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US5099353A
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Architecture and process for integrating DMD with control circuit substrates
Assignee: Texas Instruments Inc
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Filing: 1991-01-04
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Granted: 1992-03-24
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Expires: 2011-01-04
Abstract
Abstract DMD projection light values for HDTV have various manufacturing requirements, including the high yield integration of the DMD superstructure on top of an underlying CMOS address circuit. The CMOS chip surface contains several processing artifacts that can lead to reduced yield for the DMD superstructure. A modified DMD architecture and process are disclosed that minimizes the yield losses caused by these CMOS artifacts while also reducing parasitic coupling of the high voltage reset pulses to the underlying CMOS address circuitry.
Inventors
- 👤 Larry J. Hornbeck
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 03:19
CPC Classifications
G; G02; G02B; G02B26/00; G02B26/08; G02B26/0816; G02B26/0833; G02B26/0841; H; H10; H10P; H10P14/00; H10P14/60; H10P14/68; H10P14/683; Y; Y02; Y02P; Y02P80/00; Y02P80/30
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
103 words
A device having an electrostatically deflectable element, said device comprising: a) a substrate; b) first support posts having a fixed relationship with said substrate; c) at least one electrode supported by said first support posts and spaced from said substrate; d) second support posts having a fixed relationship with said substrate; and e) at least one deflectable mechanical element supported by said second support posts and spaced from said electrode, whereby said mechanical element moves relative to said substrate in response to an electrostatic signal supplied to said electrode and said spacing significantly reduces the effects of said substrate defects on said electrode.
Claim 2
Independent Claim
103 words
A device having an electrostatically deflectable element, said device comprising: a) a substrate; b) first support posts having a fixed relationship with said substrate; c) at least one electrode supported by said first support posts and spaced from said substrate; d) second support posts having a fixed relationship with said substrate; and e) at least one deflectable mechanical element supported by said second support posts and spaced from said electrode, whereby said mechanical element moves relative to said substrate in response to an electrostatic signal supplied to said electrode and said spacing significantly reduces the effects of said substrate defects on said electrode.
Claim 3
Dependent Claim
23 words
The device set forth in claim 1 wherein said substrate is a CMOS substrate having a traditional oxide or nitride protective top coating.
Claim 4
Dependent Claim
21 words
The device as set forth in claim 1, wherein said spacing between said substrate and said electrode is an air gap.
Claim 5
Dependent Claim
14 words
The device set forth in claim 2, wherein said mechanical element is a DMD.
Claim 6
Dependent Claim
23 words
The device set forth in claim 4, wherein said DMD comprises: a) at least one hinge; and b) at least one deflective beam.
Claim 7
Dependent Claim
16 words
The device set forth in claim 1, wherein said substrate comprises at least one integrated circuit.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-03-24 | 1995-09-23 | 1996-03-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-03-24 | 1999-09-23 | 2000-03-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-03-24 | 2003-09-23 | 2004-03-24 | $7700.00 | Window Closed / Lapsed |