US5100233A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Refractive index monitor for deposition of gradient-index films
Assignee: Teledyne Scientific and Imaging LLC
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Filing: 1989-09-22
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Granted: 1992-03-31
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Expires: 2009-09-22
Abstract
Abstract A method is provided for monitoring the refractive index of an optical film as it is being deposited on a substrate. The film is illuminated by a source of light at a wavelength that is outside and less than the reflectance band of the coating. If the refractive index of the film is initially matched to the refractive index of the substrate and has no abrupt changes in its gradient-index profile, reflectance from the surface of the film can be detected and measured. In the absence of interference fringing from internal reflections, surface reflectance of the interface of the film with the surrounding air or vacuum is closely related to the refractive index of the film at its surface. Thus, surface reflection is monitored to provide a control signal to the deposition apparatus to conform the refractive index of material being deposited to a predetermined refractive index profile specified for the desired optical film.
Inventors
- 👤 William H. Southwell
- 👤 Kirkpatrick W. Norton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 20:05
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/41; G01N2021/4126
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
80 words
A method of monitoring refractive index of a top surface of a gradient-index optical film as the film is being deposited on a substrate, comprising the steps of: illuminating the top surface of the film with light; detecting light reflected from only the top surface of the film; measuring said reflected light to determine reflectance of only the top surface of the film; and computing the refractive index of only the top surface of the film from said measured reflectance.
Claim 2
Independent Claim
80 words
A method of monitoring refractive index of a top surface of a gradient-index optical film as the film is being deposited on a substrate, comprising the steps of: illuminating the top surface of the film with light; detecting light reflected from only the top surface of the film; measuring said reflected light to determine reflectance of only the top surface of the film; and computing the refractive index of only the top surface of the film from said measured reflectance.
Claim 3
Dependent Claim
46 words
The method of claim 1, wherein the film comprises a rugate filter having a reflectance band, and the step of illuminating further comprises illuminating the top surface of the film with a monitoring wavelength of light selected to be outside and lower than said reflectance band.
Claim 4
Dependent Claim
36 words
The method of claim 1, further comprising the step of adjusting deposition of the optical film to produce a film having a refractive index gradient corresponding to a predetermined refractive index profile specified for the film.
Claim 5
Dependent Claim
46 words
The method of claim 3, wherein the step of adjusting deposition of the film further comprises the steps of: matching the refractive index of the film at the substrate with the refractive index of the substrate; and depositing the film with a continuous refractive index gradient.
Claim 6
Dependent Claim
29 words
The method of claim 4, wherein the step of matching comprises depositing a quintic matching layer joining the substrate to the film with a smoothly varying refractive index gradient.
Claim 7
Dependent Claim
26 words
The method of claim 1, wherein the step of computing comprises calculating the refractive index n from said measured reflectance R according to the formula n=(1+√R)/(1-√R).
Claim 8
Independent Claim
102 words
A method of depositing an optical film on a substrate, comprising the steps of: controlling a rate of deposition of optical material to form the optical film with a continuous refractive index gradient; illuminating a top surface of the film with light; detecting light reflected from only said top surface of the film; measuring reflectance of only said top surface of the film; computing a refractive index of only said top surface from said measured reflectance; and adjusting said rate of deposition of the optical material to conform said refractive index gradient to a predetermined refractive index profile specified for the film.
Claim 9
Independent Claim
102 words
A method of depositing an optical film on a substrate, comprising the steps of: controlling a rate of deposition of optical material to form the optical film with a continuous refractive index gradient; illuminating a top surface of the film with light; detecting light reflected from only said top surface of the film; measuring reflectance of only said top surface of the film; computing a refractive index of only said top surface from said measured reflectance; and adjusting said rate of deposition of the optical material to conform said refractive index gradient to a predetermined refractive index profile specified for the film.
Claim 10
Dependent Claim
39 words
The method of claim 7, wherein the film comprises a rugate filter having a reflectance band, and the step of illuminating further comprises the step of selecting a monitoring wavelength of light lower than and outside said reflectance band.
Claim 11
Dependent Claim
47 words
The method of claim 7, wherein the step of controlling further comprises the steps of: matching the refractive index of the film at the substrate with the refractive index of the substrate; and depositing said optical material to provide the film with said continuous refractive index gradient.
Claim 12
Dependent Claim
29 words
The method of claim 9, wherein the step of matching comprises depositing a quintic matching layer having a smoothly varying refractive index gradient joining the substrate to the film.
Claim 13
Dependent Claim
26 words
The method of claim 7, wherein the step of computing comprises calculating the refractive index n from said measured reflectance R according to the formula n=(1+√R)/(1-√R).
Claim 14
Independent Claim
145 words
A method of monitoring and controlling deposition of an optical film having a continuous refractive index profile, comprising the steps of: depositing optical material on a substrate at a controllable rate to form the optical film atop the substrate, the film having a top surface and comprising a filter having a light reflectance band; selecting a monitor wavelength of light lower than and outside said reflectance band of the film; illuminating said top surface of the film with said monitor wavelength of light during deposition of the film; detecting light reflected from only said top surface of the film; measuring reflectance of only said top surface of the film; computing a refractive index of only said top surface from said measured reflectance; and adjusting said controllable rate of deposition to conform the continuous refractive index profile of the film to a specified refractive index profile.
Claim 15
Independent Claim
145 words
A method of monitoring and controlling deposition of an optical film having a continuous refractive index profile, comprising the steps of: depositing optical material on a substrate at a controllable rate to form the optical film atop the substrate, the film having a top surface and comprising a filter having a light reflectance band; selecting a monitor wavelength of light lower than and outside said reflectance band of the film; illuminating said top surface of the film with said monitor wavelength of light during deposition of the film; detecting light reflected from only said top surface of the film; measuring reflectance of only said top surface of the film; computing a refractive index of only said top surface from said measured reflectance; and adjusting said controllable rate of deposition to conform the continuous refractive index profile of the film to a specified refractive index profile.
Claim 16
Dependent Claim
34 words
The method of claim 12, wherein the step of depositing optical material includes the step of depositing a quintic matching layer having a smoothly varying refractive index gradient joining the substrate to the film.
Claim 17
Dependent Claim
26 words
The method of claim 12, wherein the step of computing comprises calculating the refractive index n from said measured reflectance R according to the formula n=(1+√R)/(1-√R).
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-03-31 | 1995-09-30 | 1996-03-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-03-31 | 1999-09-30 | 2000-03-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-03-31 | 2003-09-30 | 2004-03-31 | $7700.00 | Window Closed / Lapsed |