US5100502A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor wafer transfer in processing systems
Assignee: Applied Materials Inc
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Filing: 1990-03-19
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Granted: 1992-03-31
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Expires: 2010-03-19
Abstract
Abstract An improved semiconductor wafer transfer method and system incorporates a combination of wafer retractor (14) and wafer lifters (16) built into each processing chamber with a modified transport arm (12) to achieve large enhancements in wafer exchange speeds. The transport arm (12) brings a new wafer into a processing chamber (18) where an already processed wafer waits for retrieval, having been lifted into the central portion of the chamber by lifters (16). In a simultaneous action, lifters (16) lower the processed wafer onto a lower platform of the transport arm (12) while the wafer retractor (14) removes the new wafer from an upper platform of the transport arm (12). Once the transport arm (12) removes the processed wafer from the chamber (18), the retractor (14) lowers the new wafer onto the wafer lifters (16) and processing begins. The transport arm (12) delivers the processed wafer to a wafer buffer (58), which accompanies the transport arm (12), and retrieves a new wafer to start the wafer loading process again with the next processing chamber (18). The method and system of the present invention provides a flexible and rapid solution for loading and unloading wafer processing chambers.
Inventors
- 👤 Steven C. Murdoch
- 👤 Robert J. Steger
- 👤 Mahasukh Vora
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 11:15
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/33; H10P72/3306; H10P72/70; H10P72/76; H10P72/7602; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/141
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
59 words
An apparatus for positioning substrates for processing, said apparatus comprising: a chamber for isolating a first substrate from ambient conditions during processing reactions, and conveyance means for conveying a second substrate into said chamber while said first substrate is in said chamber while conveying said first substrate out of said chamber while said second substrate is in said chamber.
Claim 2
Independent Claim
59 words
An apparatus for positioning substrates for processing, said apparatus comprising: a chamber for isolating a first substrate from ambient conditions during processing reactions, and conveyance means for conveying a second substrate into said chamber while said first substrate is in said chamber while conveying said first substrate out of said chamber while said second substrate is in said chamber.
Claim 3
Dependent Claim
53 words
An apparatus as recited in claim 1 wherein said conveyance means further comprises: transport means for transporting said second substrate into said chamber and for transporting said first substrate out of said chamber; and removal means for removing said second substrate from said substrate transport means, said removal means located within said chamber.
Claim 4
Dependent Claim
50 words
An apparatus as recited in claim 2 further comprising: support means for supporting said first substrate, said support means located within said chamber, said support means capable of delivering said first substrate to said transport means, and said support means capable of receiving said second substrate from said removal means.
Claim 5
Dependent Claim
31 words
An apparatus as recited in claim 2 wherein said transport means further comprises: first platform means for supporting a substrate; and arm means for supporting and moving said first platform means.
Claim 6
Dependent Claim
29 words
An apparatus as recited in claim 4 wherein said transport means further comprises: second platform means for supporting a substrate, said second platform means supported by said arm means.
Claim 7
Dependent Claim
50 words
An apparatus as recited in claim 2 wherein said transport means further comprises: first platform means for supporting a substrate; first arm means for supporting and moving said first platform means; second platform means for supporting a substrate; and second arm means for supporting and moving said second platform means.
Claim 8
Dependent Claim
42 words
An apparatus as recited in claim 2 further comprising: a buffer means for holding a plurality of substrates, said buffer means capable of receiving substrates from said substrate conveyance means and said buffer capable of delivering substrates to said substrate conveyance means.
Claim 9
Independent Claim
65 words
An apparatus for positioning semiconductor wafers for processing, said apparatus comprising: a chamber for isolating a first wafer from ambient conditions during processing reactions; and a conveyor for conveying a second unprocessed wafer into said chamber while said first processed wafer is in said chamber and of conveying said first processed wafer out of said chamber while said second unprocessed wafer is in said chamber.
Claim 10
Independent Claim
65 words
An apparatus for positioning semiconductor wafers for processing, said apparatus comprising: a chamber for isolating a first wafer from ambient conditions during processing reactions; and a conveyor for conveying a second unprocessed wafer into said chamber while said first processed wafer is in said chamber and of conveying said first processed wafer out of said chamber while said second unprocessed wafer is in said chamber.
