Patent US5100526A successfully refreshed from Google Patents.
US5100526A
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Apparatus for forming thin film
Assignee: Mitsubishi Electric Corp
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Filing: 1991-01-24
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Granted: 1992-03-31
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Expires: 2011-01-24
Abstract
Abstract An apparatus for forming a thin film includes a vacuum chamber; an exhaust system for evacuating the vacuum chamber and a crucible for generating, in the vacuum chamber, clusters of a deposit substance. The apparatus for forming a thin film further includes an ionizing device for ionizing part of the clusters generated by the crucible; an acceleration device for accelerating ionized clusters to collide with a substrate retained in the vacuum chamber; and a filter for removing ionized clusters smaller than a predetermined size.
Inventors
- 👤 Hiroki Ito
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 14:26
CPC Classifications
C; C23; C23C; C23C16/00; C23C14/00; C23C14/22; C23C14/221
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
123 words
An apparatus for forming a thin film comprising: a vacuum chamber; exhaust means for evacuating said vacuum chamber; cluster generating means for generating, in said vacuum chamber, clusters of a substance; ionizing means for ionizing clusters generated by said cluster generating means; acceleration means for accelerating clusters ionized by said ionizing means to collide with a substrate retained in said vacuum chamber, said acceleration means including a tubular ground electrode and a tubular acceleration electrode for being positively biased with respect to said ground electrode; and filter means for removing and preventing ionized clusters smaller than a predetermined size from colliding with the substrate, said filter means including a pair of opposed electrodes disposed within the tubular acceleration electrode for deflecting ionized clusters.
Claim 2
Independent Claim
123 words
An apparatus for forming a thin film comprising: a vacuum chamber; exhaust means for evacuating said vacuum chamber; cluster generating means for generating, in said vacuum chamber, clusters of a substance; ionizing means for ionizing clusters generated by said cluster generating means; acceleration means for accelerating clusters ionized by said ionizing means to collide with a substrate retained in said vacuum chamber, said acceleration means including a tubular ground electrode and a tubular acceleration electrode for being positively biased with respect to said ground electrode; and filter means for removing and preventing ionized clusters smaller than a predetermined size from colliding with the substrate, said filter means including a pair of opposed electrodes disposed within the tubular acceleration electrode for deflecting ionized clusters.
Claim 3
Dependent Claim
24 words
An apparatus for forming a thin film as claimed in claim 1 includes a high-frequency power supply for supplying voltage to said opposed electrodes.
Claim 4
Dependent Claim
52 words
An apparatus for forming a thin film as claimed in claim 1 wherein said cluster generating means includes a crucible in which a substance is disposed and including a nozzle for injecting a vapor of the substance into the vacuum chamber, and heating means for heating said crucible to evaporate the substance.
Claim 5
Dependent Claim
39 words
An apparatus for forming a thin film as claimed in claim 1 wherein said ionizing means includes ionization filaments for emitting electrons, and a drawing electrode for accelerating electrons emitted from said ionization filaments to collide with the clusters.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-03-31 | 1995-09-30 | 1996-03-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-03-31 | 1999-09-30 | 2000-03-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-03-31 | 2003-09-30 | 2004-03-31 | $7700.00 | Window Closed / Lapsed |