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US5100863A
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Superconducting ceramics manufacturing method
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1988-03-23
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Granted: 1992-03-31
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Expires: 2008-03-23
Abstract
Abstract An improved method of manufacturing superconducting ceramics in the form of a thin film are described. The thin film is first formed of a superimposed structure composed of three films which contain a rare earth metal, an alkaline metal and copper respectively. Then the superimposed thin film is fired to convert to superconducting film.
Inventors
- 👤 Shumpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 06:31
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/73; Y10S505/731; Y10S505/732; Y10S505/739; Y10S505/741; Y10S505/80; Y10S505/815; Y10S505/816; Y10S505/818; Y10S505/819
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
114 words
A method of forming a superconducting ceramic comprising: forming by vacuum evaporation deposition, sputtering, printing, coating or vapor phase method at least one layer on a surface to be coated, said layer consisting of a plurality of superimposed thin films, each of which contains a different metallic constituent of a superconducting ceramic material wherein said superconducting ceramic material is consistent with the stoichiometric formula: ((A.sub.1-x B.sub.x).sub.y CuO.sub.z wherein x=0.01-0.03; y=1.0-2.2; z=2.0-4.5, and A stands for one or more elements selected from rare earth elements and B stands for one or more elements selected from alkali earth metals; and firing said layer and transforming same to a superconducting thin film of said superconducting ceramic material.
Claim 2
Independent Claim
114 words
A method of forming a superconducting ceramic comprising: forming by vacuum evaporation deposition, sputtering, printing, coating or vapor phase method at least one layer on a surface to be coated, said layer consisting of a plurality of superimposed thin films, each of which contains a different metallic constituent of a superconducting ceramic material wherein said superconducting ceramic material is consistent with the stoichiometric formula: ((A.sub.1-x B.sub.x).sub.y CuO.sub.z wherein x=0.01-0.03; y=1.0-2.2; z=2.0-4.5, and A stands for one or more elements selected from rare earth elements and B stands for one or more elements selected from alkali earth metals; and firing said layer and transforming same to a superconducting thin film of said superconducting ceramic material.
Claim 3
Dependent Claim
32 words
The method of claim 1 wherein said thin films comprising a first film containing a rare earth element, a second film containing an alkaline earth element and a third film containing copper.
Claim 4
Dependent Claim
28 words
The method of claim 2 wherein said forming process is performed sputtering targets containing the metallic constituents, said targets being switched in turn to produce said superimposed films.
Claim 5
Dependent Claim
17 words
The method of claim 3 wherein at least one of said targets is made of the metal.
Claim 6
Dependent Claim
20 words
The method of claim 3 wherein at least one of said targets is made of the oxide of the metal.
Claim 7
Dependent Claim
13 words
The method of claim 1 wherein said thin films are formed by coating.
Claim 8
Dependent Claim
37 words
The method of claim 6 wherein said thin films formed by dispersing the oxides or simple substance of metallic constituents into a liquid to produce solutions or slurries, coating said solutions or slurries superimposedly on said surface.
Claim 9
Dependent Claim
20 words
The method of claim 2 wherein aid first, second and third films are formed one on another only one time.
Claim 10
Dependent Claim
20 words
The method of claim 2 wherein said first, second and third films are formed one on another repeatedly in turns.
Claim 11
Dependent Claim
16 words
The method of claim 1 wherein the thickness of said thin films is 300 to 500Å.
Claim 12
Independent Claim
127 words
A method of forming a superconducting ceramic comprising: forming by vacuum evaporation deposition, sputtering, printing, coating or vapor phase method at least one layer on a surface to be coated, said layer consisting of a plurality of superimposed thin films, each of which contains a different metallic constituent of a superconducting ceramic material wherein said superconducting ceramic material is consistent with the stoichiometric formula: (A.sub.1-x B.sub.x) .sub.y Cu.sub.z O.sub.w wherein x=0 to 1; y=2-4; z=1-4; w=4-10; and A stands for one or more elements selected from the group Vb elements such as Bi, Sb and As and B stands for one or more elements selected from the alkali earth elements; and firing said layer and transforming same to a superconducting thin film of said superconducting ceramic material.
Claim 13
Independent Claim
127 words
A method of forming a superconducting ceramic comprising: forming by vacuum evaporation deposition, sputtering, printing, coating or vapor phase method at least one layer on a surface to be coated, said layer consisting of a plurality of superimposed thin films, each of which contains a different metallic constituent of a superconducting ceramic material wherein said superconducting ceramic material is consistent with the stoichiometric formula: (A.sub.1-x B.sub.x) .sub.y Cu.sub.z O.sub.w wherein x=0 to 1; y=2-4; z=1-4; w=4-10; and A stands for one or more elements selected from the group Vb elements such as Bi, Sb and As and B stands for one or more elements selected from the alkali earth elements; and firing said layer and transforming same to a superconducting thin film of said superconducting ceramic material.
Claim 14
Dependent Claim
64 words
The method of claim 11 wherein said superconducting ceramic is consistent with BiSrCaCu 2 O x , Bi 4 Sr 3 Ca 3 Cu 4 O x , Bi 4 Sr y Ca 3 Cu 4 O x (y is around 1.5), Bi r Sr 4 Ca 2 Cu 4 O x or Bi 2 Sr 3 Ca 2 Cu 2 O x .
Claim 15
Independent Claim
84 words
A method of forming a superconducting film comprising: forming by vacuum evaporation deposition, sputtering, printing, coating or vapor phase method at least one layer on a surface to be coated, said layer consisting of a plurality of superimposed thin films, each of which contains a different metallic constituent of a superconducting ceramic material, wherein said superconducting ceramic material is consistent with the stoichiometric formula: Ya.sub.2 Cu.sub.3 O.sub.6-8; thermal annealing said layer and transforming same to a superconducting thin film of said superconducting ceramic material.
Claim 16
Independent Claim
84 words
A method of forming a superconducting film comprising: forming by vacuum evaporation deposition, sputtering, printing, coating or vapor phase method at least one layer on a surface to be coated, said layer consisting of a plurality of superimposed thin films, each of which contains a different metallic constituent of a superconducting ceramic material, wherein said superconducting ceramic material is consistent with the stoichiometric formula: Ya.sub.2 Cu.sub.3 O.sub.6-8; thermal annealing said layer and transforming same to a superconducting thin film of said superconducting ceramic material.
References Cited (Backward Citations)
US4920094A
Cited
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