern, as defined by a plurality of pixels formed on a grid in a plurality of n 2 passes where n is an integer greater than 1, comprising: forming a beam of a predetermined diameter defining the width of each pixel; providing a material sensitive to the beam to be irradiated by said beam on a substrate; forming the pixels by directing said beam onto said material; controlling said beam as it forms said pixels onto said grid, thereby imaging every nth pixel of said plurality of pixels that define said raster pattern and exposing the first of n 2 passes; repeating the steps of forming and controlling the beam to form a plurality of pixels onto said grid, with each pass offset from each previous pass, until a total of n 2 passes have been exposed, and a plurality of pixels have been formed in a one-to-one correspondence with said raster pattern; and finally, developing the material.
Claim 14
Dependent Claim
178 words
In the generation of patterns for lithography using a raster scanning pattern generation apparatus, a method of printing a raster pattern, as defined by a plurality of pixels formed on a grid in a plurality of n 2 passes where n is an integer greater than 1, comprising: forming a beam of a predetermined diameter defining the width of each pixel; providing a material sensitive to the beam to be irradiated by said beam on a substrate; forming the pixels by directing said beam onto said material; controlling said beam as it forms said pixels onto said grid, thereby imaging every nth pixel of said plurality of pixels that define said raster pattern and exposing the first of n 2 passes; repeating the steps of forming and controlling the beam to form a plurality of pixels onto said grid, with each pass offset from each previous pass, until a total of n 2 passes have been exposed, and a plurality of pixels have been formed in a one-to-one correspondence with said raster pattern; and finally, developing the material.
Claim 15
Dependent Claim
12 words
The method of claim 10, wherein said beam is an electron beam.
Claim 16
Dependent Claim
12 words
The method of claim 10, wherein said beam is a light beam.
Claim 17
Dependent Claim
13 words
The method of claim 10, wherein the said beam is an ion beam.
Claim 18
Dependent Claim
32 words
The method of claim 10, wherein the pixels are arranged on said grid at a predetermined uniform spacing, each pass being offset from each previous pass along one dimension of said grid.
Claim 19
Dependent Claim
17 words
The method of claim 14, wherein the diameter is equal to n times said predetermined uniform spacing.
Claim 20
Dependent Claim
17 words
The method of claim 10, further comprising the step of positioning said substrate on a movable support.
Claim 21
Dependent Claim
28 words
The method of claim 10, further comprising the step of defining an edge of said pattern by the additional step of forming only alternate pixels along said edge.
References Cited (Backward Citations)
US4586141A
Cited
US4498010A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-04-07 | 1995-10-07 | 1996-04-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-04-07 | 1999-10-07 | 2000-04-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-04-07 | 2003-10-07 | 2004-04-07 | $7700.00 | Window Closed / Lapsed |