US4487678A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Dry-etching apparatus
Assignee: Hitachi Ltd
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Filing: 1984-04-06
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Granted: 1984-12-11
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Expires: 2004-04-06
Abstract
Abstract The invention is directed to a dry-etching apparatus used for etching an aluminum wiring film formed on a wafer, and more particularly to a dry-etching apparatus which can remove chlorides deposited on the surface of the wafer during the dry etching thereof, as well as an etching resist film, without having to take the wafer out. This dry-etching apparatus is provided with an etching chamber, a vacuum antechamber attached to the etching chamber by a gate valve, and a post-treatment chamber attached to the vacuum antechamber. The apparatus is so formed that etched wafers removed to the vacuum antechamber can be sent therefrom to the post-treatment chamber, and then the post-treated wafers can be removed to the vacuum antechamber again, and then removed therefrom to the atmosphere.
Inventors
- 👤 Minori Noguchi
- 👤 Toru Otsubo
- 👤 Susumu Aiuchi
- 👤 Takashi Kamimura
- 👤 Teru Fujii
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 12:33
CPC Classifications
H; H10; H10P; H10P50/00; H01; H01J; H01J37/00; H01J37/02; H01J37/18; H01J37/185; H10P72/00; H10P72/04; H10P72/0402; H10P72/0418; H10P72/0421; H10P72/0441; H10P72/30; H10P72/33; H10P72/3304
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
160 words
In a dry-etching apparatus provided with an etching chamber within which the dry etching of an aluminum wiring film formed on a wafer is performed, a vacuum antechamber in which the degree of vacuum is higher than that in said etching chamber, a gate valve provided in an opening made in a boundary wall between said etching chamber and said antechamber, a dry-etching apparatus characterized in that it is provided with a cassette in said vacuum antechamber which is adapted to hold a wafer in such a manner that the wafer can be inserted thereinto and removed therefrom, a transfer means supporting said cassette and which is adapted to move said cassette reciprocally between a wafer-holding position in which said wafer can be inserted into and removed from said cassette, and an post-treatment position in which the etched wafer is subjected to post-treatment, and a post-treatment chamber provided at said post-treatment position so as to communicate with said vacuum antechamber.
Claim 2
Dependent Claim
160 words
In a dry-etching apparatus provided with an etching chamber within which the dry etching of an aluminum wiring film formed on a wafer is performed, a vacuum antechamber in which the degree of vacuum is higher than that in said etching chamber, a gate valve provided in an opening made in a boundary wall between said etching chamber and said antechamber, a dry-etching apparatus characterized in that it is provided with a cassette in said vacuum antechamber which is adapted to hold a wafer in such a manner that the wafer can be inserted thereinto and removed therefrom, a transfer means supporting said cassette and which is adapted to move said cassette reciprocally between a wafer-holding position in which said wafer can be inserted into and removed from said cassette, and an post-treatment position in which the etched wafer is subjected to post-treatment, and a post-treatment chamber provided at said post-treatment position so as to communicate with said vacuum antechamber.
Claim 3
Dependent Claim
37 words
The dry-etching apparatus according to claim 1, wherein said vacuum antechamber is provided therein with an arm for transferring said wafer between said vacuum antechamber and said etching chamber, and a linear motor for moving said arm.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-12-11 | 1988-06-11 | 1988-12-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-12-11 | 1992-06-11 | 1992-12-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-12-11 | 1996-06-11 | 1996-12-11 | $7700.00 | Window Closed / Lapsed |