Claim 11
Dependent Claim
55 words
An apparatus as recited in claim 8 wherein said conveyor further comprises: a wafer transporter capable of transporting said second wafer into said chamber and of transporting said first wafer out of said chamber; and a wafer remover located within said processing chamber, said remover capable of removing said second wafer from said wafer conveyor.
Claim 12
Dependent Claim
47 words
An apparatus as recited in claim 9 wherein said conveyor further comprises: a wafer support located within said processing chamber, said wafer support capable of delivering said first wafer to said wafer transporter and said wafer support capable of receiving said second wafer from said wafer remover.
Claim 13
Dependent Claim
27 words
An apparatus as recited in claim 9 wherein said wafer transporter further comprises: a platform capable of supporting a wafer; a moveable arm attached to said platform.
Claim 14
Dependent Claim
29 words
An apparatus as recited in claim 11 wherein said wafer conveyor further comprises: a second platform capable of supporting a wafer, said second platform supported by said moveable arm.
Claim 15
Dependent Claim
47 words
An apparatus as recited in claim 9 wherein said wafer conveyor further comprises: a first platform capable of supporting a wafer; a first moveable arm attached to said first platform; a second platform capable of supporting a wafer; a second moveable arm attached to said second platform.
Claim 16
Dependent Claim
32 words
An apparatus as recited in claim 9 further comprising: a buffer, said buffer capable of receiving wafers from said wafer conveyor and said buffer capable of delivering wafers to said wafer conveyor.
Claim 17
Dependent Claim
26 words
An apparatus as recited in claim 10 wherein said wafer transporter comprises a wafer retractor, said wafer retractor located in the upper portion of said chamber.
Claim 18
Dependent Claim
28 words
An apparatus as recited in claim 10 wherein said wafer support comprises a plurality of lifting pins, said lifting pins located in the lower portion of said chamber.
Claim 19
Independent Claim
56 words
A method for transferring substrates to and from a processing chamber, said chamber isolating a first substrate from ambient conditions, comprising the steps of: a) loading a substrate transporter with a second substrate; b) moving a substrate transporter into said processing chamber; and c) removing said second substrate from said substrate transporter within said processing chamber.
Claim 20
Independent Claim
56 words
A method for transferring substrates to and from a processing chamber, said chamber isolating a first substrate from ambient conditions, comprising the steps of: a) loading a substrate transporter with a second substrate; b) moving a substrate transporter into said processing chamber; and c) removing said second substrate from said substrate transporter within said processing chamber.
Claim 21
Dependent Claim
40 words
A method as recited in claim 17 further comprising the steps of: d) placing said first substrate onto said substrate transporter within said processing chamber; and e) removing said substrate transporter bearing said first substrate thereon from said processing chamber.
Claim 22
Independent Claim
111 words
A method for transferring wafers to and from a processing chamber, said chamber isolating a first wafer from ambient conditions, comprising the steps of: a) loading a first platform of a wafer transporter with a second wafer; b) positioning said first wafer within said processing chamber; c) moving said wafer transporter into said processing chamber, such that a second platform of said wafer transporter is adjacent to said positioned first wafer; d) removing said second wafer from said first platform of said wafer transporter; e) setting said first wafer onto said second platform of said wafer transporter; and f) removing said wafer transporter with said first wafer from said processing chamber.
Claim 23
Independent Claim
111 words
A method for transferring wafers to and from a processing chamber, said chamber isolating a first wafer from ambient conditions, comprising the steps of: a) loading a first platform of a wafer transporter with a second wafer; b) positioning said first wafer within said processing chamber; c) moving said wafer transporter into said processing chamber, such that a second platform of said wafer transporter is adjacent to said positioned first wafer; d) removing said second wafer from said first platform of said wafer transporter; e) setting said first wafer onto said second platform of said wafer transporter; and f) removing said wafer transporter with said first wafer from said processing chamber.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-03-31 | 1995-09-30 | 1996-03-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-03-31 | 1999-09-30 | 2000-03-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-03-31 | 2003-09-30 | 2004-03-31 | $7700.00 | Window Closed / Lapsed |